v3.26.3
Inventories, net (Details) - USD ($)
$ in Thousands
Sep. 30, 2026
Dec. 31, 2025
Inventories, net    
Raw materials $ 291,597 $ 259,039
Work in process 61,100 51,761
Finished goods (completed systems) 23,644 18,210
Inventories, net $ 376,341 $ 329,010