<?xml version="1.0" encoding="UTF-8"?>

<!--XBRL Document Created with the Workiva Platform-->
<!--Copyright 2026 Workiva-->
<!--r:019e1742-e434-739f-b088-c0fa21782326,g:5cde5c1a-d07c-49af-b7fc-ae67c8ef3ac0-->
<link:linkbase xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <link:roleRef roleURI="http://www.entegris.com/role/DocumentandEntityInformationDocument" xlink:type="simple" xlink:href="entg-20260509.xsd#DocumentandEntityInformationDocument"/>
  <link:presentationLink xlink:role="http://www.entegris.com/role/DocumentandEntityInformationDocument" xlink:type="extended">
    <link:loc xlink:type="locator" xlink:label="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CoverAbstract"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityCentralIndexKey_019e1742-e434-7f2f-a4d3-ed852dce4147" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCentralIndexKey"/>
    <link:presentationArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityCentralIndexKey_019e1742-e434-7f2f-a4d3-ed852dce4147" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityRegistrantName_019e1742-e434-706a-9565-5454f845bdc5" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityRegistrantName"/>
    <link:presentationArc order="2" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityRegistrantName_019e1742-e434-706a-9565-5454f845bdc5" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_AmendmentFlag_019e1742-e434-75ae-bd5b-66eb742db1fe" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AmendmentFlag"/>
    <link:presentationArc order="3" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_AmendmentFlag_019e1742-e434-75ae-bd5b-66eb742db1fe" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_DocumentPeriodEndDate_019e1742-e434-7784-9783-e6ad9617d224" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentPeriodEndDate"/>
    <link:presentationArc order="4" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_DocumentPeriodEndDate_019e1742-e434-7784-9783-e6ad9617d224" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_Security12bTitle_019e1742-e434-79de-9445-90c19b324215" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_Security12bTitle"/>
    <link:presentationArc order="5" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_Security12bTitle_019e1742-e434-79de-9445-90c19b324215" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressAddressLine1_019e1742-e434-760d-944b-48d1775d5127" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressAddressLine1"/>
    <link:presentationArc order="6" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityAddressAddressLine1_019e1742-e434-760d-944b-48d1775d5127" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressCityOrTown_019e1742-e434-79af-8e99-af5731684119" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressCityOrTown"/>
    <link:presentationArc order="7" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityAddressCityOrTown_019e1742-e434-79af-8e99-af5731684119" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressStateOrProvince_019e1742-e434-7c06-8c8b-023fe76e03c1" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressStateOrProvince"/>
    <link:presentationArc order="8" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityAddressStateOrProvince_019e1742-e434-7c06-8c8b-023fe76e03c1" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityFileNumber_019e1742-e434-7a65-8da6-233e52ffa9c5" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityFileNumber"/>
    <link:presentationArc order="9" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityFileNumber_019e1742-e434-7a65-8da6-233e52ffa9c5" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityIncorporationStateCountryCode_019e1742-e434-7b1f-8299-d57ad958852c" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityIncorporationStateCountryCode"/>
    <link:presentationArc order="10" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityIncorporationStateCountryCode_019e1742-e434-7b1f-8299-d57ad958852c" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_DocumentType_019e1742-e434-7a06-8300-131bb3120b21" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentType"/>
    <link:presentationArc order="11" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_DocumentType_019e1742-e434-7a06-8300-131bb3120b21" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityTaxIdentificationNumber_019e1742-e434-761c-b4f7-a6bc1225cbd1" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityTaxIdentificationNumber"/>
    <link:presentationArc order="12" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityTaxIdentificationNumber_019e1742-e434-761c-b4f7-a6bc1225cbd1" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityAddressPostalZipCode_019e1742-e434-77f7-a32b-3267de383ccd" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressPostalZipCode"/>
    <link:presentationArc order="13" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityAddressPostalZipCode_019e1742-e434-77f7-a32b-3267de383ccd" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_TradingSymbol_019e1742-e434-7303-a487-822c840a1834" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_TradingSymbol"/>
    <link:presentationArc order="14" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_TradingSymbol_019e1742-e434-7303-a487-822c840a1834" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_SecurityExchangeName_019e1742-e434-7091-83e0-eb6373b61593" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SecurityExchangeName"/>
    <link:presentationArc order="15" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_SecurityExchangeName_019e1742-e434-7091-83e0-eb6373b61593" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_CityAreaCode_019e1742-e434-7ac5-9d30-5beebad8476e" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CityAreaCode"/>
    <link:presentationArc order="16" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_CityAreaCode_019e1742-e434-7ac5-9d30-5beebad8476e" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_LocalPhoneNumber_019e1742-e434-72b4-ba28-5bb241abfa87" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_LocalPhoneNumber"/>
    <link:presentationArc order="17" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_LocalPhoneNumber_019e1742-e434-72b4-ba28-5bb241abfa87" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_WrittenCommunications_019e1742-e434-7ff4-92f2-f95e7c33c24e" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_WrittenCommunications"/>
    <link:presentationArc order="18" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_WrittenCommunications_019e1742-e434-7ff4-92f2-f95e7c33c24e" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_SolicitingMaterial_019e1742-e434-738d-ba89-86eb24518b1f" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SolicitingMaterial"/>
    <link:presentationArc order="19" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_SolicitingMaterial_019e1742-e434-738d-ba89-86eb24518b1f" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_PreCommencementTenderOffer_019e1742-e434-7885-8495-4dc1f65cd710" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_PreCommencementTenderOffer"/>
    <link:presentationArc order="20" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_PreCommencementTenderOffer_019e1742-e434-7885-8495-4dc1f65cd710" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_PreCommencementIssuerTenderOffer_019e1742-e434-7460-8336-3ea3e0133dca" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_PreCommencementIssuerTenderOffer"/>
    <link:presentationArc order="21" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_PreCommencementIssuerTenderOffer_019e1742-e434-7460-8336-3ea3e0133dca" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
    <link:loc xlink:type="locator" xlink:label="loc_dei_EntityEmergingGrowthCompany_019e1742-e434-722a-90b2-237933eafaea" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityEmergingGrowthCompany"/>
    <link:presentationArc order="22" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_CoverAbstract_019e1742-e434-7927-bc8c-8b06903cc35d" xlink:to="loc_dei_EntityEmergingGrowthCompany_019e1742-e434-722a-90b2-237933eafaea" xlink:type="arc" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
  </link:presentationLink>
</link:linkbase>
