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        <link:definition>995555 - Disclosure - GOODWILL AND PURCHASED INTANGIBLE ASSETS</link:definition>
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        <link:definition>995559 - Disclosure - COMMITMENTS AND CONTINGENCIES</link:definition>
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        <link:definition>995562 - Disclosure - EMPLOYEE STOCK PLANS</link:definition>
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        <link:definition>995563 - Disclosure - RESTRUCTURING CHARGES</link:definition>
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        <link:definition>995567 - Disclosure - SEGMENT INFORMATION</link:definition>
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        <link:definition>995570 - Disclosure - FAIR VALUE OF FINANCIAL INSTRUMENTS (Tables)</link:definition>
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        <link:definition>995571 - Disclosure - BALANCE SHEET INFORMATION (Tables)</link:definition>
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        <link:definition>995585 - Disclosure - FAIR VALUE OF FINANCIAL INSTRUMENTS (Details)</link:definition>
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        <link:definition>995587 - Disclosure - BALANCE SHEET INFORMATION (Details)</link:definition>
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        <link:definition>995588 - Disclosure - BALANCE SHEET INFORMATION (Details 1)</link:definition>
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        <link:definition>995589 - Disclosure - BALANCE SHEET INFORMATION (Details 2)</link:definition>
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        <link:definition>995590 - Disclosure - BALANCE SHEET INFORMATION (Details 3)</link:definition>
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        <link:usedOn>link:calculationLink</link:usedOn>
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        <link:definition>995591 - Disclosure - BALANCE SHEET INFORMATION (Details 4)</link:definition>
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        <link:usedOn>link:calculationLink</link:usedOn>
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        <link:definition>995592 - Disclosure - BALANCE SHEET INFORMATION (Details Narrative)</link:definition>
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        <link:usedOn>link:calculationLink</link:usedOn>
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        <link:definition>995593 - Disclosure - BUSINESS COMBINATION (Details)</link:definition>
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        <link:usedOn>link:calculationLink</link:usedOn>
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        <link:definition>995594 - Disclosure - BUSINESS COMBINATION (Details 1)</link:definition>
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        <link:usedOn>link:calculationLink</link:usedOn>
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        <link:definition>995595 - Disclosure - BUSINESS COMBINATION (Details 2)</link:definition>
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      <link:roleType roleURI="http://aehr.com/role/BusinessCombinationDetailsNarrative" id="BusinessCombinationDetailsNarrative">
        <link:definition>995596 - Disclosure - BUSINESS COMBINATION (Details Narrative)</link:definition>
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        <link:usedOn>link:definitionLink</link:usedOn>
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      <link:roleType roleURI="http://aehr.com/role/GoodwillAndPurchasedIntangibleAssetsDetails" id="GoodwillAndPurchasedIntangibleAssetsDetails">
        <link:definition>995597 - Disclosure - GOODWILL AND PURCHASED INTANGIBLE ASSETS (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/GoodwillAndPurchasedIntangibleAssetsDetails1" id="GoodwillAndPurchasedIntangibleAssetsDetails1">
        <link:definition>995598 - Disclosure - GOODWILL AND PURCHASED INTANGIBLE ASSETS (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/GoodwillAndPurchasedIntangibleAssetsDetails2" id="GoodwillAndPurchasedIntangibleAssetsDetails2">
        <link:definition>995599 - Disclosure - GOODWILL AND PURCHASED INTANGIBLE ASSETS (Details 2)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/GoodwillAndPurchasedIntangibleAssetsDetailsNarrative" id="GoodwillAndPurchasedIntangibleAssetsDetailsNarrative">
        <link:definition>995600 - Disclosure - GOODWILL AND PURCHASED INTANGIBLE ASSETS (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/IncomeTaxesDetails" id="IncomeTaxesDetails">
        <link:definition>995601 - Disclosure - INCOME TAXES (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/IncomeTaxesDetails1" id="IncomeTaxesDetails1">
        <link:definition>995602 - Disclosure - INCOME TAXES (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/IncomeTaxesDetails2" id="IncomeTaxesDetails2">
        <link:definition>995603 - Disclosure - INCOME TAXES (Details 2)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/IncomeTaxesDetails3" id="IncomeTaxesDetails3">
        <link:definition>995604 - Disclosure - INCOME TAXES (Details 3)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/IncomeTaxesDetails4" id="IncomeTaxesDetails4">
        <link:definition>995605 - Disclosure - INCOME TAXES (Details 4)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/IncomeTaxesDetails5" id="IncomeTaxesDetails5">
        <link:definition>995606 - Disclosure - INCOME TAXES (Details 5)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/IncomeTaxesDetails6" id="IncomeTaxesDetails6">
        <link:definition>995607 - Disclosure - INCOME TAXES (Details 6)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/IncomeTaxesDetailsNarrative" id="IncomeTaxesDetailsNarrative">
        <link:definition>995608 - Disclosure - INCOME TAXES (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/LeasesDetails" id="LeasesDetails">
        <link:definition>995609 - Disclosure - LEASES (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/LeasesDetails1" id="LeasesDetails1">
        <link:definition>995610 - Disclosure - LEASES (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/LeasesDetailsNarrative" id="LeasesDetailsNarrative">
        <link:definition>995611 - Disclosure - LEASES (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/RetirementPlanDetailsNarrative" id="RetirementPlanDetailsNarrative">
        <link:definition>995612 - Disclosure - RETIREMENT PLAN (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EquityDetailsNarrative" id="EquityDetailsNarrative">
        <link:definition>995613 - Disclosure - EQUITY (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/RevenueDetails" id="RevenueDetails">
        <link:definition>995614 - Disclosure - REVENUE (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/RevenueDetails1" id="RevenueDetails1">
        <link:definition>995615 - Disclosure - REVENUE (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/RevenueDetails2" id="RevenueDetails2">
        <link:definition>995616 - Disclosure - REVENUE (Details 2)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/RevenueDetailsNarrative" id="RevenueDetailsNarrative">
        <link:definition>995617 - Disclosure - REVENUE (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeStockPlansDetails" id="EmployeeStockPlansDetails">
        <link:definition>995618 - Disclosure - EMPLOYEE STOCK PLANS (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeStockPlansDetails1" id="EmployeeStockPlansDetails1">
        <link:definition>995619 - Disclosure - EMPLOYEE STOCK PLANS (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeStockPlansDetails2" id="EmployeeStockPlansDetails2">
        <link:definition>995620 - Disclosure - EMPLOYEE STOCK PLANS (Details 2)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeStockPlansDetails3" id="EmployeeStockPlansDetails3">
        <link:definition>995621 - Disclosure - EMPLOYEE STOCK PLANS (Details 3)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeStockPlansDetails4" id="EmployeeStockPlansDetails4">
        <link:definition>995622 - Disclosure - EMPLOYEE STOCK PLANS (Details 4)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeStockPlansDetails5" id="EmployeeStockPlansDetails5">
        <link:definition>995623 - Disclosure - EMPLOYEE STOCK PLANS (Details 5)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeStockPlansDetails6" id="EmployeeStockPlansDetails6">
        <link:definition>995624 - Disclosure - EMPLOYEE STOCK PLANS (Details 6)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeStockPlansDetailsNarrative" id="EmployeeStockPlansDetailsNarrative">
        <link:definition>995625 - Disclosure - EMPLOYEE STOCK PLANS (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/RestructuringChargesDetails" id="RestructuringChargesDetails">
        <link:definition>995626 - Disclosure - RESTRUCTURING CHARGES (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/RestructuringChargesDetailsNarrative" id="RestructuringChargesDetailsNarrative">
        <link:definition>995627 - Disclosure - RESTRUCTURING CHARGES (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/EmployeeRetentionCreditDetailsNarrative" id="EmployeeRetentionCreditDetailsNarrative">
        <link:definition>995628 - Disclosure - EMPLOYEE RETENTION CREDIT (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/NetIncomeLossPerShareDetails" id="NetIncomeLossPerShareDetails">
        <link:definition>995629 - Disclosure - NET INCOME (LOSS) PER SHARE (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/AccumulatedOtherComprehensiveLossDetails" id="AccumulatedOtherComprehensiveLossDetails">
        <link:definition>995630 - Disclosure - ACCUMULATED OTHER COMPREHENSIVE LOSS (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/SegmentInformationDetails" id="SegmentInformationDetails">
        <link:definition>995631 - Disclosure - SEGMENT INFORMATION (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://aehr.com/role/SegmentInformationDetailsNarrative" id="SegmentInformationDetailsNarrative">
        <link:definition>995632 - Disclosure - SEGMENT INFORMATION (Details Narrative)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:type="simple" xlink:href="aehr-20260529_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="aehr-20260529_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="aehr-20260529_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="aehr-20260529_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
    </appinfo>
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  <import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" />
  <import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <import namespace="http://xbrl.sec.gov/country/2025" schemaLocation="https://xbrl.sec.gov/country/2025/country-2025.xsd" />
  <import namespace="http://xbrl.sec.gov/currency/2025" schemaLocation="https://xbrl.sec.gov/currency/2025/currency-2025.xsd" />
  <import namespace="http://xbrl.sec.gov/dei/2025" schemaLocation="https://xbrl.sec.gov/dei/2025/dei-2025.xsd" />
  <import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" />
  <import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" />
  <import namespace="http://www.xbrl.org/2009/arcrole/fact-explanatoryFact" schemaLocation="http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd" />
  <import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <import namespace="http://www.xbrl.org/2009/role/net" schemaLocation="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd" />
  <import namespace="http://fasb.org/srt-types/2025" schemaLocation="https://xbrl.fasb.org/srt/2025/elts/srt-types-2025.xsd" />
  <import namespace="http://www.xbrl.org/dtr/type/2022-03-31" schemaLocation="https://www.xbrl.org/dtr/type/2022-03-31/types.xsd" />
  <import namespace="http://fasb.org/us-types/2025" schemaLocation="https://xbrl.fasb.org/us-gaap/2025/elts/us-types-2025.xsd" />
  <import namespace="http://fasb.org/srt/2025" schemaLocation="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd" />
  <import namespace="http://fasb.org/us-gaap/2025" schemaLocation="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd" />
  <import namespace="http://xbrl.sec.gov/ecd/2025" schemaLocation="https://xbrl.sec.gov/ecd/2025/ecd-2025.xsd" />
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  <element id="aehr_IssuanceOfCommonStockInPublicOfferingsNetOfIssuanceCostsAmount" name="IssuanceOfCommonStockInPublicOfferingsNetOfIssuanceCostsAmount" nillable="true" xbrli:balance="credit" xbrli:periodType="duration" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_NetTransferOfEquipmentBetweenInventoryAndPropertyAndEquipment" name="NetTransferOfEquipmentBetweenInventoryAndPropertyAndEquipment" nillable="true" xbrli:balance="credit" xbrli:periodType="duration" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_PropertyAndEquipmentAcquiredIncludedInAccountsPayableAndAccruedLiabilities" name="PropertyAndEquipmentAcquiredIncludedInAccountsPayableAndAccruedLiabilities" nillable="true" xbrli:balance="credit" xbrli:periodType="duration" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_IssuanceCostsOfCommonStockIncludedInAccountsPayable" name="IssuanceCostsOfCommonStockIncludedInAccountsPayable" nillable="true" xbrli:balance="credit" xbrli:periodType="duration" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_RetirementPlanDisclouserTextBlock" name="RetirementPlanDisclouserTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_EmployeeRetentionCreditDisclosureTextBlock" name="EmployeeRetentionCreditDisclosureTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ReceivablesTradeAndOtherAccountsReceivableAllowanceForDoubtfulAccountsPolicyTextBlock" name="ReceivablesTradeAndOtherAccountsReceivableAllowanceForDoubtfulAccountsPolicyTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_IntangibleAssetsFiniteLivedPolicyTextBlock" name="IntangibleAssetsFiniteLivedPolicyTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_AccountingStandardsAdoptedPolicyTextBlock" name="AccountingStandardsAdoptedPolicyTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
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  <element id="aehr_ScheduleOfUsefulLifeForPropertyAndEquipmentTableTextblock" name="ScheduleOfUsefulLifeForPropertyAndEquipmentTableTextblock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ScheduleOfWarrantyReserveTableTextBlock" name="ScheduleOfWarrantyReserveTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_CustomerDepositsAndDeferredRevenueTableTextBlock" name="CustomerDepositsAndDeferredRevenueTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ScheduleOfAcquisitionDateFairValueOfTheConsiderationTableTextBlock" name="ScheduleOfAcquisitionDateFairValueOfTheConsiderationTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ScheduleOfFairValueOfTheAssetsAcquiredAndLiabilitiesTableTextBlock" name="ScheduleOfFairValueOfTheAssetsAcquiredAndLiabilitiesTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ScheduleOfFairValueOfTheSeparatelyIdentifiableIntangibleAssetsTableTextBlock" name="ScheduleOfFairValueOfTheSeparatelyIdentifiableIntangibleAssetsTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_IncomeTaxPaidTableTextBlock" name="IncomeTaxPaidTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ScheduleOfRestrictedSharesAndPerformanceRestrictedSharesGrantedTableTextBlock" name="ScheduleOfRestrictedSharesAndPerformanceRestrictedSharesGrantedTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_StockApperiaciationRightTableTextBlock" name="StockApperiaciationRightTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ScheduleOfRestructuringChargesTableTextBlock" name="ScheduleOfRestructuringChargesTableTextBlock" nillable="true" xbrli:periodType="duration" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_PercentageOfConcentrationRiskPercentage" name="PercentageOfConcentrationRiskPercentage" nillable="true" xbrli:periodType="instant" type="num:percentItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ConcentrationRiskPercentageOne" name="ConcentrationRiskPercentageOne" nillable="true" xbrli:periodType="duration" type="num:percentItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_ConcentrationRiskPercentage" name="ConcentrationRiskPercentage" nillable="true" xbrli:periodType="duration" type="num:percentItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_FiniteLivedTangibleAssetUsefulLife" name="FiniteLivedTangibleAssetUsefulLife" nillable="true" xbrli:periodType="duration" type="xbrli:durationItemType" substitutionGroup="xbrli:item" />
  <element id="aehr_EscrowPayableCurrent" name="EscrowPayableCurrent" nillable="true" xbrli:balance="credit" xbrli:periodType="instant" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" />
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</schema>
