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  <xs:element id="klac_ForeignCapitalLossCarryforwardsMember" abstract="true" name="ForeignCapitalLossCarryforwardsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_UndistributedEarningsForCertainForeignSubsidiaries" abstract="false" name="UndistributedEarningsForCertainForeignSubsidiaries" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_EffectiveIncomeTaxRateReconciliationIncomeTaxIncentiveForeignAmount" abstract="false" name="EffectiveIncomeTaxRateReconciliationIncomeTaxIncentiveForeignAmount" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxIncentivePercent" abstract="false" name="EffectiveIncomeTaxRateReconciliationForeignIncomeTaxIncentivePercent" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="klac_EffectiveIncomeTaxRateReconciliationNetChangeInTaxReservesPercent" abstract="false" name="EffectiveIncomeTaxRateReconciliationNetChangeInTaxReservesPercent" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="klac_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromSettlementsWithTaxingAuthorities" abstract="false" name="UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromSettlementsWithTaxingAuthorities" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_ReceivablesSoldUnderFactoringAgreements" abstract="false" name="ReceivablesSoldUnderFactoringAgreements" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_CommitmentsAndContingenciesAbstract" abstract="true" name="CommitmentsAndContingenciesAbstract" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="klac_OutstandingInventoryPurchaseCommitment" abstract="false" name="OutstandingInventoryPurchaseCommitment" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="klac_LongTermIncentivePlanCommittedAmount" abstract="false" name="LongTermIncentivePlanCommittedAmount" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_GuaranteeArrangementsToFundGuaranteesToCustomsAuthoritiesAmount" abstract="false" name="GuaranteeArrangementsToFundGuaranteesToCustomsAuthoritiesAmount" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_GuaranteeArrangementsToFundGuaranteesToCustomsAuthoritiesAmountIssued" abstract="false" name="GuaranteeArrangementsToFundGuaranteesToCustomsAuthoritiesAmountIssued" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_RenewableElectricityAcrossGlobalOperationsBy2030GoalPercentage" abstract="false" name="RenewableElectricityAcrossGlobalOperationsBy2030GoalPercentage" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="klac_ReductionOfScope1And2EmissionFromPreviousBaselineBy2030Percentage" abstract="false" name="ReductionOfScope1And2EmissionFromPreviousBaselineBy2030Percentage" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="klac_OtherForeignCurrencyHedgeContractsMember" abstract="true" name="OtherForeignCurrencyHedgeContractsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumerationNotDisclosedFlag" abstract="false" name="DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumerationNotDisclosedFlag" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="klac_DerivativeAssetStatementOfFinancialPositionExtensibleEnumerationNotDisclosedFlag" abstract="false" name="DerivativeAssetStatementOfFinancialPositionExtensibleEnumerationNotDisclosedFlag" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="klac_LargestCustomerMember" abstract="true" name="LargestCustomerMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_CorporateAndReconcilingItemsMember" abstract="true" name="CorporateAndReconcilingItemsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_UnallocatedExpenses" abstract="false" name="UnallocatedExpenses" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_EuropeAndIsraelMember" abstract="true" name="EuropeAndIsraelMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_RestOfAsiaMember" abstract="true" name="RestOfAsiaMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_WaferInspectionMember" abstract="true" name="WaferInspectionMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_PatterningMember" abstract="true" name="PatterningMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_OtherRevenueMember" abstract="true" name="OtherRevenueMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_RestructuringIncurredCostStatementOfIncomeOrComprehensiveIncomeExtensibleEnumerationNotDisclosedFlag" abstract="false" name="RestructuringIncurredCostStatementOfIncomeOrComprehensiveIncomeExtensibleEnumerationNotDisclosedFlag" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="klac_SECSchedule1209ValuationAllowancesAndReservesDeductionsAdjustments" abstract="false" name="SECSchedule1209ValuationAllowancesAndReservesDeductionsAdjustments" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_BrenHigginsMember" abstract="true" name="BrenHigginsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_OfficerTradingArrangementMember" abstract="true" name="OfficerTradingArrangementMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_BrianLorigMember" abstract="true" name="BrianLorigMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_AhmadKhanMember" abstract="true" name="AhmadKhanMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
</xs:schema>
