<?xml version="1.0" encoding="UTF-8"?>

<!--XBRL Document Created with the Workiva Platform-->
<!--Copyright 2026 Workiva-->
<!--r:019fc96e-72ea-7d7f-9fc8-50cc0857936d,g:4d0e57eb-08ae-4518-9ad8-a3ea6c8a0514-->
<link:linkbase xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <link:roleRef roleURI="http://www.entegris.com/role/DocumentandEntityInformationDocument" xlink:type="simple" xlink:href="entg-20260804.xsd#DocumentandEntityInformationDocument"/>
  <link:presentationLink xlink:role="http://www.entegris.com/role/DocumentandEntityInformationDocument" xlink:type="extended">
    <link:loc xlink:type="locator" xlink:label="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_CoverAbstract"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityCentralIndexKey_019fc96e-72ea-73da-b745-a5fc0a72d82d" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityCentralIndexKey"/>
    <link:presentationArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityCentralIndexKey_019fc96e-72ea-73da-b745-a5fc0a72d82d" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_AmendmentFlag_019fc96e-72ea-7359-ba3f-629243613c97" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_AmendmentFlag"/>
    <link:presentationArc order="2" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_AmendmentFlag_019fc96e-72ea-7359-ba3f-629243613c97" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_DocumentType_019fc96e-72ea-73fb-9823-686f5b47ecaa" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_DocumentType"/>
    <link:presentationArc order="3" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_DocumentType_019fc96e-72ea-73fb-9823-686f5b47ecaa" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_DocumentPeriodEndDate_019fc96e-72ea-7338-877a-5c89778b70fc" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_DocumentPeriodEndDate"/>
    <link:presentationArc order="4" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_DocumentPeriodEndDate_019fc96e-72ea-7338-877a-5c89778b70fc" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityRegistrantName_019fc96e-72ea-7516-b9df-1184125a1059" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityRegistrantName"/>
    <link:presentationArc order="5" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityRegistrantName_019fc96e-72ea-7516-b9df-1184125a1059" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityIncorporationStateCountryCode_019fc96e-72ea-728e-a144-a51203d46fbc" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityIncorporationStateCountryCode"/>
    <link:presentationArc order="6" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityIncorporationStateCountryCode_019fc96e-72ea-728e-a144-a51203d46fbc" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityFileNumber_019fc96e-72ea-7735-b16a-12eb2a1fd9c3" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityFileNumber"/>
    <link:presentationArc order="7" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityFileNumber_019fc96e-72ea-7735-b16a-12eb2a1fd9c3" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityTaxIdentificationNumber_019fc96e-72ea-7353-a161-23e51dbbea6d" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityTaxIdentificationNumber"/>
    <link:presentationArc order="8" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityTaxIdentificationNumber_019fc96e-72ea-7353-a161-23e51dbbea6d" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressAddressLine1_019fc96e-72ea-7e8f-98b9-e93fbb5b3b16" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityAddressAddressLine1"/>
    <link:presentationArc order="9" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityAddressAddressLine1_019fc96e-72ea-7e8f-98b9-e93fbb5b3b16" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressCityOrTown_019fc96e-72ea-7ece-af05-9bd8e91f5247" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityAddressCityOrTown"/>
    <link:presentationArc order="10" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityAddressCityOrTown_019fc96e-72ea-7ece-af05-9bd8e91f5247" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressStateOrProvince_019fc96e-72ea-73c3-b6fa-3c137bcab284" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityAddressStateOrProvince"/>
    <link:presentationArc order="11" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityAddressStateOrProvince_019fc96e-72ea-73c3-b6fa-3c137bcab284" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressPostalZipCode_019fc96e-72ea-7f92-a250-a8d40178dd2c" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityAddressPostalZipCode"/>
    <link:presentationArc order="12" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityAddressPostalZipCode_019fc96e-72ea-7f92-a250-a8d40178dd2c" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_CityAreaCode_019fc96e-72ea-75b9-9da1-42a69e1c196c" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_CityAreaCode"/>
    <link:presentationArc order="13" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_CityAreaCode_019fc96e-72ea-75b9-9da1-42a69e1c196c" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_LocalPhoneNumber_019fc96e-72ea-7e20-86de-4405a123c5c5" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_LocalPhoneNumber"/>
    <link:presentationArc order="14" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_LocalPhoneNumber_019fc96e-72ea-7e20-86de-4405a123c5c5" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_WrittenCommunications_019fc96e-72ea-72ca-a1ee-ceda86eb8852" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_WrittenCommunications"/>
    <link:presentationArc order="15" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_WrittenCommunications_019fc96e-72ea-72ca-a1ee-ceda86eb8852" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_SolicitingMaterial_019fc96e-72ea-760b-b70b-e8b00e6174a4" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_SolicitingMaterial"/>
    <link:presentationArc order="16" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_SolicitingMaterial_019fc96e-72ea-760b-b70b-e8b00e6174a4" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_PreCommencementTenderOffer_019fc96e-72ea-7bd1-8888-cacb6d25343a" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_PreCommencementTenderOffer"/>
    <link:presentationArc order="17" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_PreCommencementTenderOffer_019fc96e-72ea-7bd1-8888-cacb6d25343a" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_PreCommencementIssuerTenderOffer_019fc96e-72ea-709e-bf08-24987ac3ad43" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_PreCommencementIssuerTenderOffer"/>
    <link:presentationArc order="18" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_PreCommencementIssuerTenderOffer_019fc96e-72ea-709e-bf08-24987ac3ad43" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_Security12bTitle_019fc96e-72ea-7d5e-bf86-efd8b9ca336b" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_Security12bTitle"/>
    <link:presentationArc order="19" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_Security12bTitle_019fc96e-72ea-7d5e-bf86-efd8b9ca336b" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_TradingSymbol_019fc96e-72ea-70a1-8719-ada55347c793" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_TradingSymbol"/>
    <link:presentationArc order="20" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_TradingSymbol_019fc96e-72ea-70a1-8719-ada55347c793" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_SecurityExchangeName_019fc96e-72ea-7e56-832b-8e94983727d0" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_SecurityExchangeName"/>
    <link:presentationArc order="21" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_SecurityExchangeName_019fc96e-72ea-7e56-832b-8e94983727d0" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityEmergingGrowthCompany_019fc96e-72ea-7b62-8ecc-b724a598cc28" xlink:href="https://xbrl.sec.gov/dei/2026/dei-2026.xsd#dei_EntityEmergingGrowthCompany"/>
    <link:presentationArc order="22" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019fc96e-72ea-7696-b984-7bb2fd4c31ba" xlink:to="loc_dei_EntityEmergingGrowthCompany_019fc96e-72ea-7b62-8ecc-b724a598cc28" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
  </link:presentationLink>
</link:linkbase>
