| | | | | | | | | | | | | | |
| | | Effective interest held as at |
| Subsidiaries | Place and date of incorporation | Principal Activities | June 30, 2026 | December 31, 2025 |
| ACM Research (Shanghai), Inc. ("ACM Shanghai") | Mainland China, May 2005 | Principal operating subsidiary | 73.2 | % | 74.6 | % |
| ACM Research (Wuxi), Inc. ("ACM Wuxi") | Mainland China, July 2011 | Sales and services | 73.2 | % | 74.6 | % |
| CleanChip Technologies Limited ("CleanChip") | Hong Kong, June 2017 | Trading partner between ACM Shanghai and its customers | 73.2 | % | 74.6 | % |
| ACM Research Korea CO., LTD. ("ACM Korea") | Republic of Korea ("South Korea), December 2017 | Sales, marketing, R&D, production | 73.2 | % | 74.6 | % |
| ACM Research ( Lingang), Inc. ("ACM Lingang") | Mainland China, March 2019 | Management of production activities | 73.2 | % | 74.6 | % |
| ACM Research (CA), Inc. ("ACM California") | USA, April 2019 | Procurement for ACM Shanghai | 73.2 | % | 74.6 | % |
| ACM Research (Cayman), Inc. | Cayman Islands, April 2019 | Administrative function (inactive) | 100.0 | % | 100.0 | % |
| ACM Research (Singapore) PTE. Ltd. ("ACM Singapore") | Singapore, August 2021 | Sales, marketing, business development | 100.0 | % | 100.0 | % |
| ACM Research (Beijing), Inc. ("ACM Beijing") | Mainland China, February 2022 | Sales and services | 73.2 | % | 74.6 | % |
| Hanguk ACM CO., LTD | South Korea, March 2022 | Sales, services, business development | 100.0 | % | 100.0 | % |
| Yusheng Micro Semiconductor (Shanghai) Co., Ltd. | Mainland China, June 2023 | Component development and production | 73.2 | % | 74.6 | % |
| ACM-Wooil Microelectronics (Shanghai) Co., Ltd. | Mainland China, June 2023 | Component development and production | 53.6 | % | 54.5 | % |
| ACM Research (Chengdu), Inc. ("ACM Chengdu") | Mainland China, December 2024 | Sales and services | 73.2 | % | 74.6 | % |
| Shengyi Micro Semiconductor (Shanghai) Co., Ltd. | Mainland China, December 2024 | Business development | 62.2 | % | 63.4 | % |