v3.26.1
Stock-Based Compensation - Fair value assumptions (Details) - Forge Nano, Inc. - $ / shares
6 Months Ended 12 Months Ended
Jun. 30, 2026
Dec. 31, 2025
Dec. 31, 2024
Stock-Based Compensation      
Average expected life (in years) 5 years 9 months 21 days 3 years 11 months 19 days 5 years 9 months 14 days
Risk-free interest rate 4.05% 3.74% 4.23%
Expected dividend yield 0.00% 0.00% 0.00%
Volatility 44.54% 39.06% 42.25%
Estimated fair value of options granted $ 39.71 $ 20.78 $ 15.42