Acquired Intangible Assets and Goodwill - Intangible assets (Details) - Forge Nano, Inc. - USD ($) $ in Thousands |
3 Months Ended | 12 Months Ended | ||
|---|---|---|---|---|
Mar. 31, 2026 |
Mar. 31, 2025 |
Dec. 31, 2025 |
Dec. 31, 2024 |
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| Acquired Intangible Assets and Goodwill | ||||
| Acquired patents, Gross Carrying Amount | $ 3,212 | $ 3,212 | $ 3,212 | |
| Acquired patents, Accumulated Amortization | (1,674) | (1,623) | (1,420) | |
| Acquired patents, Net | $ 1,538 | $ 1,589 | 1,792 | |
| Acquired patents useful life | 15 years | 15 years | ||
| Amortization of intangible assets | $ 51 | $ 51 | $ 203 | $ 253 |
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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. No definition available.
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- Definition Weighted-average period of amortization for finite-lived intangible asset acquired in business combination, asset acquisition, and from joint venture formation, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Excludes goodwill and capitalized cost for software to be sold, leased, or marketed. Reference 1: http://www.xbrl.org/2003/role/disclosureRef
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- Definition Amount of amortization expense for finite-lived intangible asset. Excludes goodwill and capitalized cost for software to be sold, leased, or marketed. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
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- Definition Amount of accumulated amortization of finite-lived intangible asset. Excludes goodwill and capitalized cost for software to be sold, leased, or marketed. Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
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- Definition Amount, before accumulated amortization, of finite-lived intangible asset. Excludes goodwill and capitalized cost for software to be sold, leased, or marketed. Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
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- Definition Amount, after accumulated amortization, of finite-lived intangible asset. Excludes goodwill and capitalized cost for software to be sold, leased, or marketed. Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
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- Details
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