Submission |
Jun. 01, 2026 |
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| Submission [Line Items] | |
| Central Index Key | 0000720500 |
| Registrant Name | AMTECH SYSTEMS INC |
| Registration File Number | 333-294296 |
| Form Type | S-3 |
| Submission Type | S-3MEF |
| Fee Exhibit Type | EX-FILING FEES |
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- Definition A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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- Definition The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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