0000720500 2026-06-02 2026-06-02 iso4217:USD shares S-3 424B5 EX-FILING FEES 333-294296 0000720500 AMTECH SYSTEMS INC N/A N/A N/A S-3 AMTECH SYSTEMS INC 0.00 0.00 0.00 0.00 0.00 60000000 true The prospectus supplement to which this exhibit is attached is a final prospectus for the related offering and relates to the Registration Statement on Form S-3 (No. 333-294296) filed by Amtech Systems, Inc. (the "Company") on March 13, 2026 and declared effective on March 23, 2026, as supplemented by the Registration Statement on Form S-3 MEF (No. 333-296410) filed by the Company pursuant to Rule 462(b) under the Securities Act of 1933, as amended, on June 1, 2026. The maximum aggregate offering amount of the offering is $60,000,000.