Leases - Schedule of Financial Statement Classification of Lease Expenses Reported in Condensed Consolidated Statements of Operations (Details) - USD ($) $ in Thousands |
3 Months Ended | 9 Months Ended | ||
|---|---|---|---|---|
Jun. 30, 2026 |
Jun. 30, 2025 |
Jun. 30, 2026 |
Jun. 30, 2025 |
|
| Lessee Lease Description [Line Items] | ||||
| Total lease cost | $ 1,012 | $ 854 | $ 2,752 | $ 2,556 |
| Location, Statement of Income, Balance [Axis]: asys:ResearchDevelopmentAndEngineeringNet | ||||
| Lessee Lease Description [Line Items] | ||||
| Operating lease cost | 3 | 9 | ||
| Location, Statement of Income, Balance [Axis]: us-gaap:CostOfGoodsAndServicesSold | ||||
| Lessee Lease Description [Line Items] | ||||
| Operating lease cost | 461 | 454 | 1,400 | 1,373 |
| Finance lease cost | 5 | 14 | ||
| Location, Statement of Income, Balance [Axis]: us-gaap:SellingGeneralAndAdministrativeExpense | ||||
| Lessee Lease Description [Line Items] | ||||
| Operating lease cost | 516 | 371 | 1,249 | 1,098 |
| Finance lease cost | $ 30 | $ 26 | $ 89 | $ 76 |