0000001 - Document - Cover link:presentationLink link:calculationLink link:definitionLink 9952151 - Statement - CONDENSED CONSOLIDATED BALANCE SHEETS link:presentationLink link:calculationLink link:definitionLink 9952152 - Statement - CONSOLIDATED BALANCE SHEETS (Parentheticals) link:presentationLink link:calculationLink link:definitionLink 9952153 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS link:presentationLink link:calculationLink link:definitionLink 9952154 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF STOCKHOLDERS’ EQUITY link:presentationLink link:calculationLink link:definitionLink 9952155 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS link:presentationLink link:calculationLink link:definitionLink 9952156 - Disclosure - The accompanying unaudited condensed consolidated financial statements link:presentationLink link:calculationLink link:definitionLink 9952157 - Disclosure - Net Income Per Share link:presentationLink link:calculationLink link:definitionLink 9952158 - Disclosure - Cash and Cash Equivalents link:presentationLink link:calculationLink link:definitionLink 9952159 - Disclosure - Revenue Recognition link:presentationLink link:calculationLink link:definitionLink 9952160 - Disclosure - Disaggregation of Revenue link:presentationLink link:calculationLink link:definitionLink 9952161 - Disclosure - Accounts receivable, net, contract asset and contract liability link:presentationLink link:calculationLink link:definitionLink 9952162 - Disclosure - Inventory link:presentationLink link:calculationLink link:definitionLink 9952163 - Disclosure - Property, Plant and Equipment link:presentationLink link:calculationLink link:definitionLink 9952164 - Disclosure - Use of Estimates link:presentationLink link:calculationLink link:definitionLink 9952165 - Disclosure - Research and Development link:presentationLink link:calculationLink link:definitionLink 9952166 - Disclosure - Debt link:presentationLink link:calculationLink link:definitionLink 9952167 - Disclosure - Other Assets link:presentationLink link:calculationLink link:definitionLink 9952168 - Disclosure - Stock Options and Incentive Plans link:presentationLink link:calculationLink link:definitionLink 9952169 - Disclosure - Stock Repurchase Program link:presentationLink link:calculationLink link:definitionLink 9952170 - Disclosure - Lease Right-to-Use link:presentationLink link:calculationLink link:definitionLink 9952171 - Disclosure - Segment Reporting and Sales by Major Customer link:presentationLink link:calculationLink link:definitionLink 9952172 - Disclosure - Subsequent Events link:presentationLink link:calculationLink link:definitionLink 9955511 - Disclosure - The accompanying unaudited condensed consolidated financial statements (Policies) link:presentationLink link:calculationLink link:definitionLink 9955512 - Disclosure - Disaggregation of Revenue (Tables) link:presentationLink link:calculationLink link:definitionLink 9955513 - Disclosure - Accounts receivable, net, contract asset and contract liability (Tables) link:presentationLink link:calculationLink link:definitionLink 9955514 - Disclosure - Inventory (Tables) link:presentationLink link:calculationLink link:definitionLink 9955515 - Disclosure - Property, Plant and Equipment (Tables) link:presentationLink link:calculationLink link:definitionLink 9955516 - Disclosure - Stock Options and Incentive Plans (Tables) link:presentationLink link:calculationLink link:definitionLink 9955517 - Disclosure - Stock Repurchase Program (Tables) link:presentationLink link:calculationLink link:definitionLink 9955518 - Disclosure - Lease Right-to-Use (Tables) link:presentationLink link:calculationLink link:definitionLink 9955519 - Disclosure - Segment Reporting and Sales by Major Customer (Tables) link:presentationLink link:calculationLink link:definitionLink 9955520 - Disclosure - Cash and Cash Equivalents (Details) link:presentationLink link:calculationLink link:definitionLink 9955521 - Disclosure - Revenue Recognition (Details) link:presentationLink link:calculationLink link:definitionLink 9955522 - Disclosure - Disaggregation of Revenue (Details) link:presentationLink link:calculationLink link:definitionLink 9955523 - Disclosure - Accounts receivable, net, contract asset and contract liability - Accounts receivable, net, contract asset and contract liability (Details) link:presentationLink link:calculationLink link:definitionLink 9955524 - Disclosure - Accounts receivable, net, contract asset and contract liability - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955525 - Disclosure - Inventory - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955526 - Disclosure - Inventory - Schedule of Inventory (Details) link:presentationLink link:calculationLink link:definitionLink 9955527 - Disclosure - Property, Plant, and Equipment - Schedule of Property, Plant, and Equipment (Details) link:presentationLink link:calculationLink link:definitionLink 9955528 - Disclosure - Property, Plant and Equipment - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955529 - Disclosure - Property, Plant, and Equipment - Schedule of Property and Related Depreciation (Details) link:presentationLink link:calculationLink link:definitionLink 9955530 - Disclosure - Research and Development (Details) link:presentationLink link:calculationLink link:definitionLink 9955531 - Disclosure - Debt (Details) link:presentationLink link:calculationLink link:definitionLink 9955532 - Disclosure - Other Assets (Details) link:presentationLink link:calculationLink link:definitionLink 9955533 - Disclosure - Stock Options and Incentive Plans - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955534 - Disclosure - Stock Options and Incentive Plans - Restricted Stock Options Activity (Details) link:presentationLink link:calculationLink link:definitionLink 9955535 - Disclosure - Stock Repurchase Program - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955536 - Disclosure - Stock Repurchase Program - Schedule of Stock Purchases (Details) link:presentationLink link:calculationLink link:definitionLink 9955537 - Disclosure - Lease Right-to-Use - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955538 - Disclosure - Lease Right-to-Use - Finance Lease Right-of-use Assets (Details) link:presentationLink link:calculationLink link:definitionLink 9955539 - Disclosure - Lease Right-to-Use - Future Minimum Lease Payments (Details) link:presentationLink link:calculationLink link:definitionLink 9955539 - Disclosure - Lease Right-to-Use - Future Minimum Lease Payments (Details) link:presentationLink link:calculationLink link:definitionLink 9955540 - Disclosure - Lease Right-to-Use - Lease Cost (Details) link:presentationLink link:calculationLink link:definitionLink 9955541 - Disclosure - Segment Reporting and Sales by Major Customer - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955542 - Disclosure - Segment Reporting and Sales by Major Customer - Professional Services (Details) link:presentationLink link:calculationLink link:definitionLink 9955543 - Disclosure - Segment Reporting and Sales by Major Customer - Schedule of Revenue by Major Customers by Reporting Segments (Details) link:presentationLink link:calculationLink link:definitionLink 9955544 - Disclosure - Subsequent Events (Details) link:presentationLink link:calculationLink link:definitionLink