<?xml version="1.0" encoding="UTF-8"?>

<!--XBRL Document Created with the Workiva Platform-->
<!--Copyright 2026 Workiva-->
<!--r:019f5bce-a8bb-7506-96d1-b01d06582f49,g:6151f3a5-10af-4492-a293-dd81249558e1-->
<link:linkbase xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <link:roleRef roleURI="http://www.entegris.com/role/DocumentandEntityInformationDocument" xlink:type="simple" xlink:href="entg-20260715.xsd#DocumentandEntityInformationDocument"/>
  <link:presentationLink xlink:role="http://www.entegris.com/role/DocumentandEntityInformationDocument" xlink:type="extended">
    <link:loc xlink:type="locator" xlink:label="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CoverAbstract"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityCentralIndexKey_019f5bce-a8bb-75b5-88c8-75135a3f7650" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCentralIndexKey"/>
    <link:presentationArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityCentralIndexKey_019f5bce-a8bb-75b5-88c8-75135a3f7650" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityRegistrantName_019f5bce-a8bb-7d17-b5ec-266a2cb471fe" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityRegistrantName"/>
    <link:presentationArc order="2" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityRegistrantName_019f5bce-a8bb-7d17-b5ec-266a2cb471fe" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_AmendmentFlag_019f5bce-a8bb-79ce-ba55-9fa0152b87d5" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AmendmentFlag"/>
    <link:presentationArc order="3" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_AmendmentFlag_019f5bce-a8bb-79ce-ba55-9fa0152b87d5" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_DocumentPeriodEndDate_019f5bce-a8bb-7158-9331-11f26a0e5130" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentPeriodEndDate"/>
    <link:presentationArc order="4" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_DocumentPeriodEndDate_019f5bce-a8bb-7158-9331-11f26a0e5130" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_Security12bTitle_019f5bce-a8bb-7fc8-8c72-145c7d090b62" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_Security12bTitle"/>
    <link:presentationArc order="5" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_Security12bTitle_019f5bce-a8bb-7fc8-8c72-145c7d090b62" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressAddressLine1_019f5bce-a8bb-7e45-8024-decd656bbfce" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressAddressLine1"/>
    <link:presentationArc order="6" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityAddressAddressLine1_019f5bce-a8bb-7e45-8024-decd656bbfce" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressCityOrTown_019f5bce-a8bb-749a-a4e4-92fcac30afd5" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressCityOrTown"/>
    <link:presentationArc order="7" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityAddressCityOrTown_019f5bce-a8bb-749a-a4e4-92fcac30afd5" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressStateOrProvince_019f5bce-a8bb-70df-9a9a-836813102ce5" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressStateOrProvince"/>
    <link:presentationArc order="8" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityAddressStateOrProvince_019f5bce-a8bb-70df-9a9a-836813102ce5" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityFileNumber_019f5bce-a8bb-79c2-97ed-0be20cb60baa" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityFileNumber"/>
    <link:presentationArc order="9" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityFileNumber_019f5bce-a8bb-79c2-97ed-0be20cb60baa" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityIncorporationStateCountryCode_019f5bce-a8bb-7bfb-857a-84cff565b56a" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityIncorporationStateCountryCode"/>
    <link:presentationArc order="10" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityIncorporationStateCountryCode_019f5bce-a8bb-7bfb-857a-84cff565b56a" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_DocumentType_019f5bce-a8bb-7b17-839b-35d4a482215b" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentType"/>
    <link:presentationArc order="11" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_DocumentType_019f5bce-a8bb-7b17-839b-35d4a482215b" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityTaxIdentificationNumber_019f5bce-a8bb-7a70-ac81-2f3b0c90bf08" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityTaxIdentificationNumber"/>
    <link:presentationArc order="12" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityTaxIdentificationNumber_019f5bce-a8bb-7a70-ac81-2f3b0c90bf08" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressPostalZipCode_019f5bce-a8bb-793a-b09c-d40de97ee682" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressPostalZipCode"/>
    <link:presentationArc order="13" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityAddressPostalZipCode_019f5bce-a8bb-793a-b09c-d40de97ee682" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_TradingSymbol_019f5bce-a8bb-7573-b2dc-14af31cb5ef5" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_TradingSymbol"/>
    <link:presentationArc order="14" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_TradingSymbol_019f5bce-a8bb-7573-b2dc-14af31cb5ef5" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_SecurityExchangeName_019f5bce-a8bb-7639-b166-ad22705af408" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SecurityExchangeName"/>
    <link:presentationArc order="15" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_SecurityExchangeName_019f5bce-a8bb-7639-b166-ad22705af408" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_CityAreaCode_019f5bce-a8bb-76c3-b26a-ce42ec1804e5" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CityAreaCode"/>
    <link:presentationArc order="16" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_CityAreaCode_019f5bce-a8bb-76c3-b26a-ce42ec1804e5" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_LocalPhoneNumber_019f5bce-a8bb-7706-b36b-1b19bf2b7936" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_LocalPhoneNumber"/>
    <link:presentationArc order="17" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_LocalPhoneNumber_019f5bce-a8bb-7706-b36b-1b19bf2b7936" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_WrittenCommunications_019f5bce-a8bb-764e-80dd-1c8ebb7d4d4b" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_WrittenCommunications"/>
    <link:presentationArc order="18" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_WrittenCommunications_019f5bce-a8bb-764e-80dd-1c8ebb7d4d4b" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_SolicitingMaterial_019f5bce-a8bb-7653-bd32-05386b96eac3" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SolicitingMaterial"/>
    <link:presentationArc order="19" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_SolicitingMaterial_019f5bce-a8bb-7653-bd32-05386b96eac3" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_PreCommencementTenderOffer_019f5bce-a8bb-77f4-93ab-c3fb9925e200" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_PreCommencementTenderOffer"/>
    <link:presentationArc order="20" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_PreCommencementTenderOffer_019f5bce-a8bb-77f4-93ab-c3fb9925e200" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_PreCommencementIssuerTenderOffer_019f5bce-a8bb-7b52-9032-af8ece06750f" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_PreCommencementIssuerTenderOffer"/>
    <link:presentationArc order="21" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_PreCommencementIssuerTenderOffer_019f5bce-a8bb-7b52-9032-af8ece06750f" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityEmergingGrowthCompany_019f5bce-a8bb-7f9b-b87f-e2ed2b80f723" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityEmergingGrowthCompany"/>
    <link:presentationArc order="22" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019f5bce-a8bb-7988-9a40-428f154b7082" xlink:to="loc_dei_EntityEmergingGrowthCompany_019f5bce-a8bb-7f9b-b87f-e2ed2b80f723" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
  </link:presentationLink>
</link:linkbase>
