Fees Summary |
Jun. 02, 2026
USD ($)
shares
|
|---|---|
| Fees Summary [Line Items] | |
| Total Offering | $ 0.00 |
| Previously Paid Amount | 0.00 |
| Total Fee Amount | 0.00 |
| Total Offset Amount | $ 0.00 |
| Narrative Disclosure | The prospectus supplement to which this exhibit is attached is a final prospectus for the related offering and relates to the Registration Statement on Form S-3 (No. 333-294296) filed by Amtech Systems, Inc. (the "Company") on March 13, 2026 and declared effective on March 23, 2026, as supplemented by the Registration Statement on Form S-3 MEF (No. 333-296410) filed by the Company pursuant to Rule 462(b) under the Securities Act of 1933, as amended, on June 1, 2026. The maximum aggregate offering amount of the offering is $60,000,000. |
| Net Fee | $ 0.00 |
| Narrative - Max Aggregate Offering Amount | shares | 60,000,000 |
| Offering Table N/A | N/A |
| Offset Table N/A | N/A |
| Combined Prospectus Table N/A | N/A |
| Final Prospectus | true |