v3.26.1
Discontinued Operations - Narrative (Details)
$ in Thousands
1 Months Ended 3 Months Ended 6 Months Ended 9 Months Ended
Jul. 01, 2026
USD ($)
Jun. 30, 2026
USD ($)
Sep. 12, 2025
USD ($)
Feb. 01, 2022
USD ($)
Dec. 31, 2025
USD ($)
Apr. 30, 2023
USD ($)
Jan. 31, 2023
USD ($)
Jun. 30, 2026
USD ($)
Jun. 30, 2025
USD ($)
Mar. 31, 2025
USD ($)
Jun. 30, 2026
USD ($)
Jun. 30, 2026
USD ($)
Jun. 30, 2025
USD ($)
Sep. 30, 2025
USD ($)
Sep. 30, 2024
USD ($)
Dec. 31, 2020
USD ($)
Disposal Group, Including Discontinued Operations [Line Items]                                
Proceeds from disposal of business                       $ 28,000 $ 0      
Deposit received for the sale of B Medical Systems business   $ 28,000           $ 28,000     $ 28,000 28,000   $ 0    
Loss on assets held for sale                       9,491 92,706      
Increase in loss contingency               (1,800)                
Accrued liability   300           300     300 300        
Edwards Vacuum LLC Warranty Claim                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Indemnification             $ 1,000                  
Increase in loss contingency                   $ 400            
Accrued liability   300           300     300 300   $ 2,100 $ 800 $ 2,500
Edwards Vacuum LLC Warranty Claim | Settled Litigation                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Loss contingency, payments           $ 800                    
Edwards Vacuum LLC Warranty Claim | Settled Litigation | Indemnification Agreement                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Loss contingency, receivable           $ 1,000                    
Edwards 2025 Claim                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Indemnification     $ 13,000                          
Subsequent Event | Vendor Loan Agreement | Secured Debt                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Percentage of equity interests 1                              
Discontinued Operations, Disposed of by Sale | B Medical Systems Business                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Proceeds from disposal of business                       28,000        
Discontinued Operations, Disposed of by Sale | B Medical Systems Business | Subsequent Event                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Consideration $ 63,000                              
Disposal group, vendor term loan $ 35,000                              
Interest rate 0.060                              
Maturity period 3 months                              
Number of days notice required to prepay with no free 5 days                              
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Proceeds from disposal of business       $ 2,900,000                        
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Proceeds from disposal of business       $ 659,800                        
Discontinued Operations, Held-for-Sale | B Medical Systems Business                                
Disposal Group, Including Discontinued Operations [Line Items]                                
Proceeds from disposal of business   19,000     $ 9,000           28,000          
Deposit received for the sale of B Medical Systems business   $ 28,000           28,000     $ 28,000 28,000        
Reversal of held for sale valuation allowance               (6,500)                
Loss on assets held for sale               $ (6,474) $ 60,858     $ 9,491 $ 92,706