<?xml version="1.0" encoding="US-ASCII" standalone="no"?>
<!--Generated by ThunderDome XBRL - 12:52PM UTC 2026-08-27--><xsd:schema xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:aray="http://www.accuray.com/20260630" xmlns:country="http://xbrl.sec.gov/country/2026" xmlns:currency="http://xbrl.sec.gov/currency/2026" xmlns:cyd="http://xbrl.sec.gov/cyd/2026" xmlns:dei="http://xbrl.sec.gov/dei/2026" xmlns:dtr-types="http://www.xbrl.org/dtr/type/2020-01-21" xmlns:ecd="http://xbrl.sec.gov/ecd/2026" xmlns:enum2="http://xbrl.org/2020/extensible-enumerations-2.0" xmlns:exch="http://xbrl.sec.gov/exch/2026" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:naics="http://xbrl.sec.gov/naics/2026" xmlns:sic="http://xbrl.sec.gov/sic/2026" xmlns:srt="http://fasb.org/srt/2026" xmlns:srt-types="http://fasb.org/srt-types/2026" xmlns:stpr="http://xbrl.sec.gov/stpr/2026" xmlns:us-gaap="http://fasb.org/us-gaap/2026" xmlns:us-types="http://fasb.org/us-types/2026" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xlink="http://www.w3.org/1999/xlink" attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://www.accuray.com/20260630">
  <xsd:import namespace="http://fasb.org/srt/2026" schemaLocation="https://xbrl.fasb.org/srt/2026/elts/srt-2026.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/ecd/2026" schemaLocation="https://xbrl.sec.gov/ecd/2026/ecd-2026.xsd"/>
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/dei/2026" schemaLocation="https://xbrl.sec.gov/dei/2026/dei-2026.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/exch/2026" schemaLocation="https://xbrl.sec.gov/exch/2026/exch-2026.xsd"/>
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/currency/2026" schemaLocation="https://xbrl.sec.gov/currency/2026/currency-2026.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/country/2026" schemaLocation="https://xbrl.sec.gov/country/2026/country-2026.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/naics/2026" schemaLocation="https://xbrl.sec.gov/naics/2026/naics-2026.xsd"/>
  <xsd:import namespace="http://www.xbrl.org/dtr/type/2020-01-21" schemaLocation="https://www.xbrl.org/dtr/type/2020-01-21/types.xsd"/>
  <xsd:import namespace="http://xbrl.org/2020/extensible-enumerations-2.0" schemaLocation="https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/stpr/2026" schemaLocation="https://xbrl.sec.gov/stpr/2026/stpr-2026.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/cyd-af-sub/2026" schemaLocation="https://xbrl.sec.gov/cyd/2026/cyd-af-sub-2026.xsd"/>
  <xsd:import namespace="http://xbrl.sec.gov/sic/2026" schemaLocation="https://xbrl.sec.gov/sic/2026/sic-2026.xsd"/>
  <xsd:import namespace="http://fasb.org/us-types/2026" schemaLocation="https://xbrl.fasb.org/us-gaap/2026/elts/us-types-2026.xsd"/>
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd"/>
  <xsd:import namespace="http://fasb.org/srt-types/2026" schemaLocation="https://xbrl.fasb.org/srt/2026/elts/srt-types-2026.xsd"/>
  <xsd:import namespace="http://fasb.org/us-gaap/2026" schemaLocation="https://xbrl.fasb.org/us-gaap/2026/elts/us-gaap-2026.xsd"/>
  <xsd:annotation>
    <xsd:appinfo>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="aray-20260630_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:type="simple"/>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="aray-20260630_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:type="simple"/>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="aray-20260630_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:type="simple"/>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="aray-20260630_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:type="simple"/>
      <link:roleType id="statement-document-and-entity-information" roleURI="http://www.accuray.com/20260630/role/statement-document-and-entity-information">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">000 - Document - Document And Entity Information</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-consolidated-balance-sheets" roleURI="http://www.accuray.com/20260630/role/statement-consolidated-balance-sheets">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">001 - Statement - Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-consolidated-balance-sheets-parentheticals" roleURI="http://www.accuray.com/20260630/role/statement-consolidated-balance-sheets-parentheticals">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">002 - Statement - Consolidated Balance Sheets (Parentheticals)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-consolidated-statements-of-operations-and-comprehensive-income-loss" roleURI="http://www.accuray.com/20260630/role/statement-consolidated-statements-of-operations-and-comprehensive-income-loss">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">003 - Statement - Consolidated Statements of Operations and Comprehensive Income (Loss)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-consolidated-statements-of-operations-and-comprehensive-income-loss-parentheticals" roleURI="http://www.accuray.com/20260630/role/statement-consolidated-statements-of-operations-and-comprehensive-income-loss-parentheticals">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">004 - Statement - Consolidated Statements of Operations and Comprehensive Income (Loss) (Parentheticals)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-consolidated-statements-of-stockholders-equity" roleURI="http://www.accuray.com/20260630/role/statement-consolidated-statements-of-stockholders-equity">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">005 - Statement - Consolidated Statements of Stockholders' Equity</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-consolidated-statements-of-cash-flows" roleURI="http://www.accuray.com/20260630/role/statement-consolidated-statements-of-cash-flows">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">006 - Statement - Consolidated Statements of Cash Flows</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-1-the-company-and-its-significant-accounting-policies" roleURI="http://www.accuray.com/20260630/role/statement-note-1-the-company-and-its-significant-accounting-policies">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995552 - Disclosure - Note 1 - The Company and Its Significant Accounting Policies</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-2-revenue" roleURI="http://www.accuray.com/20260630/role/statement-note-2-revenue">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995553 - Disclosure - Note 2 - Revenue</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995554 - Disclosure - Note 3 - Supplemental Financial Information</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-4-leases" roleURI="http://www.accuray.com/20260630/role/statement-note-4-leases">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995555 - Disclosure - Note 4 - Leases</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995556 - Disclosure - Note 5 - Derivative Financial Instruments</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-6-fair-value-measurements" roleURI="http://www.accuray.com/20260630/role/statement-note-6-fair-value-measurements">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995557 - Disclosure - Note 6 - Fair Value Measurements</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-7-debt" roleURI="http://www.accuray.com/20260630/role/statement-note-7-debt">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995558 - Disclosure - Note 7 - Debt</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-8-commitments-and-contingencies" roleURI="http://www.accuray.com/20260630/role/statement-note-8-commitments-and-contingencies">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995559 - Disclosure - Note 8 - Commitments and Contingencies</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-9-stockholders-equity" roleURI="http://www.accuray.com/20260630/role/statement-note-9-stockholders-equity">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995560 - Disclosure - Note 9 - Stockholders' Equity</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995561 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-11-joint-venture" roleURI="http://www.accuray.com/20260630/role/statement-note-11-joint-venture">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995562 - Disclosure - Note 11 - Joint Venture</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995563 - Disclosure - Note 12 - Income Taxes</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995564 - Disclosure - Note 13 - Retirement Plans</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-14-segment-disclosure" roleURI="http://www.accuray.com/20260630/role/statement-note-14-segment-disclosure">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995565 - Disclosure - Note 14 - Segment Disclosure</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-15-related-party" roleURI="http://www.accuray.com/20260630/role/statement-note-15-related-party">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995566 - Disclosure - Note 15 - Related Party</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-16-subsequent-events-" roleURI="http://www.accuray.com/20260630/role/statement-note-16-subsequent-events-">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995567 - Disclosure - Note 16 - Subsequent Events</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-significant-accounting-policies-policies" roleURI="http://www.accuray.com/20260630/role/statement-significant-accounting-policies-policies">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995571 - Disclosure - Significant Accounting Policies (Policies)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-1-the-company-and-its-significant-accounting-policies-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-1-the-company-and-its-significant-accounting-policies-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995572 - Disclosure - Note 1 - The Company and Its Significant Accounting Policies (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-2-revenue-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-2-revenue-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995573 - Disclosure - Note 2 - Revenue (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995574 - Disclosure - Note 3 - Supplemental Financial Information (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-4-leases-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-4-leases-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995575 - Disclosure - Note 4 - Leases (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995576 - Disclosure - Note 5 - Derivative Financial Instruments (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-6-fair-value-measurements-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-6-fair-value-measurements-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995577 - Disclosure - Note 6 - Fair Value Measurements (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-7-debt-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-7-debt-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995578 - Disclosure - Note 7 - Debt (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-8-commitments-and-contingencies-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-8-commitments-and-contingencies-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995579 - Disclosure - Note 8 - Commitments and Contingencies (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-9-stockholders-equity-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-9-stockholders-equity-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995580 - Disclosure - Note 9 - Stockholders' Equity (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995581 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-11-joint-venture-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-11-joint-venture-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995582 - Disclosure - Note 11 - Joint Venture (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995583 - Disclosure - Note 12 - Income Taxes (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995584 - Disclosure - Note 13 - Retirement Plans (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-14-segment-disclosure-tables" roleURI="http://www.accuray.com/20260630/role/statement-note-14-segment-disclosure-tables">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995585 - Disclosure - Note 14 - Segment Disclosure (Tables)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-1-the-company-and-its-significant-accounting-policies-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-1-the-company-and-its-significant-accounting-policies-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995586 - Disclosure - Note 1 - The Company and Its Significant Accounting Policies (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-1-the-company-and-its-significant-accounting-policies-schedule-of-earnings-per-share-details" roleURI="http://www.accuray.com/20260630/role/statement-note-1-the-company-and-its-significant-accounting-policies-schedule-of-earnings-per-share-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995587 - Disclosure - Note 1 - The Company and Its Significant Accounting Policies - Schedule of Earnings Per Share (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-2-revenue-1-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-2-revenue-1-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995588 - Disclosure - Note 2 - Revenue 1 (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-2-revenue-2-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-2-revenue-2-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995589 - Disclosure - Note 2 - Revenue 2 (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-2-revenue-changes-in-contract-assets-and-liabilities-details" roleURI="http://www.accuray.com/20260630/role/statement-note-2-revenue-changes-in-contract-assets-and-liabilities-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995590 - Disclosure - Note 2 - Revenue - Changes in Contract Assets and Liabilities (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-2-revenue-longterm-warranty-and-noncancellable-postwarranty-services-details" roleURI="http://www.accuray.com/20260630/role/statement-note-2-revenue-longterm-warranty-and-noncancellable-postwarranty-services-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995591 - Disclosure - Note 2 - Revenue - Long-term Warranty and Non-cancellable Post-warranty Services (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-2-revenue-longterm-warranty-and-noncancellable-postwarranty-services-2-details" roleURI="http://www.accuray.com/20260630/role/statement-note-2-revenue-longterm-warranty-and-noncancellable-postwarranty-services-2-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995592 - Disclosure - Note 2 - Revenue - Long-term Warranty and Non-cancellable Post-warranty Services 2 (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-2-revenue-expenses-related-to-capitalized-contract-costs-details" roleURI="http://www.accuray.com/20260630/role/statement-note-2-revenue-expenses-related-to-capitalized-contract-costs-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995593 - Disclosure - Note 2 - Revenue - Expenses Related to Capitalized Contract Costs (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-1-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-1-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995594 - Disclosure - Note 3 - Supplemental Financial Information 1 (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-2-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-2-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995595 - Disclosure - Note 3 - Supplemental Financial Information 2 (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-financing-receivables-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-financing-receivables-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995596 - Disclosure - Note 3 - Supplemental Financial Information - Financing Receivables (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-inventories-net-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-inventories-net-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995597 - Disclosure - Note 3 - Supplemental Financial Information - Inventories, Net (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-prepaid-and-other-current-assets-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-prepaid-and-other-current-assets-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995598 - Disclosure - Note 3 - Supplemental Financial Information - Prepaid and Other Current Assets (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-property-and-equipment-net-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-property-and-equipment-net-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995599 - Disclosure - Note 3 - Supplemental Financial Information - Property and Equipment, Net (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-goodwill-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-goodwill-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995600 - Disclosure - Note 3 - Supplemental Financial Information - Goodwill (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-other-assets-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-other-assets-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995601 - Disclosure - Note 3 - Supplemental Financial Information - Other Assets (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-other-accrued-liabilities-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-other-accrued-liabilities-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995602 - Disclosure - Note 3 - Supplemental Financial Information - Other Accrued Liabilities (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-interest-expense-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-interest-expense-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995603 - Disclosure - Note 3 - Supplemental Financial Information - Interest Expense (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-3-supplemental-financial-information-other-expense-income-net-details" roleURI="http://www.accuray.com/20260630/role/statement-note-3-supplemental-financial-information-other-expense-income-net-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995604 - Disclosure - Note 3 - Supplemental Financial Information - Other (Expense) Income, Net (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-4-leases-operating-lease-details" roleURI="http://www.accuray.com/20260630/role/statement-note-4-leases-operating-lease-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995605 - Disclosure - Note 4 - Leases - Operating Lease (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-4-leases-operating-lease-rightofuse-assets-and-operating-lease-liabilities-details" roleURI="http://www.accuray.com/20260630/role/statement-note-4-leases-operating-lease-rightofuse-assets-and-operating-lease-liabilities-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995606 - Disclosure - Note 4 - Leases - Operating Lease Right-of-use Assets and Operating Lease Liabilities (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-4-leases-operating-lease-weightedaverage-remaining-lease-term-and-discount-rate-details" roleURI="http://www.accuray.com/20260630/role/statement-note-4-leases-operating-lease-weightedaverage-remaining-lease-term-and-discount-rate-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995607 - Disclosure - Note 4 - Leases - Operating Lease Weighted-average Remaining Lease Term and Discount Rate (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-4-leases-operating-lease-liabilities-maturities-details" roleURI="http://www.accuray.com/20260630/role/statement-note-4-leases-operating-lease-liabilities-maturities-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995608 - Disclosure - Note 4 - Leases - Operating Lease Liabilities Maturities (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995609 - Disclosure - Note 5 - Derivative Financial Instruments (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-derivative-assets-and-liabilities-details" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-derivative-assets-and-liabilities-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995610 - Disclosure - Note 5 - Derivative Financial Instruments - Derivative Assets and Liabilities (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-derivative-assets-and-liabilities-2-details" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-derivative-assets-and-liabilities-2-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995611 - Disclosure - Note 5 - Derivative Financial Instruments - Derivative Assets and Liabilities 2 (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-outstanding-foreign-currency-forward-contracts-details" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-outstanding-foreign-currency-forward-contracts-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995612 - Disclosure - Note 5 - Derivative Financial Instruments - Outstanding Foreign Currency Forward Contracts (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-gains-and-losses-cash-flow-hedging-arrangements-details" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-gains-and-losses-cash-flow-hedging-arrangements-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995613 - Disclosure - Note 5 - Derivative Financial Instruments - Gains and Losses, Cash Flow Hedging Arrangements (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-outstanding-balance-sheet-hedge-contracts-details" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-outstanding-balance-sheet-hedge-contracts-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995614 - Disclosure - Note 5 - Derivative Financial Instruments - Outstanding Balance Sheet Hedge Contracts (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-gains-or-losses-derivative-financial-instruments-details" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-gains-or-losses-derivative-financial-instruments-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995615 - Disclosure - Note 5 - Derivative Financial Instruments - Gains or Losses, Derivative Financial Instruments (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-5-derivative-financial-instruments-gains-or-losses-derivative-financial-instruments-2-details" roleURI="http://www.accuray.com/20260630/role/statement-note-5-derivative-financial-instruments-gains-or-losses-derivative-financial-instruments-2-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995616 - Disclosure - Note 5 - Derivative Financial Instruments - Gains or Losses, Derivative Financial Instruments 2 (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-6-fair-value-measurements-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-6-fair-value-measurements-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995617 - Disclosure - Note 6 - Fair Value Measurements (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-6-fair-value-measurements-changes-in-fair-value-penny-warrants-details" roleURI="http://www.accuray.com/20260630/role/statement-note-6-fair-value-measurements-changes-in-fair-value-penny-warrants-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995618 - Disclosure - Note 6 - Fair Value Measurements - Changes in Fair Value, Penny Warrants (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-6-fair-value-measurements-carrying-value-and-estimated-fair-value-375-convertible-senior-notes-details" roleURI="http://www.accuray.com/20260630/role/statement-note-6-fair-value-measurements-carrying-value-and-estimated-fair-value-375-convertible-senior-notes-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995619 - Disclosure - Note 6 - Fair Value Measurements - Carrying Value and Estimated Fair Value, 3.75% Convertible Senior Notes (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-6-fair-value-measurements-carrying-value-and-estimated-fair-value-375-convertible-senior-notes-details-parentheticals" roleURI="http://www.accuray.com/20260630/role/statement-note-6-fair-value-measurements-carrying-value-and-estimated-fair-value-375-convertible-senior-notes-details-parentheticals">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995620 - Disclosure - Note 6 - Fair Value Measurements - Carrying Value and Estimated Fair Value, 3.75% Convertible Senior Notes (Details) (Parentheticals)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-7-debt-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-7-debt-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995621 - Disclosure - Note 7 - Debt (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-7-debt-outstanding-debt-details" roleURI="http://www.accuray.com/20260630/role/statement-note-7-debt-outstanding-debt-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995622 - Disclosure - Note 7 - Debt - Outstanding Debt (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-7-debt-interest-expense-details" roleURI="http://www.accuray.com/20260630/role/statement-note-7-debt-interest-expense-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995623 - Disclosure - Note 7 - Debt - Interest Expense (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-7-debt-weighted-average-effective-interest-rate-details" roleURI="http://www.accuray.com/20260630/role/statement-note-7-debt-weighted-average-effective-interest-rate-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995624 - Disclosure - Note 7 - Debt - Weighted Average Effective Interest Rate (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-8-commitments-and-contingencies-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-8-commitments-and-contingencies-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995625 - Disclosure - Note 8 - Commitments and Contingencies (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-8-commitments-and-contingencies-schedule-of-debt-maturity-details" roleURI="http://www.accuray.com/20260630/role/statement-note-8-commitments-and-contingencies-schedule-of-debt-maturity-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995626 - Disclosure - Note 8 - Commitments and Contingencies - Schedule of Debt Maturity (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-8-commitments-and-contingencies-royalty-expense-and-royalty-payments-details" roleURI="http://www.accuray.com/20260630/role/statement-note-8-commitments-and-contingencies-royalty-expense-and-royalty-payments-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995627 - Disclosure - Note 8 - Commitments and Contingencies - Royalty Expense and Royalty Payments (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-8-commitments-and-contingencies-summary-of-restructuring-charges-details" roleURI="http://www.accuray.com/20260630/role/statement-note-8-commitments-and-contingencies-summary-of-restructuring-charges-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995628 - Disclosure - Note 8 - Commitments and Contingencies - Summary of Restructuring Charges (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-9-stockholders-equity-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-9-stockholders-equity-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995629 - Disclosure - Note 9 - Stockholders' Equity (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-9-stockholders-equity-schedule-of-accumulated-other-comprehensive-income-loss-details" roleURI="http://www.accuray.com/20260630/role/statement-note-9-stockholders-equity-schedule-of-accumulated-other-comprehensive-income-loss-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995630 - Disclosure - Note 9 - Stockholders' Equity - Schedule of Accumulated Other Comprehensive Income (Loss) (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995631 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-schedule-of-sharebased-compensation-charges-details" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-schedule-of-sharebased-compensation-charges-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995632 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan - Schedule of Share-based Compensation Charges (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-schedule-of-sharebased-compensation-charges-2-details" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-schedule-of-sharebased-compensation-charges-2-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995633 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan - Schedule of Share-based Compensation Charges 2 (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-option-activity-details" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-option-activity-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995634 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan - Option Activity (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-outstanding-and-exercisable-options-details" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-outstanding-and-exercisable-options-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995635 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan - Outstanding and Exercisable Options (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-other-award-activity-details" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-other-award-activity-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995636 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan - Other Award Activity (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-employee-stock-purchase-plan-valuation-assumptions-details" roleURI="http://www.accuray.com/20260630/role/statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-employee-stock-purchase-plan-valuation-assumptions-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995637 - Disclosure - Note 10 - Stock Incentive Plan and Employee Stock Purchase Plan - Employee Stock Purchase Plan Valuation Assumptions (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-11-joint-venture-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-11-joint-venture-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995638 - Disclosure - Note 11 - Joint Venture (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-11-joint-venture-summarized-financial-information-details" roleURI="http://www.accuray.com/20260630/role/statement-note-11-joint-venture-summarized-financial-information-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995639 - Disclosure - Note 11 - Joint Venture - Summarized Financial Information (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995640 - Disclosure - Note 12 - Income Taxes (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes-schedule-of-income-before-income-taxes-details" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes-schedule-of-income-before-income-taxes-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995641 - Disclosure - Note 12 - Income Taxes - Schedule of Income Before Income Taxes (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes-provision-for-income-taxes-details" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes-provision-for-income-taxes-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995642 - Disclosure - Note 12 - Income Taxes - Provision for Income Taxes (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes-income-tax-reconciliation-details" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes-income-tax-reconciliation-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995643 - Disclosure - Note 12 - Income Taxes - Income Tax Reconciliation (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes-schedule-of-income-taxes-paid-details" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes-schedule-of-income-taxes-paid-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995644 - Disclosure - Note 12 - Income Taxes - Schedule of Income Taxes Paid (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes-deferred-tax-assets-liabilities-details" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes-deferred-tax-assets-liabilities-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995645 - Disclosure - Note 12 - Income Taxes - Deferred Tax Assets (Liabilities) (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-12-income-taxes-schedule-of-unrecognized-tax-benefits-details" roleURI="http://www.accuray.com/20260630/role/statement-note-12-income-taxes-schedule-of-unrecognized-tax-benefits-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995646 - Disclosure - Note 12 - Income Taxes - Schedule of Unrecognized Tax Benefits (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995647 - Disclosure - Note 13 - Retirement Plans (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-funded-status-of-defined-benefit-pension-plan-details" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-funded-status-of-defined-benefit-pension-plan-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995648 - Disclosure - Note 13 - Retirement Plans - Funded Status of Defined Benefit Pension Plan (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-benefit-plan-amounts-recognized-in-accumulated-other-comprehensive-loss-details" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-benefit-plan-amounts-recognized-in-accumulated-other-comprehensive-loss-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995649 - Disclosure - Note 13 - Retirement Plans - Benefit Plan Amounts Recognized in Accumulated Other Comprehensive Loss (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-schedule-of-projected-benefit-obligation-details" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-schedule-of-projected-benefit-obligation-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995650 - Disclosure - Note 13 - Retirement Plans - Schedule of Projected Benefit Obligation (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-schedule-of-net-periodic-benefit-cost-details" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-schedule-of-net-periodic-benefit-cost-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995651 - Disclosure - Note 13 - Retirement Plans - Schedule of Net Periodic Benefit Cost (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-amounts-to-be-recognized-in-accumulated-other-comprehensive-loss-details" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-amounts-to-be-recognized-in-accumulated-other-comprehensive-loss-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995652 - Disclosure - Note 13 - Retirement Plans - Amounts to be Recognized in Accumulated Other Comprehensive Loss (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-assumptions-used-in-net-periodic-benefit-cost-and-obligation-details" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-assumptions-used-in-net-periodic-benefit-cost-and-obligation-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995653 - Disclosure - Note 13 - Retirement Plans - Assumptions Used in Net Periodic Benefit Cost and Obligation (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-13-retirement-plans-estimated-future-benefit-payments-details" roleURI="http://www.accuray.com/20260630/role/statement-note-13-retirement-plans-estimated-future-benefit-payments-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995654 - Disclosure - Note 13 - Retirement Plans - Estimated Future Benefit Payments (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-14-segment-disclosure-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-14-segment-disclosure-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995655 - Disclosure - Note 14 - Segment Disclosure (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-14-segment-disclosure-revenue-by-geographic-area-details" roleURI="http://www.accuray.com/20260630/role/statement-note-14-segment-disclosure-revenue-by-geographic-area-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995656 - Disclosure - Note 14 - Segment Disclosure - Revenue by Geographic Area (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-14-segment-disclosure-concentration-of-segment-revenues-details" roleURI="http://www.accuray.com/20260630/role/statement-note-14-segment-disclosure-concentration-of-segment-revenues-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995657 - Disclosure - Note 14 - Segment Disclosure - Concentration of Segment Revenues (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-14-segment-disclosure-longlived-assets-by-geographic-area-details" roleURI="http://www.accuray.com/20260630/role/statement-note-14-segment-disclosure-longlived-assets-by-geographic-area-details">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995658 - Disclosure - Note 14 - Segment Disclosure - Long-lived Assets by Geographic Area (Details)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-15-related-party-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-15-related-party-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995659 - Disclosure - Note 15 - Related Party (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
      <link:roleType id="statement-note-16-subsequent-events-details-textual" roleURI="http://www.accuray.com/20260630/role/statement-note-16-subsequent-events-details-textual">
        <link:definition xmlns="http://www.xbrl.org/2003/linkbase">995660 - Disclosure - Note 16 - Subsequent Events (Details Textual)</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
      </link:roleType>
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:element id="aray_AccruedCompensationAndAccruedLiabilities" name="AccruedCompensationAndAccruedLiabilities" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_AccruedConsultingCurrent" name="AccruedConsultingCurrent" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_AccumulatedPaidInKindInterest" name="AccumulatedPaidInKindInterest" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_AccurayIncMember" name="AccurayIncMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_AmortizationForFinancingCostsAndDiscountForWarrantsIssuedToLenders" name="AmortizationForFinancingCostsAndDiscountForWarrantsIssuedToLenders" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_AssetImpairmentMember" name="AssetImpairmentMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_BoardOfDirectorsMember" name="BoardOfDirectorsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_CapitalizedContractCostExpenses" name="CapitalizedContractCostExpenses" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_CashPaymentsForPurchaseAgreement" name="CashPaymentsForPurchaseAgreement" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInCurrentDeferredRevenueValue" name="ChangeInCurrentDeferredRevenueValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInCustomerAdvancesPercentage" name="ChangeInCustomerAdvancesPercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInCustomerAdvancesValue" name="ChangeInCustomerAdvancesValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInDeferredRevenueCurrentPercentage" name="ChangeInDeferredRevenueCurrentPercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInDeferredRevenueNoncurrentPercentage" name="ChangeInDeferredRevenueNoncurrentPercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInDeferredRevenueNoncurrentValue" name="ChangeInDeferredRevenueNoncurrentValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInInterestReceivableCurrentPercentage" name="ChangeInInterestReceivableCurrentPercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInInterestReceivableCurrentValue" name="ChangeInInterestReceivableCurrentValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInInterestReceivableNoncurrent" name="ChangeInInterestReceivableNoncurrent" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInInterestReceivableNoncurrentPercentage" name="ChangeInInterestReceivableNoncurrentPercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInLongTermAccountsReceivablePercentage" name="ChangeInLongTermAccountsReceivablePercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInLongtermAccountsReceivableValue" name="ChangeInLongtermAccountsReceivableValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInUnbilledAccountsReceivableCurrentPercentage" name="ChangeInUnbilledAccountsReceivableCurrentPercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ChangeInUnbilledAccountsReceivableCurrentValue" name="ChangeInUnbilledAccountsReceivableCurrentValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ClassOfWarrantOrRightAntidilutionProtectionThresholdSharePrice" name="ClassOfWarrantOrRightAntidilutionProtectionThresholdSharePrice" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:perShareItemType" xbrli:periodType="instant"/>
  <xsd:element id="aray_ClassOfWarrantOrRightCancelledDuringPeriod" name="ClassOfWarrantOrRightCancelledDuringPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:sharesItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ClassOfWarrantOrRightExercisedDuringPeriod" name="ClassOfWarrantOrRightExercisedDuringPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:sharesItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ClassOfWarrantOrRightIssuedDuringPeriod" name="ClassOfWarrantOrRightIssuedDuringPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:sharesItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ClassOfWarrantOrRightIssuedDuringPeriodValue" name="ClassOfWarrantOrRightIssuedDuringPeriodValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ClassOfWarrantOrRightIssuedExercisePrice" name="ClassOfWarrantOrRightIssuedExercisePrice" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:perShareItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_CnncHighEnergyEquipmentMember" name="CnncHighEnergyEquipmentMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_CommissionsDueToThirdParties" name="CommissionsDueToThirdParties" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_CommonStockOutstandingMember" name="CommonStockOutstandingMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ComputerAndOfficeEquipmentMember" name="ComputerAndOfficeEquipmentMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ConsultingFeeAndIncentiveTargetBonusExpense" name="ConsultingFeeAndIncentiveTargetBonusExpense" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ConsultingServiceMember" name="ConsultingServiceMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ContractWithCustomerAdvancesCurrent" name="ContractWithCustomerAdvancesCurrent" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_ContractualInterestCoupon" name="ContractualInterestCoupon" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ConversionOfFinancingAgreementDebtIntoSeriesAConvertiblePreferredStockMember" name="ConversionOfFinancingAgreementDebtIntoSeriesAConvertiblePreferredStockMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ConvertibleNoteExchangeMember" name="ConvertibleNoteExchangeMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ConvertibleNotesAndTermLoanFacilityMember" name="ConvertibleNotesAndTermLoanFacilityMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ConvertibleSeniorNotesDueJune12026Member" name="ConvertibleSeniorNotesDueJune12026Member" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_CreditFacilityRevolvingMember" name="CreditFacilityRevolvingMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_CustomerAdvanceCurrent" name="CustomerAdvanceCurrent" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DebtInstrumentExchangedValue" name="DebtInstrumentExchangedValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DebtInstrumentFloorRate" name="DebtInstrumentFloorRate" nillable="true" substitutionGroup="xbrli:item" type="xbrli:pureItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_DebtInstrumentOriginalIssuanceDiscountFee" name="DebtInstrumentOriginalIssuanceDiscountFee" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DebtInstrumentPaymentinkindInterestRate" name="DebtInstrumentPaymentinkindInterestRate" nillable="true" substitutionGroup="xbrli:item" type="xbrli:pureItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_DebtInstrumentPaymentinkindRateApplicableMargin" name="DebtInstrumentPaymentinkindRateApplicableMargin" nillable="true" substitutionGroup="xbrli:item" type="xbrli:pureItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_DebtInstrumentPaymentinkindRateInterestRate" name="DebtInstrumentPaymentinkindRateInterestRate" nillable="true" substitutionGroup="xbrli:item" type="xbrli:pureItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_DebtInstrumentPaymentinkindRateMaximum" name="DebtInstrumentPaymentinkindRateMaximum" nillable="true" substitutionGroup="xbrli:item" type="xbrli:pureItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" name="DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_DebtInstrumentRepurchasePriceFundamentalChange" name="DebtInstrumentRepurchasePriceFundamentalChange" nillable="true" substitutionGroup="xbrli:item" type="xbrli:pureItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_December2025PennyWarrantsMember" name="December2025PennyWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_December2025PremiumAndSuperPremiumWarrantsMember" name="December2025PremiumAndSuperPremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_December2025PremiumWarrantsMember" name="December2025PremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_December2025SuperPremiumWarrantsMember" name="December2025SuperPremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_DedicationCapitalAndMrMayerMember" name="DedicationCapitalAndMrMayerMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_DeferredGrossProfitOnSalesToTheJointVentureNet" name="DeferredGrossProfitOnSalesToTheJointVentureNet" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_DeferredGrossProfitOnSalesToTheJv" name="DeferredGrossProfitOnSalesToTheJv" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_DeferredGrossProfitRecognizedOnSalesToTheJv" name="DeferredGrossProfitRecognizedOnSalesToTheJv" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_DeferredIntraentityGrossProfit" name="DeferredIntraentityGrossProfit" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DeferredTaxAssetFixedAssetsAndIntangibles" name="DeferredTaxAssetFixedAssetsAndIntangibles" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DeferredTaxAssetUniformCapitalization" name="DeferredTaxAssetUniformCapitalization" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DeferredTaxAssetsCapitalizedResearchAndDevelopment" name="DeferredTaxAssetsCapitalizedResearchAndDevelopment" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DeferredTaxAssetsLeaseLiability" name="DeferredTaxAssetsLeaseLiability" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DeferredTaxLiabilitiesContractAcquisitionCosts" name="DeferredTaxLiabilitiesContractAcquisitionCosts" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DeferredTaxLiabilitiesUnrepatriatedDistributableReserves" name="DeferredTaxLiabilitiesUnrepatriatedDistributableReserves" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DefinedBenefitPlanExpectedFutureBenefitPayment" name="DefinedBenefitPlanExpectedFutureBenefitPayment" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_DelayedDrawFacilityMember" name="DelayedDrawFacilityMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_DelayedDrawTermLaonMember" name="DelayedDrawTermLaonMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_DividendsReceivableCurrent" name="DividendsReceivableCurrent" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_DocumentAndEntityInformation" name="DocumentAndEntityInformation" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_DutyDrawbackReceivables" name="DutyDrawbackReceivables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_DutyDrawbackReceivablesCurrent" name="DutyDrawbackReceivablesCurrent" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_EffectiveIncomeTaxRateReconciliationChangeInEquityAwardValuation" name="EffectiveIncomeTaxRateReconciliationChangeInEquityAwardValuation" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_EffectiveIncomeTaxRateReconciliationChangeInEquityAwardValuationPercentage" name="EffectiveIncomeTaxRateReconciliationChangeInEquityAwardValuationPercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_EffectiveIncomeTaxRateReconciliationTaxCreditResearchAndDevelopmentAmount" name="EffectiveIncomeTaxRateReconciliationTaxCreditResearchAndDevelopmentAmount" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_EffectiveIncomeTaxRateReconciliationTaxCreditResearchAndDevelopmentPercent" name="EffectiveIncomeTaxRateReconciliationTaxCreditResearchAndDevelopmentPercent" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_EimeaMember" name="EimeaMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_EmployeeBenefitPlanMember" name="EmployeeBenefitPlanMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_EmployeeStockOwnershipPlanEsopPercentageOfSharePrice" name="EmployeeStockOwnershipPlanEsopPercentageOfSharePrice" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_EmployeeStockPurchasePlanMember" name="EmployeeStockPurchasePlanMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_EquityIncentivePlanMember" name="EquityIncentivePlanMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_EquityMethodDividendDeclared" name="EquityMethodDividendDeclared" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_ExercisePrice1Member" name="ExercisePrice1Member" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ExercisePrice2Member" name="ExercisePrice2Member" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_FacilitiesMember" name="FacilitiesMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_FairValueOfWarrantsIssuedWithDebt" name="FairValueOfWarrantsIssuedWithDebt" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_FinancingObligationFromUncollectedIeepaRefunds" name="FinancingObligationFromUncollectedIeepaRefunds" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_HedgeContractMember" name="HedgeContractMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_IeepaFinancingArrangementLiability" name="IeepaFinancingArrangementLiability" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_IeepaRefundFinancingCosts" name="IeepaRefundFinancingCosts" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_IeepaTariffRefundReceivable" name="IeepaTariffRefundReceivable" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_IeepaTariffRefundsInterestOnApprovedClaims" name="IeepaTariffRefundsInterestOnApprovedClaims" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_IeepaTariffRefundsTotalApprovedClaims" name="IeepaTariffRefundsTotalApprovedClaims" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_ImplementationAndOtherCostsMember" name="ImplementationAndOtherCostsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_IncreaseDecreaseCustomerAdvances" name="IncreaseDecreaseCustomerAdvances" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_InterestExpenseDisclosureTableTextBlock" name="InterestExpenseDisclosureTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_InterestExpenseTable" name="InterestExpenseTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_June2025PennyWarrantsMember" name="June2025PennyWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_LongtermWarrantyAndNoncancellablePostwarrantyServicesMember" name="LongtermWarrantyAndNoncancellablePostwarrantyServicesMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_May2026PennyWarrantsMember" name="May2026PennyWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_May2026PremiumAndSuperPremiumWarrantsMember" name="May2026PremiumAndSuperPremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_May2026PremiumWarrantsMember" name="May2026PremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_May2026SuperPremiumWarrantsMember" name="May2026SuperPremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_MrMayerMember" name="MrMayerMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_NetRecognizedDeferredGrossProfitOnSalesToTheJv" name="NetRecognizedDeferredGrossProfitOnSalesToTheJv" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_NoteToFinancialStatementDetailsTextual" name="NoteToFinancialStatementDetailsTextual" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_NotesToFinancialStatements" name="NotesToFinancialStatements" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_NotesToFinancialStatementsAbstract" name="NotesToFinancialStatementsAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_OperatingLeaseDisclosureTableTextBlock" name="OperatingLeaseDisclosureTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_OperatingLeaseLiabilitiesNetOfOperatingLeaseRightofuseAssets" name="OperatingLeaseLiabilitiesNetOfOperatingLeaseRightofuseAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_OperatingLeaseLiabilityAddition" name="OperatingLeaseLiabilityAddition" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_OperatingLeaseLiabilityRepaymentAndInterestAccretion" name="OperatingLeaseLiabilityRepaymentAndInterestAccretion" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_OperatingLeaseRightofuseAssetAddition" name="OperatingLeaseRightofuseAssetAddition" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_OperatingLeaseRightofuseAssetsAndOperatingLeaseLiabilitiesTableTextBlock" name="OperatingLeaseRightofuseAssetsAndOperatingLeaseLiabilitiesTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_OtherAccruedLiabilitiesTable" name="OtherAccruedLiabilitiesTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_OtherAssetsTable" name="OtherAssetsTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_OtherComprehensiveIncomeLossDefinedBenefitPlanCurtailmentGainLossBeforeTax" name="OtherComprehensiveIncomeLossDefinedBenefitPlanCurtailmentGainLossBeforeTax" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_OtherComprehensiveIncomeLossDefinedBenefitPlanSettlementGainLossBeforeTax" name="OtherComprehensiveIncomeLossDefinedBenefitPlanSettlementGainLossBeforeTax" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_OtherExpenseIncomeTable" name="OtherExpenseIncomeTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_OtherNonoperatingIncomeExpenseNet" name="OtherNonoperatingIncomeExpenseNet" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_OtherNonoperatingIncomeExpenseOtherNet" name="OtherNonoperatingIncomeExpenseOtherNet" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_OtherTaxAuthoritiesMember" name="OtherTaxAuthoritiesMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_OwnershipPercentage" name="OwnershipPercentage" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:percentItemType" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_PRSAMember" name="PRSAMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_PayableToPurchaserOfIeepaRefundRights" name="PayableToPurchaserOfIeepaRefundRights" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_PaymentForCapitalizedCostsForSoftwareToBeSold" name="PaymentForCapitalizedCostsForSoftwareToBeSold" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_PaymentsForIeepaRefundsToThirdpartyPurchaser" name="PaymentsForIeepaRefundsToThirdpartyPurchaser" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_PennyWarrantsMember" name="PennyWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_PerformanceShareAwardsMember" name="PerformanceShareAwardsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_PerformanceShareUnitsMember" name="PerformanceShareUnitsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_PolicyTable" name="PolicyTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_PremiumAndSuperPremiumWarrantsMember" name="PremiumAndSuperPremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_PremiumWarrantsMember" name="PremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_PrepaidAndOtherCurrentAssetsTable" name="PrepaidAndOtherCurrentAssetsTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_PrepaidCommissions" name="PrepaidCommissions" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_PrepaidDuesAndReceivables" name="PrepaidDuesAndReceivables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_ProceedsFromIeepaFinancingAgreement" name="ProceedsFromIeepaFinancingAgreement" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ProceedsFromIeepaTariffRefunds" name="ProceedsFromIeepaTariffRefunds" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_PropertyPlantAndEquipmentNetAndOperatingLeaseRightofuseAssets" name="PropertyPlantAndEquipmentNetAndOperatingLeaseRightofuseAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_ProportionalShareOfEquityInvestmentInJointVenture" name="ProportionalShareOfEquityInvestmentInJointVenture" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element abstract="true" id="aray_RSAAndPRSAMember" name="RSAAndPRSAMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ReferenceRateMember" name="ReferenceRateMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_RelatedPartyTransactionAnnualBaseFee" name="RelatedPartyTransactionAnnualBaseFee" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_RelatedPartyTransactionGuaranteedCashIncentive" name="RelatedPartyTransactionGuaranteedCashIncentive" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_RelatedPartyTransactionMaximumCashIncentive" name="RelatedPartyTransactionMaximumCashIncentive" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_RelatedPartyTransactionServiceDuration" name="RelatedPartyTransactionServiceDuration" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_RemainingPortionOfThePerformanceObligationMember" name="RemainingPortionOfThePerformanceObligationMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_RestrictedStockAwardsMember" name="RestrictedStockAwardsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_ReverseStockSplitMember" name="ReverseStockSplitMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_RoyaltyAgreementMember" name="RoyaltyAgreementMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_RoyaltyExpenseAndRoyaltyPaymentsTableTextBlock" name="RoyaltyExpenseAndRoyaltyPaymentsTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ScheduleOfIncomeTaxesPaidTableTextBlock" name="ScheduleOfIncomeTaxesPaidTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_ScheduleOfPrepaidAndOtherCurrentAssetsTableTextBlock" name="ScheduleOfPrepaidAndOtherCurrentAssetsTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_SecuritiesPurchaseAgreementMember" name="SecuritiesPurchaseAgreementMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_SecuritiesPurchaseAgreementWarrantsMember" name="SecuritiesPurchaseAgreementWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_SeriesAConvertiblePreferredStockMember" name="SeriesAConvertiblePreferredStockMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_SharebasedCompensationArrangementBySharebasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodGrantDateFairValue" name="SharebasedCompensationArrangementBySharebasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodGrantDateFairValue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_ShippingAndHandlingPolicyTextBlock" name="ShippingAndHandlingPolicyTextBlock" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_SuperPremiumWarrantsMember" name="SuperPremiumWarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_SupplementalFinancialInformationTable" name="SupplementalFinancialInformationTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_TcwAssetManagementCompanyLlcMember" name="TcwAssetManagementCompanyLlcMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_TermLoanFacilitiesDue2030Member" name="TermLoanFacilitiesDue2030Member" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_TermLoanFacilitiesMember" name="TermLoanFacilitiesMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_TermLoanFacilityMember" name="TermLoanFacilityMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_The2016PlanMember" name="The2016PlanMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_TheMay2026WarrantsMember" name="TheMay2026WarrantsMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_TotalWorldMember" name="TotalWorldMember" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:domainItemType" xbrli:periodType="duration"/>
  <xsd:element id="aray_TransferOfLeaseLiabilitiesToLeaseholdImprovements" name="TransferOfLeaseLiabilitiesToLeaseholdImprovements" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_TransferOfOtherAssetsToPropertyAndEquipment" name="TransferOfOtherAssetsToPropertyAndEquipment" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration"/>
  <xsd:element id="aray_TransfersFromInventoryToPrepaidAndOtherAssets" name="TransfersFromInventoryToPrepaidAndOtherAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_TransfersFromInventoryToPropertyAndEquipmentNet" name="TransfersFromInventoryToPropertyAndEquipmentNet" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_UnpaidCapitalizedSoftwareCostsToBeSold" name="UnpaidCapitalizedSoftwareCostsToBeSold" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration"/>
  <xsd:element id="aray_UnrecognizedTaxBenefitsThatWouldNotImpactEffectiveIncomeTaxExpenseBeforeConsiderationOfValuationAllowance" name="UnrecognizedTaxBenefitsThatWouldNotImpactEffectiveIncomeTaxExpenseBeforeConsiderationOfValuationAllowance" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant"/>
  <xsd:element id="aray_ValueAddedTaxLiabilities" name="ValueAddedTaxLiabilities" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant"/>
  <xsd:element id="aray_WeightedAverageEffectiveInterestRateTableTextBlock" name="WeightedAverageEffectiveInterestRateTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-1-the-company-and-its-significant-accounting-policies-schedule-of-earnings-per-share-details" name="statement-statement-note-1-the-company-and-its-significant-accounting-policies-schedule-of-earnings-per-share-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-1-the-company-and-its-significant-accounting-policies-tables" name="statement-statement-note-1-the-company-and-its-significant-accounting-policies-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-employee-stock-purchase-plan-valuation-assumptions-details" name="statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-employee-stock-purchase-plan-valuation-assumptions-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-option-activity-details" name="statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-option-activity-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-other-award-activity-details" name="statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-other-award-activity-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-outstanding-and-exercisable-options-details" name="statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-outstanding-and-exercisable-options-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-schedule-of-sharebased-compensation-charges-2-details" name="statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-schedule-of-sharebased-compensation-charges-2-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-schedule-of-sharebased-compensation-charges-details" name="statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-schedule-of-sharebased-compensation-charges-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-tables" name="statement-statement-note-10-stock-incentive-plan-and-employee-stock-purchase-plan-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-11-joint-venture-summarized-financial-information-details" name="statement-statement-note-11-joint-venture-summarized-financial-information-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-11-joint-venture-tables" name="statement-statement-note-11-joint-venture-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-12-income-taxes-deferred-tax-assets-liabilities-details" name="statement-statement-note-12-income-taxes-deferred-tax-assets-liabilities-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-12-income-taxes-income-tax-reconciliation-details" name="statement-statement-note-12-income-taxes-income-tax-reconciliation-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-12-income-taxes-provision-for-income-taxes-details" name="statement-statement-note-12-income-taxes-provision-for-income-taxes-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-12-income-taxes-schedule-of-income-before-income-taxes-details" name="statement-statement-note-12-income-taxes-schedule-of-income-before-income-taxes-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-12-income-taxes-schedule-of-income-taxes-paid-details" name="statement-statement-note-12-income-taxes-schedule-of-income-taxes-paid-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-12-income-taxes-schedule-of-unrecognized-tax-benefits-details" name="statement-statement-note-12-income-taxes-schedule-of-unrecognized-tax-benefits-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-12-income-taxes-tables" name="statement-statement-note-12-income-taxes-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-13-retirement-plans-amounts-to-be-recognized-in-accumulated-other-comprehensive-loss-details" name="statement-statement-note-13-retirement-plans-amounts-to-be-recognized-in-accumulated-other-comprehensive-loss-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-13-retirement-plans-assumptions-used-in-net-periodic-benefit-cost-and-obligation-details" name="statement-statement-note-13-retirement-plans-assumptions-used-in-net-periodic-benefit-cost-and-obligation-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-13-retirement-plans-benefit-plan-amounts-recognized-in-accumulated-other-comprehensive-loss-details" name="statement-statement-note-13-retirement-plans-benefit-plan-amounts-recognized-in-accumulated-other-comprehensive-loss-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-13-retirement-plans-estimated-future-benefit-payments-details" name="statement-statement-note-13-retirement-plans-estimated-future-benefit-payments-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-13-retirement-plans-funded-status-of-defined-benefit-pension-plan-details" name="statement-statement-note-13-retirement-plans-funded-status-of-defined-benefit-pension-plan-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-13-retirement-plans-schedule-of-net-periodic-benefit-cost-details" name="statement-statement-note-13-retirement-plans-schedule-of-net-periodic-benefit-cost-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-13-retirement-plans-schedule-of-projected-benefit-obligation-details" name="statement-statement-note-13-retirement-plans-schedule-of-projected-benefit-obligation-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-13-retirement-plans-tables" name="statement-statement-note-13-retirement-plans-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-14-segment-disclosure-concentration-of-segment-revenues-details" name="statement-statement-note-14-segment-disclosure-concentration-of-segment-revenues-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-14-segment-disclosure-longlived-assets-by-geographic-area-details" name="statement-statement-note-14-segment-disclosure-longlived-assets-by-geographic-area-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-14-segment-disclosure-revenue-by-geographic-area-details" name="statement-statement-note-14-segment-disclosure-revenue-by-geographic-area-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-14-segment-disclosure-tables" name="statement-statement-note-14-segment-disclosure-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-2-revenue-changes-in-contract-assets-and-liabilities-details" name="statement-statement-note-2-revenue-changes-in-contract-assets-and-liabilities-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-2-revenue-expenses-related-to-capitalized-contract-costs-details" name="statement-statement-note-2-revenue-expenses-related-to-capitalized-contract-costs-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-2-revenue-longterm-warranty-and-noncancellable-postwarranty-services-2-details" name="statement-statement-note-2-revenue-longterm-warranty-and-noncancellable-postwarranty-services-2-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-2-revenue-longterm-warranty-and-noncancellable-postwarranty-services-details" name="statement-statement-note-2-revenue-longterm-warranty-and-noncancellable-postwarranty-services-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-2-revenue-tables" name="statement-statement-note-2-revenue-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-financing-receivables-details" name="statement-statement-note-3-supplemental-financial-information-financing-receivables-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-goodwill-details" name="statement-statement-note-3-supplemental-financial-information-goodwill-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-interest-expense-details" name="statement-statement-note-3-supplemental-financial-information-interest-expense-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-inventories-net-details" name="statement-statement-note-3-supplemental-financial-information-inventories-net-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-other-accrued-liabilities-details" name="statement-statement-note-3-supplemental-financial-information-other-accrued-liabilities-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-other-assets-details" name="statement-statement-note-3-supplemental-financial-information-other-assets-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-other-expense-income-net-details" name="statement-statement-note-3-supplemental-financial-information-other-expense-income-net-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-prepaid-and-other-current-assets-details" name="statement-statement-note-3-supplemental-financial-information-prepaid-and-other-current-assets-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-property-and-equipment-net-details" name="statement-statement-note-3-supplemental-financial-information-property-and-equipment-net-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-3-supplemental-financial-information-tables" name="statement-statement-note-3-supplemental-financial-information-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-4-leases-operating-lease-details" name="statement-statement-note-4-leases-operating-lease-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-4-leases-operating-lease-liabilities-maturities-details" name="statement-statement-note-4-leases-operating-lease-liabilities-maturities-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-4-leases-operating-lease-rightofuse-assets-and-operating-lease-liabilities-details" name="statement-statement-note-4-leases-operating-lease-rightofuse-assets-and-operating-lease-liabilities-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-4-leases-operating-lease-weightedaverage-remaining-lease-term-and-discount-rate-details" name="statement-statement-note-4-leases-operating-lease-weightedaverage-remaining-lease-term-and-discount-rate-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-4-leases-tables" name="statement-statement-note-4-leases-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-5-derivative-financial-instruments-derivative-assets-and-liabilities-2-details" name="statement-statement-note-5-derivative-financial-instruments-derivative-assets-and-liabilities-2-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-5-derivative-financial-instruments-derivative-assets-and-liabilities-details" name="statement-statement-note-5-derivative-financial-instruments-derivative-assets-and-liabilities-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-5-derivative-financial-instruments-gains-and-losses-cash-flow-hedging-arrangements-details" name="statement-statement-note-5-derivative-financial-instruments-gains-and-losses-cash-flow-hedging-arrangements-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-5-derivative-financial-instruments-gains-or-losses-derivative-financial-instruments-2-details" name="statement-statement-note-5-derivative-financial-instruments-gains-or-losses-derivative-financial-instruments-2-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-5-derivative-financial-instruments-gains-or-losses-derivative-financial-instruments-details" name="statement-statement-note-5-derivative-financial-instruments-gains-or-losses-derivative-financial-instruments-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-5-derivative-financial-instruments-outstanding-balance-sheet-hedge-contracts-details" name="statement-statement-note-5-derivative-financial-instruments-outstanding-balance-sheet-hedge-contracts-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-5-derivative-financial-instruments-outstanding-foreign-currency-forward-contracts-details" name="statement-statement-note-5-derivative-financial-instruments-outstanding-foreign-currency-forward-contracts-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-5-derivative-financial-instruments-tables" name="statement-statement-note-5-derivative-financial-instruments-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-6-fair-value-measurements-carrying-value-and-estimated-fair-value-375-convertible-senior-notes-details" name="statement-statement-note-6-fair-value-measurements-carrying-value-and-estimated-fair-value-375-convertible-senior-notes-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-6-fair-value-measurements-carrying-value-and-estimated-fair-value-375-convertible-senior-notes-details-parentheticals" name="statement-statement-note-6-fair-value-measurements-carrying-value-and-estimated-fair-value-375-convertible-senior-notes-details-parentheticals" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-6-fair-value-measurements-changes-in-fair-value-penny-warrants-details" name="statement-statement-note-6-fair-value-measurements-changes-in-fair-value-penny-warrants-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-6-fair-value-measurements-tables" name="statement-statement-note-6-fair-value-measurements-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-7-debt-interest-expense-details" name="statement-statement-note-7-debt-interest-expense-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-7-debt-outstanding-debt-details" name="statement-statement-note-7-debt-outstanding-debt-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-7-debt-tables" name="statement-statement-note-7-debt-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-7-debt-weighted-average-effective-interest-rate-details" name="statement-statement-note-7-debt-weighted-average-effective-interest-rate-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-8-commitments-and-contingencies-royalty-expense-and-royalty-payments-details" name="statement-statement-note-8-commitments-and-contingencies-royalty-expense-and-royalty-payments-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-8-commitments-and-contingencies-schedule-of-debt-maturity-details" name="statement-statement-note-8-commitments-and-contingencies-schedule-of-debt-maturity-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-8-commitments-and-contingencies-summary-of-restructuring-charges-details" name="statement-statement-note-8-commitments-and-contingencies-summary-of-restructuring-charges-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-8-commitments-and-contingencies-tables" name="statement-statement-note-8-commitments-and-contingencies-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-9-stockholders-equity-schedule-of-accumulated-other-comprehensive-income-loss-details" name="statement-statement-note-9-stockholders-equity-schedule-of-accumulated-other-comprehensive-income-loss-details" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-note-9-stockholders-equity-tables" name="statement-statement-note-9-stockholders-equity-tables" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
  <xsd:element abstract="true" id="aray_statement-statement-significant-accounting-policies-policies" name="statement-statement-significant-accounting-policies-policies" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration"/>
</xsd:schema>
