75000 - Document - Document and Entity Information link:presentationLink link:calculationLink link:definitionLink 75010 - Statement - Condensed Consolidated Balance Sheets link:presentationLink link:calculationLink link:definitionLink 75020 - Statement - Condensed Consolidated Balance Sheets (Parenthetical) link:presentationLink link:calculationLink link:definitionLink 75030 - Statement - Condensed Consolidated Statements of Operations (Unaudited) link:presentationLink link:calculationLink link:definitionLink 75040 - Statement - Condensed Consolidated Statements of Comprehensive Income (Loss) (Unaudited) link:presentationLink link:calculationLink link:definitionLink 75050 - Statement - Condensed Consolidated Statements of Shareholders' Equity link:presentationLink link:calculationLink link:definitionLink 75060 - Statement - Condensed Consolidated Statements of Shareholders' Equity (Parenthetical) link:presentationLink link:calculationLink link:definitionLink 75070 - Statement - Condensed Consolidated Statements of Cash Flows link:presentationLink link:calculationLink link:definitionLink 995455 - Disclosure - Basis of Presentation and Significant Accounting Policies link:presentationLink link:calculationLink link:definitionLink 995465 - Disclosure - Finance Lease Obligations link:presentationLink link:calculationLink link:definitionLink 995475 - Disclosure - Earnings Per Share link:presentationLink link:calculationLink link:definitionLink 995485 - Disclosure - Inventories link:presentationLink link:calculationLink link:definitionLink 995495 - Disclosure - Leases link:presentationLink link:calculationLink link:definitionLink 995505 - Disclosure - Goodwill and Intangible Assets link:presentationLink link:calculationLink link:definitionLink 995515 - Disclosure - Income Taxes link:presentationLink link:calculationLink link:definitionLink 995525 - Disclosure - Equity and Stock-Based Compensation link:presentationLink link:calculationLink link:definitionLink 995535 - Disclosure - Commitments and Contingencies link:presentationLink link:calculationLink link:definitionLink 995545 - Disclosure - Reportable Segments link:presentationLink link:calculationLink link:definitionLink 995555 - Disclosure - Major Customers and Foreign Sales link:presentationLink link:calculationLink link:definitionLink 995565 - Disclosure - Subsequent Event link:presentationLink link:calculationLink link:definitionLink 995575 - Disclosure - Basis of Presentation and Significant Accounting Policies (Policies) link:presentationLink link:calculationLink link:definitionLink 995585 - Disclosure - Basis of Presentation and Significant Accounting Policies (Tables) link:presentationLink link:calculationLink link:definitionLink 995595 - Disclosure - Finance Lease Obligations (Tables) link:presentationLink link:calculationLink link:definitionLink 995605 - Disclosure - Earnings Per Share (Tables) link:presentationLink link:calculationLink link:definitionLink 995615 - Disclosure - Inventories (Tables) link:presentationLink link:calculationLink link:definitionLink 995625 - Disclosure - Leases (Tables) link:presentationLink link:calculationLink link:definitionLink 995635 - Disclosure - Goodwill and Intangible Assets (Tables) link:presentationLink link:calculationLink link:definitionLink 995645 - Disclosure - Equity and Stock-Based Compensation (Tables) link:presentationLink link:calculationLink link:definitionLink 995655 - Disclosure - Reportable Segments (Tables) link:presentationLink link:calculationLink link:definitionLink 995665 - Disclosure - Major Customers and Foreign Sales (Tables) link:presentationLink link:calculationLink link:definitionLink 995675 - Disclosure - Basis of Presentation and Significant Accounting Policies - Summary of Activity for Contract Liabilities (Details) link:presentationLink link:calculationLink link:definitionLink 995685 - Disclosure - Basis of Presentation and Significant Accounting Policies - Warranty- Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995695 - Disclosure - Basis of Presentation and Significant Accounting Policies - Schedule of Product Warranty Liability (Details) link:presentationLink link:calculationLink link:definitionLink 995705 - Disclosure - Basis of Presentation and Significant Accounting Policies - Shipping Expense - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995715 - Disclosure - Basis of Presentation and Significant Accounting Policies - Employee Retention Tax - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995715 - Disclosure - Basis of Presentation and Significant Accounting Policies - Employee Retention Tax - Additional Information (Details) [Default] link:presentationLink link:calculationLink link:definitionLink 995725 - Disclosure - Basis of Presentation and Significant Accounting Policies - Concentrations of Credit Risk - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995735 - Disclosure - Finance Lease Obligations - Summary of Finance Lease Liabilities (Details) link:presentationLink link:calculationLink link:definitionLink 995745 - Disclosure - Finance Lease Obligations - Summary of Finance Lease Liabilities (Details) 3 link:presentationLink link:calculationLink link:definitionLink 995755 - Disclosure - Finance Lease Obligations- Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995765 - Disclosure - Earnings Per Share - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995775 - Disclosure - Earnings Per Share - Reconciliation of Components of Basic and Diluted EPS Calculations (Details) link:presentationLink link:calculationLink link:definitionLink 995785 - Disclosure - Inventories - Schedule of Components of Inventories (Details) link:presentationLink link:calculationLink link:definitionLink 995795 - Disclosure - Leases - Schedule of Financial Statement Classification of Lease Balances Within Condensed Consolidated Balance Sheets (Details) link:presentationLink link:calculationLink link:definitionLink 995805 - Disclosure - Leases - Schedule of Financial Statement Classification of Lease Expenses Reported in Condensed Consolidated Statements of Operations (Details) link:presentationLink link:calculationLink link:definitionLink 995805 - Disclosure - Leases - Schedule of Financial Statement Classification of Lease Expenses Reported in Condensed Consolidated Statements of Operations (Details) [Default] link:presentationLink link:calculationLink link:definitionLink 995815 - Disclosure - Leases - Future Minimum Lease Payments Under Non-cancelable Leases (Details) link:presentationLink link:calculationLink link:definitionLink 995825 - Disclosure - Leases - Future Minimum Lease Payments Under Non-cancelable Leases (Details) (Detail)2 link:presentationLink link:calculationLink link:definitionLink 995835 - Disclosure - Leases - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995845 - Disclosure - Leases - Schedule of Weighted Average Remaining Term and Discount Rates (Details) link:presentationLink link:calculationLink link:definitionLink 995855 - Disclosure - Goodwill and Intangible Assets - Schedule of Goodwill (Details) link:presentationLink link:calculationLink link:definitionLink 995865 - Disclosure - Goodwill and Intangible Assets - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995875 - Disclosure - Goodwill and Intangible Assets - Schedule of Finite-Lived Intangible Assets (Details) link:presentationLink link:calculationLink link:definitionLink 995885 - Disclosure - Goodwill and Intangible Assets - Schedule of Future Amortization Expense (Details) link:presentationLink link:calculationLink link:definitionLink 995895 - Disclosure - Income Taxes - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995905 - Disclosure - Equity and Stock-Based Compensation - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995915 - Disclosure - Equity and Stock-Based Compensation - Summary of Stock Option Activity (Details) link:presentationLink link:calculationLink link:definitionLink 995925 - Disclosure - Equity and Stock-Based Compensation - Schedule of Fair Value of Stock Option Using Black-Scholes Option Pricing Model (Details) link:presentationLink link:calculationLink link:definitionLink 995935 - Disclosure - Equity and Stock-Based Compensation - Summary of RSU activity (Details) link:presentationLink link:calculationLink link:definitionLink 995945 - Disclosure - Equity and Stock-Based Compensation - Summary of Proceeds and Costs Related to Underwritten Public Offering (Details) link:presentationLink link:calculationLink link:definitionLink 995955 - Disclosure - Commitments and Contingencies - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995965 - Disclosure - Reportable Segments - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 995975 - Disclosure - Reportable Segments - Schedule of Reportable Segment Information (Details) link:presentationLink link:calculationLink link:definitionLink 995985 - Disclosure - Reportable Segments - Schedule of Reportable Segments Information (Parenthetical) (Details) link:presentationLink link:calculationLink link:definitionLink 995995 - Disclosure - Major Customers and Foreign Sales - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink 996005 - Disclosure - Major Customers and Foreign Sales - Schedule of Revenues by Geographic Region (Details) link:presentationLink link:calculationLink link:definitionLink 996015 - Disclosure - Subsequent Event - Additional Information (Details) link:presentationLink link:calculationLink link:definitionLink HUNGARY Hungary Gross Profit Gross profit Gross profit Income Taxes [Table] Income taxes. Preferred Stock, Shares Issued, Total Preferred stock, shares issued Preferred Stock, Shares Issued Operating lease liability Operating Lease, Liability, Total Present value of lease liabilities Operating Lease, Liability Interest expense Interest Expense, Total Interest expense on long term debt and finance lease liabilities Interest Expense, Operating and Nonoperating Interest expense Robert C Daigle [Member] Robert C Daigle. Robert C Daigle Authorized stock repurchase amount Share Repurchase Program, Authorized, Amount Order or Production Backlog [Member] Backlog Purchase Obligation, Total Purchase obligation Purchase Obligation Commitments and Contingencies Commitments and contingencies (Note 9) Weighted-average shares used to compute diluted EPS Weighted average shares outstanding - diluted Weighted Average Number of Shares Outstanding, Diluted APIC, Share-based Payment Arrangement, Increase for Cost Recognition, Total Stock compensation expense APIC, Share-Based Payment Arrangement, Increase for Cost Recognition Minimum Minimum [Member] Developed Technology Rights [Member] Developed technology Finance Lease, Liability, to be Paid, Year Two 2028 Summary of Proceeds and Costs Related to Underwritten Public Offering Summary Of Proceeds and Costs Related to Underwritten Public Offering [Table Text Block] Summary of proceeds and costs related to underwritten public offering. Contract liabilities policy. Contract Liabilities Policy [Text Block] Contract Liabilities Amtech's. Amtech's [Member] Amtech's Shipping Shipping and Handling [Member] Finance Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List] Finance Lease, Liability, Noncurrent, Statement of Financial Position [Extensible Enumeration] Common Stock, Shares, Issued, Total Common stock, shares issued Common Stock, Shares, Issued Segment Reporting Information [Line Items] Segment Reporting [Line Items] Cost, Direct Labor Labor Income Tax Expense (Benefit), Total Income Tax Expense (Benefit) Income tax expense Income tax provision Intangible Asset, Finite-Lived, Impairment Loss Total impairment charge Intangible asset impairment Other Commitments [Table] Other Commitments [Table] Restricted Stock Units (RSUs) [Member] RSU Restricted Stock Units Subsidiary or Equity Method Investee, Sale of Stock [Table] Operating Segments Operating Segments [Member] Intangible Asset, Finite-Lived, Class [Domain] Contract with Customer, Liability, Total Contract with Customer, Liability Beginning balance Ending balance Income taxes payable Accrued Income Taxes, Current Income taxes payable Subsequent Event Type [Domain] Expected sale price Cost of Goods and Services Sold, Total Cost of sales Cost of Product and Service Sold Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List] Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible Enumeration] Less: Interest Lessee, Operating Lease, Liability, Undiscounted Excess Amount Geographic Concentration Risk Geographic Concentration Risk [Member] Effect of Exchange Rate on Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Continuing Operation Effect of Exchange Rate Changes on Cash and Cash Equivalents Thereafter Finite-Lived Intangible Asset, Expected Amortization, after Year Four Finite-Lived Intangible Asset, Expected Amortization, after Year Four Operating And Finance Lease Liability Payments Due Year Three Operating and finance lease liability payments due year three. 2029 General and Administrative Expense, Total General and Administrative Expense General & administrative Income Statement [Abstract] Entrepix, Inc., [Member] Entrepix, Inc., Entrepix, Inc. Lessee, Finance Leases [Text Block] Finance Lease Obligations Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Forfeited in Period Number of shares, Forfeited Goodwill and Intangible Assets, Goodwill, Policy [Policy Text Block] Goodwill Schedule of Financial Statement Classification of Lease Expenses Reported in Condensed Consolidated Statements of Operations Lease, Cost [Table Text Block] Consolidated Statements Of Stockholders Equity [Abstract] Consolidated Statement's of Stockholders' Equity [Abstract] Intangible Asset, Finite-Lived [Table] Net income (loss) per basic share Earnings Per Share, Basic Net income per basic share Net income (loss) per basic share Right-of-use asset impairment Operating Lease, Impairment Loss ROU asset impairment Document Period End Date Document Period End Date Intangible Asset, Finite-Lived, Estimated Amortization Expense, Remainder of Fiscal Year 2026 Finite lived intangible assets impairments. Finite Lived Intangible Assets Impairments Less asset impairments: Net Carrying Amount Finite-Lived Intangible Assets, Net, Ending Balance Finite-Lived Intangible Assets, Net, Beginning Balance Intangible Asset, Finite-Lived, after Accumulated Amortization Intangible assets - net Payments to Acquire Property, Plant, and Equipment, Total Purchases of property, plant and equipment Payments to Acquire Property, Plant, and Equipment Granted Share-Based Compensation Arrangements by Share-Based Payment Award, Options, Grants in Period, Weighted Average Exercise Price Common stock, shares authorized Common Stock, Shares Authorized Intangible Asset, Finite-Lived, Estimated Amortization Expense, Year Two 2028 Statement of Stockholders' Equity [Abstract] Finance Lease, Right-of-Use Asset, after Accumulated Amortization, Total Finance Lease, Right-of-Use Asset, after Accumulated Amortization Right-of-use assets - finance Operating Lease Lessee, Operating Lease, Liability, to be Paid, Fiscal Year Maturity [Abstract] Proceeds from Issuance of Common Stock Gross Proceeds from issuance of common stock gross. Issuance of common stock Gross proceeds from offering Accrued income taxes Increase (Decrease) in Income Taxes Payable Total lease liabilities Lease liabilities Lease Liability Lease Liability Schedule of Future Amortization Expense Intangible Asset, Finite-Lived, and Capitalized Cost, Software to be Sold, Leased, or Marketed, Estimated Amortization Expense [Table Text Block] Schedule Of Share Based Compensation Arrangements By Share Based Payment Award [Table] Schedule of Share-Based Compensation Arrangements by Share-Based Payment Award [Table] Current portion of long-term lease liability Total current portion of long-term lease liabilities Finance And Operating Lease Liability Current Finance and operating lease liability current. Stock repurchase program period Share Repurchase Program, Period in Force Schedule of Weighted Average Remaining Term and Discount Rates Schedule Of Weighted Average Remaining Term And Discount Rates Table [Text Block] Schedule of weighted average remaining term and discount rates. Total Assets Assets Identifiable Assets Title of 12(b) Security Title of 12(b) Security China CHINA Ending balance Beginning balance Goodwill, Total Goodwill - Net Goodwill Goodwill Preferred Stock, Value, Issued, Ending Balance Preferred Stock, Value, Issued, Beginning Balance Preferred Stock, Value, Issued, Total Preferred stock; 100,000,000 shares authorized; none issued Preferred Stock, Value, Issued Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Number Nonvested at end of period Nonvested at beginning of period Reclassification, Comparability Adjustment [Policy Text Block] Reclassifications Stock options exercised Stock Issued During Period, Value, Stock Options Exercised Granted Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Grants in Period, Gross Finance Lease, Liability, to be Paid, Year Three 2029 Customer Concentration Risk Customer Concentration Risk [Member] Antidilutive Securities, Name Antidilutive Securities, Name [Domain] Effective income tax rate Effective Income Tax Rate Reconciliation, Percent Effective Income Tax Rate Reconciliation, Percent, Total Lessee, Operating Lease, Liability, to be Paid, Remainder of Fiscal Year Remainder of 2026 Weighted Average Exercise Price Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Abstract] Interest Paid, Excluding Capitalized Interest, Operating Activity Interest paid Goodwill [Line Items] Income Taxes [Line Items] Income taxes. Performance-Based Restricted Stock Units Performance Based Restricted Stock Units [Member] Performance based restricted stock units. Lessee, Operating Lease, Liability, to be Paid, Year One 2027 Customer Relationships [Member] Customer Relationships Schedule of Reportable Segments Information Segment Reporting [Table Text Block] Intangible Asset, Finite-Lived, Estimated Amortization Expense, Year Four 2030 Stockholders' Equity Attributable to Parent, Ending Balance Stockholders' Equity Attributable to Parent, Beginning Balance Equity, Attributable to Parent Total Shareholders' Equity Underwritten Public Offering Underwritten Public Offering [Member] Underwritten public offering. Other Assets, Noncurrent, Total Other Assets, Noncurrent Other assets Income Taxes Income Tax Disclosure [Text Block] Cost, Direct Material Material Earnings Per Share Earnings Per Share [Text Block] Mr Shechter [Member] Mr Shechter. Mr. Shechter Number of reportable segments Number of Reportable Segments Nature of Operations and Basis of Presentation Basis of Accounting, Policy [Policy Text Block] Severance Costs Severance expense Non-Segment Related Segment Reporting, Reconciling Item, Corporate Nonsegment [Member] Less: Interest Finance Lease, Liability, Undiscounted Excess Amount Reversal of allowance for doubtful accounts, net Accounts Receivable, Credit Loss Expense (Reversal) (Reversal of) Provision for allowance for credit losses Operating And Finance Lease Liability Payments Due Next Twelve Months Operating and finance lease liability payments due next twelve months. 2027 RSU Restricted Stock [Member] Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value Weighted Average Grant Date Fair Value, Released Proceeds from the exercise of stock options Proceeds from Stock Options Exercised Geographical Geographical [Domain] Intangible Asset, Finite-Lived, Estimated Amortization Expense, Year Three 2029 Employment Term Employment term. Employment term Fair Value of Financial Instruments, Policy [Policy Text Block] Fair Value of Financial Instruments Statistical Measurement Statistical Measurement [Axis] Entity Interactive Data Current Entity Interactive Data Current Lessee, Operating Lease, Liability, to be Paid, Year Three 2029 Goodwill [Table] Common Stock, Value, Issued, Ending Balance Common Stock, Value, Issued, Beginning Balance Common Stock, Value, Issued, Total Common Stock, Value, Issued Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 17,508,101 and 14,354,797 at June 30, 2026 and September 30, 2025, respectively Reconciliation of Components of Basic and Diluted EPS Calculations Schedule of Earnings Per Share, Basic and Diluted [Table Text Block] Inventory, Raw Materials, Gross Inventory, Raw Materials, Gross, Total Purchased parts and raw materials Proceeds from Sale of Property, Plant, and Equipment Proceeds from Sale of Property, Plant, and Equipment, Total Proceeds from the sale of property, plant and equipment Total Liabilities Liabilities Gain (Loss), Foreign Currency Transaction, before Tax, Total Gain (Loss), Foreign Currency Transaction, before Tax Foreign currency (loss) gain Lessee, Operating and Finance Leases [Text Block] Leases The entire disclosure for operating and finance leases of lessee. Includes, but is not limited to, description of operating and finance leases and maturity analysis of operating and finance lease liability. Product and Service Product and Service [Axis] Shipping expense policy. Shipping Expense Policy [Text Block] Shipping Expense Accrued and other liabilities Increase Decrease In Accrued And Other Liabilities Increase decrease in accrued and other liabilities. Retained Earnings (Accumulated Deficit), Ending Balance Retained Earnings (Accumulated Deficit), Beginning Balance Retained Earnings (Accumulated Deficit), Total Retained deficit Retained Earnings (Accumulated Deficit) Schedule of Changes in Additional Paid-in Capital Schedule of Changes in Additional Paid-in Capital [Table Text Block] Schedule of changes in additional paid-in capital. Changes in estimate for pre-existing warranties Standard Product Warranty Accrual, Increase (Decrease) for Preexisting Warranties Increase (Decrease) in Accounts Payable, Total Accounts payable Increase (Decrease) in Accounts Payable Changes in operating assets and liabilities: Adjustment to Reconcile Net Income to Cash Provided by (Used in) Operating Activity, Increase (Decrease) in Operating Capital [Abstract] Restricted stock units vest over period Share-Based Compensation Arrangement by Share-Based Payment Award, Award Vesting Period Stock Issued During Period, Shares, New Issues Common stock issued Issuance of common stock in public offering, net of issuance costs (in shares) Minimum Percentage Increase In EBITDA Minimum percentage increase in EBITDA. Percentage increase in EBITDA Accumulated Amortization Accumulated Amortization Intangible Asset, Finite-Lived, Accumulated Amortization Noncompete Agreements [Member] Noncompetition Agreements Operating lease cost Operating Lease, Cost Subsequent Events [Text Block] Subsequent Event Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Expected Volatility Rate Volatility Total lease payments Operating And Finance Lease Liability Payments Due Operating and finance lease liability payments due. Effect of Change in Accounting Estimate, Type [Domain] Material and Substrate Material And Substrate [Member] Material And Substrate. Dilutive potential common shares Dilutive potential common shares due to stock options Weighted Average Number of Shares Outstanding, Diluted, Adjustment, Total Weighted Average Number of Shares Outstanding, Diluted, Adjustment Schedule Of Expense [Table] Schedule Of Expense [Table] Schedule of expense. Risk free interest rate Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Risk Free Interest Rate Payments of Stock Issuance Costs Other offering costs Operating lease liabilities Operating Lease, Liability, Current Current portion of operating lease liabilities Thermal Processing Solutions Thermal Processing Solutions [Member] Thermal processing solutions. Thermal Processing Solutions Segment Concentration Risk Type Concentration Risk Type [Domain] Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value Weighted Average Grant Date Fair Value, Nonvested at end of period Weighted Average Grant Date Fair Value, Nonvested at beginning of year Customer Customer [Domain] Total Liabilities and Shareholders’ Equity Liabilities and Equity Dividend rate Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Expected Dividend Rate MEXICO Mexico Lessee, Operating Lease, Liability, to be Paid, Year Two 2028 Research and Development Expense Research and Development Expense, Total Research & development Intangible Asset, Finite-Lived, Class [Axis] Lessee Lease Description [Table] Lessee, Lease, Description [Table] Document Fiscal Period Focus Document Fiscal Period Focus Schedule of Fair Value of Stock Option Using Black-Scholes Option Pricing Model Schedule of Share-Based Payment Award, Stock Options, Valuation Assumptions [Table Text Block] Schedule of Components of Inventories Schedule of Inventory, Current [Table Text Block] Segment Reporting, Entity-Wide Information Not Provided as Part of Reportable Segment, Geographical Area, Revenue [Abstract] Canada CANADA Sale of Stock [Axis] Customer One [Member] Customer One [Member] Customer One Useful Life Intangible Asset, Finite-Lived, Useful Life Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Period Increase (Decrease), Including Exchange Rate Effect and Discontinued Operation Net Increase in Cash and Cash Equivalents Entity Current Reporting Status Entity Current Reporting Status Use of Estimates Use of Estimates, Policy [Policy Text Block] Exercisable at end of period Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercisable, Number Standard product warranty, description Standard Product Warranty Description Accounts Payable, Current, Total Accounts payable Accounts Payable, Current Lessee operating lease liability payments due after year four. Thereafter Lessee Operating Lease Liability Payments Due After Year Four Document Transition Report Document Transition Report Major Customers and Foreign Sales Concentration Risk Disclosure [Text Block] Concentration Risk [Line Items] Concentration Risk [Line Items] Lessee Disclosure [Abstract] Commitments and Contingencies Disclosure [Abstract] Subsequent Event [Line Items] Increase (Decrease) in Inventories, Total Increase (Decrease) in Inventories Inventories Inventories Current Liabilities Liabilities, Current [Abstract] Share-Based Payment Arrangement [Abstract] Thereafter Finance Lease Liability Payments Due After Year Four Finance lease liability payments due after year four. Shareholders’ Equity Equity, Including Portion Attributable to Noncontrolling Interest [Abstract] Common Stock Common Stock [Member] Statistical Measurement Statistical Measurement [Domain] Gross Carrying Amount Intangible Asset, Finite-Lived, before Accumulated Amortization Finite-Lived Intangible Assets, Gross, Total Net Revenues Revenue from Contract with Customer, Segment Benchmark [Member] Weighted Average Number of Shares Outstanding, Basic, Total Weighted-average shares used to compute basic EPS Weighted average shares outstanding - basic Weighted Average Number of Shares Outstanding, Basic Finance Lease, Liability, to be Paid, Remainder of Fiscal Year Remainder of 2026 Assets Assets [Abstract] Operating Lease, Expense Accelerated lease expense Entity Central Index Key Entity Central Index Key Denominator: Weighted Average Number of Shares Outstanding, Basic [Abstract] Antidilutive Securities Antidilutive Securities [Axis] Consolidation Items Consolidation Items [Axis] Current Fiscal Year End Date Current Fiscal Year End Date Document Quarterly Report Document Quarterly Report Gain (Loss) on Disposition of Property Plant Equipment, Excluding Oil and Gas Property and Timber Property Loss on sale of property, plant and equipment Outstanding at beginning of period Outstanding at end of period Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding, Weighted Average Exercise Price Cash Provided by (Used in) Operating Activity, Including Discontinued Operation Net cash provided by operating activities Entity Incorporation, State or Country Code Entity Incorporation, State or Country Code Contract with customer liability deferred revenue. Contract With Customer Liability Deferred Revenue Deferred revenue Net income (loss) per diluted share Earnings Per Share, Diluted Net income per diluted share Net income (loss) per diluted share Sale of Stock, Number of Shares Issued in Transaction Numbes of shares issued Operating leases, Weighted average discount rate Operating Lease, Weighted Average Discount Rate, Percent Net income Net (loss) income Net income (loss) Shares Issued, Value, Share-Based Payment Arrangement, after Forfeiture Shares Issued, Value, Share-Based Payment Arrangement, after Forfeiture, Total Issuance of common stock under employee stock plans, net of shares withheld for payroll taxes Increase (Decrease) in Other Operating Assets, Total Other assets Increase (Decrease) in Other Operating Assets Other assets Commitments and Contingencies Commitments and Contingencies Disclosure [Text Block] Present value of lease liabilities Operating And Finance Lease Liability Operating and finance lease liability. Comprehensive Income (Loss), Net of Tax, Attributable to Parent Comprehensive income (loss) Segment Reporting, Entity-Wide Information Not Provided as Part of Reportable Segment, Geographical Area, Revenue [Table Text Block] Schedule of Revenues by Geographic Region Investment, Type [Extensible Enumeration] Basis of Presentation and Significant Accounting Policies Organization, Consolidation, Basis of Presentation, Business Description and Accounting Policies [Text Block] Income Taxes Receivable, Current Income taxes receivable Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Total Translation adjustment Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax Contract with Customer, Contract Asset, Contract Liability, and Receivable [Table Text Block] Summary of Activity for Contract Liabilities Equity Components Equity Components [Axis] Investing Activities Cash Provided by (Used in) Investing Activity, Including Discontinued Operation [Abstract] Goodwill And Intangible Asset Impairment Excluding Cost of Goods Sold Total loss recognized during the period from the impairment of goodwill plus the loss recognized in the period resulting from the impairment of the carrying amount of intangible assets, other than goodwill, excluding amounts in cost of goods sold. Intangible asset impairment Other Commitments [Line Items] Commitments and Contingencies [Line Items] Statement of Cash Flows [Abstract] Income Tax Disclosure [Abstract] Revenue, Major Customer [Line Items] Segment Reporting, Entity-Wide Information Not Provided as Part of Reportable Segment, Customer, Extent of Reliance [Line Items] Exercised Share-Based Compensation Arrangements by Share-Based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price Weighted average fair value of options granted during the period Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Grants in Period, Weighted Average Grant Date Fair Value Standard Product Warranty Accrual, Total Standard Product Warranty Accrual Beginning Balance Ending Balance Finance lease liabilities Finance Lease, Liability, Noncurrent Long-term finance lease liabilities Depreciation, Depletion and Amortization, Total Depreciation and amortization Depreciation, Depletion and Amortization Semiconductor Semiconductor Equipment [Member] Semiconductor equipment. Czech Republic Czech Republic, Koruny Preferred stock, shares authorized Preferred Stock, Shares Authorized Rule 10b5-1 Arr Modified [Flag] Rule 10b5-1 Arr Modified. Rule 10b5-1 Arr Modified Antidilutive securities excluded from computation of earnings per share (in shares) Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount Number Of Customers Represented Ten Percent of Accounts Receivable Number of customers represented 10% of accounts receivable. Number of customers represented 10% of accounts receivable Number of operating segments Number of Operating Segments Accumulated Other Comprehensive (Loss) Income AOCI Attributable to Parent [Member] Deferred Income Tax Assets, Net, Total Deferred Income Tax Assets, Net Deferred income taxes - net Inventory, Net Inventories Inventories Standard product warranty, period Standard Product Warranty Period Standard product warranty, period. Non-US [Member] Other North America Other Americas Finance Lease, Right-of-Use Asset, Statement of Financial Position [Extensible List] Finance Lease, Right-of-Use Asset, Statement of Financial Position [Extensible Enumeration] Concentration Risk Benchmark [Domain] Concentration Risk Benchmark Taiwan TAIWAN Forfeited Share-Based Compensation Arrangements by Share-Based Payment Award, Options, Forfeitures in Period, Weighted Average Exercise Price Accrued Liabilities, Current, Total Other accrued liabilities Accrued Liabilities, Current Share Based Compensation Arrangement By Share Based Payment Award [Line Items] Share-Based Compensation Arrangement by Share-Based Payment Award [Line Items] Severance payment term Employment Contract Severance Payment Term Employment Contract, Severance Payment Term Outstanding at beginning of period Outstanding at end of period Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding, Number Customer Customer [Axis] Less: Interest Operating And Finance Lease Liabilities Undiscounted Excess Amount Operating and finance lease liabilities undiscounted excess amount. Work-in-process Inventory, Work in Process, Gross Thereafter Operating And Finance Lease Liability Payments Due After Year Four Operating and finance lease liability payments due after year four. Intangible Asset, Goodwill and Other [Abstract] Document Type Document Type Document Type Operating Activities Cash Provided by (Used in) Operating Activity, Including Discontinued Operation [Abstract] Segment Reporting, CODM, Individual Title and Position or Group Name [Extensible Enumeration] Liabilities and Shareholders’ Equity Liabilities and Equity [Abstract] Lessee Lease Description [Line Items] Lessee, Lease, Description [Line Items] Employee Stock Option Subsequent Event [Member] Subsequent Event Finance Lease, Liability, Current, Statement of Financial Position [Extensible List] Finance Lease, Liability, Current, Statement of Financial Position [Extensible Enumeration] Operating income (loss) Operating Income (Loss) Operating (loss) income: Goodwill, Acquired During Period Goodwill acquired Sale of Stock, Price Per Share Public offering price per share Cost, Overhead Overhead Other Europe Segment Geographical Groups Of Countries Other Immaterial Locations Group Two [Member] Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group Two [Member] Schedule Of Segment Reporting Information By Segment [Table] Segment Reporting [Table] Selling and Marketing Expense Selling and Marketing Expense, Total Selling & marketing Securities Act File Number Entity File Number Inventory, Finished Goods, Gross, Total Finished goods Inventory, Finished Goods, Gross Borrowings On Finance Lease Obligations Borrowings on finance lease obligations. Borrowings on finance lease obligations Location, Statement of Income, Balance [Axis] Future Minimum Lease Payments Under Non-cancelable Leases Schedule Of Maturities Of Operating And Finance Leases Liabilities Table [Text Block] Schedule of maturities of operating and finance leases liabilities. Retained Earnings [Member] Retained Deficit Summary of Finance Lease Liabilities Lessee Finance Leases Table Text Block Lessee Finance Leases. Entity Registrant Name Entity Registrant Name Earnings Per Share, Basic, by Common Class, Including Two-Class Method [Table] Net loss Net income (loss) Net income (loss) Net income (loss) Selling, General and Administrative Expense, Total Selling, general and administrative Selling, General and Administrative Expense Selling, general and administrative expenses Trade Names [Member] Trade names Entity Address, Address Line One Entity Address, Address Line One United States UNITED STATES Materials and Substrate Materials and Substrate segment. Materials and Substrate Segment [Member] Subsidiary, Sale of Stock [Line Items] Exercised Stock options exercised (in shares) Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercises in Period Exercisable at end of period Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercisable, Weighted Average Exercise Price Total current assets Assets, Current Segments Segments [Axis] Increase (Decrease) in Operating Liabilities Increase (Decrease) in Operating Liabilities, Total Decrease in operating lease liabilities Supplemental Cash Flow Information [Abstract] Supplemental Cash Flow Information: Movement in Standard Product Warranty Accrual [Roll Forward] Entity Small Business Entity Small Business Accrued warranty expense Product Warranty Accrual, Current Weighted Average Grant Date Fair Value, Forfeited Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value Increase (Decrease) in Stockholders' Equity [Roll Forward] Increase (Decrease) in Stockholders' Equity [Roll Forward] Accounts Receivable, after Allowance for Credit Loss, Current, Total Accounts Receivable, after Allowance for Credit Loss, Current Accounts receivable (less allowance for credit losses of $85 and $113 at June 30, 2026 and September 30, 2025, respectively) Consolidation Items Consolidation Items [Domain] Employee-related Liabilities, Current, Total Accrued compensation and related taxes Employee-related Liabilities, Current Treasury Stock, Shares, Acquired Repurchase of treasury stock (in shares) Shares repurchased during the period Antidilutive Securities Excluded From Computation Of Earnings Per Share [Line Items] Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items] Finance Lease, Liability, to be Paid, Year Four 2030 Goodwill and Intangible Assets, Intangible Assets, Policy [Policy Text Block] Intangible Assets Earnings Per Share [Abstract] (Loss) Income Per Share: Income (loss) per share: Summary of Stock Option Activity Share-Based Payment Arrangement, Option, Activity [Table Text Block] Lessee, Operating Lease, Liability, to be Paid, Year Four 2030 Payments of Underwriting Discounts Commissions and Offering Expenses Payments of underwriting discounts commissions and offering expenses. Underwriting discounts, commissions and offering expenses Underwriting discounts and commissions Employee Retention Tax Employee Retention Tax [Policy Text Block] Employee retention tax. Operating And Finance Lease Liability Payments Remainder Of Fiscal Year Operating and finance lease liability payments remainder of fiscal year. Remainder of 2026 Accelerated Lease Expense Accelerated lease expense. Accelerated lease expense Plan Name [Axis] Subsequent Event Type [Axis] Equity [Abstract] Product and Service Product and Service [Domain] Accounts Receivable, Allowance for Credit Loss, Current Balance at beginning of year Allowance for credit losses Financing Activities Cash Provided by (Used in) Financing Activity, Including Discontinued Operation [Abstract] Non-Rule 10b5-1 Arr Modified [Flag] Non-Rule 10b5-1 Arr Modified. Non-Rule 10b5-1 Arr Modified Entity Tax Identification Number Entity Tax Identification Number Accounts Receivable Accounts Receivable [Member] Impairment of goodwill Goodwill, Impairment Loss Goodwill impairment Impairment of goodwill Warranty Standard Product Warranty, Policy [Policy Text Block] Accounts Receivable [Policy Text Block] Accounts Receivable and Allowance for Credit Losses Equity Component Equity Component [Domain] Entity Address, City or Town Entity Address, City or Town Contract liabilities Increase (Decrease) in Contract with Customer, Liability Business Acquisition Business Combination [Axis] Intangible Asset, Finite-Lived [Line Items] Finite-Lived Intangible Assets [Line Items] Income tax payments, net Income Taxes Paid, Net, Total Income Tax Paid, after Refund Received Stock Issued During Period, Value, New Issues Issuance of common stock in public offering, net of issuance costs Segments Segments [Domain] Entity Common Stock, Shares Outstanding Entity Common Stock, Shares Outstanding Concentration Risk Type Concentration Risk Type [Axis] Write-down of inventory Inventory Write-down Entity [Domain] Intangible Asset and Goodwill [Text Block] Goodwill and Intangible Assets Malaysia MALAYSIA Segment Reporting, Expense Information Used by CODM, Description Schedule Of Antidilutive Securities Excluded From Computation Of Earnings Per Share [Table] Antidilutive Security, Excluded EPS Calculation [Table] Contract liabilities Contract with Customer, Liability, Current Statement [Table] Statement [Table] Total lease cost Lease, Cost Share-Based Payment Arrangement, Expense Equity compensation expense incurred Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest Income (loss) before income tax provision Entity Shell Company Entity Shell Company Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Expected Term Expected term Cash Provided by (Used in) Investing Activity, Including Discontinued Operation Net cash used in investing activities Statement [Line Items] Statement [Line Items] Customer Two Customer Two [Member] Customer two. Percentage of cash balances Percentage Of Cash And Cash Equivalents In United States Percentage of cash and cash equivalents held in the United States. Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Vested in Period Number of shares, Released RSU vested (in shares) Maximum Maximum [Member] Operating And Finance Lease Liability Payments Due Year Two Operating and finance lease liability payments due year two. 2028 Total lease payments Finance Lease, Liability, to be Paid Sale of Stock [Domain] Investment Income, Interest Interest income Change in Accounting Method Accounted for as Change in Estimate [Member] Business Combination [Domain] Business Acquisition, Acquiree Product Warranty Liability [Line Items] Concentration Risk Benchmark Concentration Risk Benchmark [Axis] U.S. federal statutory rate Effective Income Tax Rate Reconciliation, at Federal Statutory Income Tax Rate, Percent Costs incurred during the period Standard Product Warranty Accrual, Increase for Payments Standard product warranty accrual, increase for payments. Principles of Consolidation Consolidation, Policy [Policy Text Block] Subsequent Events [Abstract] Payment, Tax Withholding, Share-Based Payment Arrangement Payment of payroll taxes on stock-based compensation through shares withheld Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value Weighted Average Grant Date Fair Value, Granted | $ / shares Numerator: Earnings Per Share, Basic [Abstract] Concentration Risk [Table] Concentration Risk [Table] Product Warranty Liability [Table] Current Assets Assets, Current [Abstract] Finance Lease, Liability, Current Less: current portion of finance lease liabilities Current maturities of finance lease liabilities Finance lease liabilities Annual Base Salary Amount Annual base salary amount Annual base salary amount Operating And Finance Lease Liability Payments Due Year Four Operating and finance lease liability payments due year four. 2030 Leases [Abstract] Document Fiscal Year Focus Document Fiscal Year Focus Common stock, shares outstanding Beginning balance (in shares) Ending balance (in shares) Common Stock, Shares, Outstanding Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest, Total Beginning balance Ending balance Equity, Including Portion Attributable to Noncontrolling Interest Contract with customer liability new deposits. Contract With Customer Liability New Deposits New deposits Statement of Comprehensive Income [Abstract] Operating lease liabilities Operating Lease, Liability, Noncurrent Long-term operating lease liabilities Contract with Customer, Liability, Revenue Recognized Contract revenue Revenue recognized Schedule of Finite-Lived Intangible Assets Intangible Asset, Finite-Lived [Table Text Block] Total lease payments Lessee, Operating Lease, Liability, to be Paid Security Exchange Name Security Exchange Name Finance leases, Weighted average discount rate Finance Lease, Weighted Average Discount Rate, Percent Impact of Recently Issued Accounting Pronouncements New Accounting Pronouncements, Policy [Policy Text Block] Earnings Per Share, Basic, by Common Class, Including Two Class Method [Line Items] Earnings Per Share, Basic, by Common Class, Including Two Class Method [Line Items] Entity Address, State or Province Entity Address, State or Province Options Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding [Roll Forward] Operating lease ROU asset Right-of-use assets - operating Right-of-use assets - net Amendment Flag Amendment Flag Operating Lease and Finance lease Operating Lease And Finance Lease Payments Due [Abstract] Operating lease and finance lease payments due. Schedule of Goodwill Goodwill [Table Text Block] Effect of Change in Accounting Estimate, Type [Axis] Total Asia Asia [Member] Equity and Stock-Based Compensation Share-Based Payment Arrangement [Text Block] Semiconductor Fabrication Solutions [Member] Semiconductor fabrication solutions. Semiconductor Fabrication Solutions Semiconductor Fabrication Solutions Segment Concentration risk, percentage Concentration Risk, Percentage Schedule Of Expense [Line Items] Schedule Of Expense [Line Items] Schedule of expense. Interest income (expense) and other, net Other Nonoperating Income (Expense), Total Other Nonoperating Income (Expense) Other Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Total Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Continuing Operation Cash and Cash Equivalents, End of Period Cash and Cash Equivalents, Beginning of Period City Area Code City Area Code Operating Lease, Liability, Current, Statement of Financial Position [Extensible List] Operating Lease, Liability, Current, Statement of Financial Position [Extensible Enumeration] Organization, Consolidation and Presentation of Financial Statements [Abstract] Finance Lease Finance Lease, Liability, to be Paid, Fiscal Year Maturity [Abstract] Proceeds from Issuance of Common Stock Net increase in APIC Net proceeds from issuance of common stock Net proceeds from offering Schedule of Financial Statement Classification of Lease Balances Within Condensed Consolidated Balance Sheets Schedule Of Leases Balances And Classified On Balance Sheet Table [Text Block] Schedule of leases balances and classified on balance sheet. Inventory Disclosure [Text Block] Inventories Employee Retention Credit, Amount Received Employee retention credit, amount received. Employee retention credit, amount received Common stock, par value Common Stock, Par or Stated Value Per Share Legal Entity [Axis] Goodwill And Intangible Asset Impairment Cost of Goods Sold Total loss recognized during the period from the impairment of goodwill plus the loss recognized in the period resulting from the impairment of the carrying amount of intangible assets, other than goodwill, included in cost of goods sold. Intangible asset impairment Finance Lease, Liability, to be Paid, Year One 2027 Total current liabilities Liabilities, Current Schedule of Product Warranty Liability [Table Text Block] Summary of Activity in Accrued Warranty Expense Reportable Segments Segment Reporting [Text Block] Finance Lease, Interest Payment on Liability Interest expense on finance lease liabilities Trading Symbol Trading Symbol Research, development and engineering Research Development And Engineering Net Research, development and engineering expenses, net of grants received. Finance leases, Weighted average remaining lease term Finance Lease, Weighted Average Remaining Lease Term Finance lease cost Finance Lease, Right-of-Use Asset, Amortization Geographical Geographical [Axis] Total Americas Americas [Member] Share Based Compensation Expense Excludes Liability Share based compensation expense excludes liability. Stock based compensation expense excludes liability Two Thousand Twenty Two Equity Incentive Plan [Member] Two thousand twenty two equity incentive plan. 2022 Equity Incentive Plan Revenues, net Revenues Revenue Subsequent Event [Table] Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period Number of shares, Granted Restricted stock units grants Entity Emerging Growth Company Entity Emerging Growth Company Foreign currency translation adjustment Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Gain (Loss) Arising During Period, Net of Tax Additional Paid- In Capital Additional Paid-in Capital [Member] Shares Issued, Shares, Share-Based Payment Arrangement, after Forfeiture Shares Issued, Shares, Share-Based Payment Arrangement, after Forfeiture, Total Issuance of common stock under employee stock plans, net of shares withheld for payroll taxes (in shares) Plan Name [Domain] Other Liabilities, Noncurrent, Total Other Liabilities, Noncurrent Other long-term liabilities Cash Insured Limits Time Deposits, at or Above FDIC Insurance Limit Accrued Income Taxes, Noncurrent Income taxes payable Total Europe Europe [Member] Present value of lease liabilities Finance Lease, Liability Finance leases Finance leases Standard Product Warranty Accrual, Increase for Warranties Issued Additions for warranties issued during the period Cover [Abstract] Cover Segment Reporting, Other Segment Item, Amount Other segment items Other segment items Lease Right Of Use Asset ROU assets Lease right of use asset. Total right-of-use assets Total long-term lease liabilities Long-Term Lease Liability Finance And Operating Lease Liability Noncurrent Finance and operating lease liability noncurrent. Operating leases, Weighted average remaining lease term Operating Lease, Weighted Average Remaining Lease Term Share-Based Payment Arrangement, Restricted Stock and Restricted Stock Unit, Activity [Table Text Block] Schedule of Restricted Shares Activity Summary of RSU activity Accumulated Other Comprehensive Income (Loss), Net of Tax, Total Accumulated Other Comprehensive Income (Loss), Net of Tax Accumulated other comprehensive gain (loss) Concentrations of Credit Risk Concentration Risk, Credit Risk, Policy [Policy Text Block] Underwriting discounts and commissions Underwriting Discounts and Commissions Underwriting Discounts and Commissions Underwriting discounts and commissions Other Asia Segment Geographical Groups Of Countries Other Immaterial Locations Group One [Member] Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group One [Member] Intangible Asset, Finite-Lived, Amortization Expense Amortization of Intangible Assets Share-based Payment Arrangement, Noncash Expense, Total Share-Based Payment Arrangement, Noncash Expense Stock-based compensation expense Non-cash share-based compensation expense Additional Paid in Capital, Beginning Balance Additional Paid in Capital, Ending Balance Additional Paid in Capital, Total Additional paid-in capital Additional Paid in Capital Adjustment to Reconcile Net Income to Cash Provided by (Used in) Operating Activity [Abstract] Adjustments to reconcile net income (loss) to net cash provided by operating activities: Cash and Cash Equivalents, at Carrying Value, Ending Balance Cash and Cash Equivalents, at Carrying Value, Beginning Balance Cash and Cash Equivalents, at Carrying Value, Total Cash and cash equivalents Cash and Cash Equivalent Share Repurchase Program, Remaining Authorized, Amount Stock remaining available for repurchase Cash Provided by (Used in) Financing Activity, Including Discontinued Operation Net cash provided by financing activities Segment Reporting Non Segment Items Segment reporting non segment items. Non-segment items Non-segment items Forfeited Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Forfeitures in Period Entity Filer Category Entity Filer Category Segment Reporting, CODM, Profit (Loss) Measure, How Used, Description Germany GERMANY Accounts receivable Increase (Decrease) in Accounts Receivable Accounts receivable Intangible Asset, Finite-Lived, Estimated Amortization Expense, Year One 2027 Property, Plant and Equipment, Net, Ending Balance Property, Plant and Equipment, Net, Beginning Balance Property, Plant and Equipment, Net, Total Property, Plant, and Equipment, after Accumulated Depreciation, Depletion, and Amortization Property, plant and equipment - net Inventory Disclosure [Abstract] Segment Reporting [Abstract] Other current assets Other Assets, Current Entity Address, Postal Zip Code Entity Address, Postal Zip Code Statement of Financial Position [Abstract] Finance Lease, Principal Payments Payments on finance lease obligations Local Phone Number Local Phone Number US Treasuries and FDIC Insured U S Treasuries And F D I C Insured [Member] US Treasuries and FDIC Insured [Member]