v3.26.1
Merger (Details)
Sep. 30, 2025
USD ($)
director
Axcelis Technologies, Inc  
Merger  
Ownership percentage, noncontrolling owner 41.60%
Axcelis Technologies, Inc | Axcelis Technologies, Inc  
Merger  
Ownership percentage 58.40%
Veeco Instruments Inc | Axcelis Technologies, Inc  
Merger  
Number of director who serves on the Axcelis board | director 1
Share exchange ratio of new shares to be received 0.3575
Termination fee, Threshold period for competing proposal 12 months
Fixed expense reimbursement amount $ 15,000,000
Veeco Instruments Inc | Axcelis Technologies, Inc | Non Terminating Party, Axcelis Technologies Inc  
Merger  
Termination fee 108,700,000
Veeco Instruments Inc | Axcelis Technologies, Inc | Non-Terminating Party, Veeco Instruments Inc  
Merger  
Termination fee $ 77,500,000