v3.26.1
Related Party Notes Receivable (Details) - Series D Preferred Stock [Member] - Forge Nano, Inc. - USD ($)
$ in Thousands
1 Months Ended
Mar. 13, 2026
Mar. 31, 2025
Related Party Notes Receivable    
Notes receivable face amount $ 2,000  
Annual interest rate 6.00%  
Interest rate in the event of default 12.00%  
Late fee rate 5.00%  
Threshold period for payment 10 days  
Realted party equity investments $ 15,000  
Proceeds from related party equity investments 13,000 $ 37,800
Non cash value of equity investments from related [arties 2,000  
Adjustments to additional paid in capital for related party equity investment $ 2,000