<?xml version="1.0" encoding="UTF-8"?>

<!--XBRL Document Created with the Workiva Platform-->
<!--Copyright 2026 Workiva-->
<!--r:019fd820-3d0e-7db0-be4a-fbacff4018e9,g:f7747796-6808-457b-8e0c-21f851267cae-->
<xs:schema xmlns:xs="http://www.w3.org/2001/XMLSchema" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:ck0001540305="http://usbank.com/20260810" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:dtr-types="http://www.xbrl.org/dtr/type/2024-01-31" attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://usbank.com/20260810">
  <xs:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd"/>
  <xs:import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd"/>
  <xs:import namespace="http://www.xbrl.org/dtr/type/2024-01-31" schemaLocation="https://www.xbrl.org/dtr/type/2024-01-31/types.xsd"/>
  <xs:import namespace="http://xbrl.sec.gov/fnd-oef/2026" schemaLocation="https://xbrl.sec.gov/fnd/2026/fnd-oef-2026.xsd"/>
  <xs:import namespace="http://xbrl.sec.gov/oef-rr/2026" schemaLocation="https://xbrl.sec.gov/oef/2026/oef-rr-2026.xsd"/>
  <xs:annotation>
    <xs:appinfo>
      <link:linkbaseRef xmlns:xlink="http://www.w3.org/1999/xlink" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="ck0001540305-20260810_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:type="simple"/>
      <link:linkbaseRef xmlns:xlink="http://www.w3.org/1999/xlink" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="ck0001540305-20260810_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:type="simple"/>
      <link:linkbaseRef xmlns:xlink="http://www.w3.org/1999/xlink" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="ck0001540305-20260810_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:type="simple"/>
    </xs:appinfo>
  </xs:annotation>
  <xs:element id="ck0001540305_S000107090Member" abstract="true" name="S000107090Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_C000277977Member" abstract="true" name="C000277977Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_AIInferenceTechnologiesIndustryRiskMember" abstract="true" name="AIInferenceTechnologiesIndustryRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_CollateralSecuritiesRiskMember" abstract="true" name="CollateralSecuritiesRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ConcentrationRiskMember" abstract="true" name="ConcentrationRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ConcentrationRiskSemiconductorsIndustryRiskMember" abstract="true" name="ConcentrationRiskSemiconductorsIndustryRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_CounterpartyRiskMember" abstract="true" name="CounterpartyRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_CurrencyExchangeRateRiskMember" abstract="true" name="CurrencyExchangeRateRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_CybersecurityRiskMember" abstract="true" name="CybersecurityRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_DepositaryReceiptRiskMember" abstract="true" name="DepositaryReceiptRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_DerivativesRiskMember" abstract="true" name="DerivativesRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_DerivativesRiskSwapAgreementsRiskMember" abstract="true" name="DerivativesRiskSwapAgreementsRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_DerivativesRiskSwapsCapacityRiskMember" abstract="true" name="DerivativesRiskSwapsCapacityRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_EmergingMarketsRiskMember" abstract="true" name="EmergingMarketsRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_EmergingMarketsRiskCapitalControlsAndSanctionsRiskMember" abstract="true" name="EmergingMarketsRiskCapitalControlsAndSanctionsRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_EmergingMarketsRiskGeopoliticalRiskMember" abstract="true" name="EmergingMarketsRiskGeopoliticalRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_EmergingTechnologiesInvestmentRiskMember" abstract="true" name="EmergingTechnologiesInvestmentRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_EquityMarketRiskMember" abstract="true" name="EquityMarketRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ETFRisksMember" abstract="true" name="ETFRisksMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ETFRisksAuthorizedParticipantsMarketMakersAndLiquidityProvidersConcentrationRiskMember" abstract="true" name="ETFRisksAuthorizedParticipantsMarketMakersAndLiquidityProvidersConcentrationRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ETFRisksCashRedemptionRiskMember" abstract="true" name="ETFRisksCashRedemptionRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ETFRisksCostsOfBuyingOrSellingSharesRiskMember" abstract="true" name="ETFRisksCostsOfBuyingOrSellingSharesRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ETFRisksSharesMayTradeAtPricesOtherThanNAVRiskMember" abstract="true" name="ETFRisksSharesMayTradeAtPricesOtherThanNAVRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ETFRisksTradingRiskMember" abstract="true" name="ETFRisksTradingRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ForeignSecuritiesRiskMember" abstract="true" name="ForeignSecuritiesRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_GeographicInvestmentRiskMember" abstract="true" name="GeographicInvestmentRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_IndexMethodologyRiskMember" abstract="true" name="IndexMethodologyRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_IndexProviderRiskMember" abstract="true" name="IndexProviderRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_MarketCapitalizationRiskMember" abstract="true" name="MarketCapitalizationRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_MarketCapitalizationRiskLargeCapitalizationInvestingRiskMember" abstract="true" name="MarketCapitalizationRiskLargeCapitalizationInvestingRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_MarketCapitalizationRiskMidCapitalizationInvestingRiskMember" abstract="true" name="MarketCapitalizationRiskMidCapitalizationInvestingRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_MarketCapitalizationRiskSmallCapitalizationInvestingRiskMember" abstract="true" name="MarketCapitalizationRiskSmallCapitalizationInvestingRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_NewFundRiskMember" abstract="true" name="NewFundRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_PassiveInvestmentRiskMember" abstract="true" name="PassiveInvestmentRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_SectorRiskMember" abstract="true" name="SectorRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_SectorRiskInformationTechnologySectorRiskMember" abstract="true" name="SectorRiskInformationTechnologySectorRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_TaxRiskMember" abstract="true" name="TaxRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_TrackingErrorRiskMember" abstract="true" name="TrackingErrorRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_S000107091Member" abstract="true" name="S000107091Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_C000277978Member" abstract="true" name="C000277978Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_AISemiconductorSpecializedPackagingAndTestingIndustryRiskMember" abstract="true" name="AISemiconductorSpecializedPackagingAndTestingIndustryRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ChinaASharesRiskMember" abstract="true" name="ChinaASharesRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_GeographicInvestmentRiskRisksRelatedToInvestingInJapanRiskMember" abstract="true" name="GeographicInvestmentRiskRisksRelatedToInvestingInJapanRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_GeographicInvestmentRiskRisksOfInvestingInTaiwanRiskMember" abstract="true" name="GeographicInvestmentRiskRisksOfInvestingInTaiwanRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_S000107092Member" abstract="true" name="S000107092Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_C000277979Member" abstract="true" name="C000277979Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ConcentrationRiskDataStorageHardwareIndustryGroupRiskMember" abstract="true" name="ConcentrationRiskDataStorageHardwareIndustryGroupRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ConcentrationRiskOptoelectronicsElectronicsComponentsIndustryGroupsRiskMember" abstract="true" name="ConcentrationRiskOptoelectronicsElectronicsComponentsIndustryGroupsRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_S000107093Member" abstract="true" name="S000107093Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_C000277980Member" abstract="true" name="C000277980Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ConcentrationRiskAirLiquidAndGasControlEquipmentIndustryGroupRiskMember" abstract="true" name="ConcentrationRiskAirLiquidAndGasControlEquipmentIndustryGroupRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_ConcentrationRiskSpecialtyContractingServicesIndustryGroupRiskMember" abstract="true" name="ConcentrationRiskSpecialtyContractingServicesIndustryGroupRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="ck0001540305_SectorRiskMaterialsSectorRiskMember" abstract="true" name="SectorRiskMaterialsSectorRiskMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
</xs:schema>
