995200100 - Statement - Condensed Consolidated Balance Sheets link:presentationLink link:calculationLink link:definitionLink 995200200 - Statement - Condensed Consolidated Statements of Operations link:presentationLink link:calculationLink link:definitionLink 995200300 - Statement - Condensed Consolidated Statements of Comprehensive Loss link:presentationLink link:calculationLink link:definitionLink 995200500 - Statement - Condensed Consolidated Statements of Cash Flows link:presentationLink link:calculationLink link:definitionLink 99940301 - Disclosure - Inventory (Details) link:presentationLink link:calculationLink link:definitionLink 99940401 - Disclosure - Intangible Assets - Gross Carrying Amount (Details) link:presentationLink link:calculationLink link:definitionLink 99940402 - Disclosure - Intangible Assets - Estimated Amortization Expense (Details) link:presentationLink link:calculationLink link:definitionLink 99940801 - Disclosure - Convertible Senior Notes (Details) link:presentationLink link:calculationLink link:definitionLink 99941102 - Disclosure - Revenue - Changes in contract assets and contract liabilities (Details) link:presentationLink link:calculationLink link:definitionLink 99941601 - Disclosure - Segment and Geographic Area Reporting (Details) link:presentationLink link:calculationLink link:definitionLink 99941703 - Disclosure - Commitments and Contingencies - Unconditional Purchase Obligations (Details) link:presentationLink link:calculationLink link:definitionLink 995200090 - Document - Document and Entity Information link:presentationLink link:calculationLink link:definitionLink 995200105 - Statement - Condensed Consolidated Balance Sheets (Parenthetical) link:presentationLink link:calculationLink link:definitionLink 995200400 - Statement - Condensed Consolidated Statements of Stockholders' Equity link:presentationLink link:calculationLink link:definitionLink 995200505 - Statement - Condensed Consolidated Statements of Cash Flows (Parenthetical) link:presentationLink link:calculationLink link:definitionLink 995210801 - Disclosure - Convertible Senior Notes link:presentationLink link:calculationLink link:definitionLink 99930603 - Disclosure - Fair Value Measurements (Tables) link:presentationLink link:calculationLink link:definitionLink 99930803 - Disclosure - Convertible Senior Notes (Tables) link:presentationLink link:calculationLink link:definitionLink 99931203 - Disclosure - Employee Benefit Plans (Tables) link:presentationLink link:calculationLink link:definitionLink 99940101 - Disclosure - Nature of Operations (Details) link:presentationLink link:calculationLink link:definitionLink 99940502 - Disclosure - Investments - Equity Method Investments (Details) link:presentationLink link:calculationLink link:definitionLink 99940601 - Disclosure - Fair Value Measurements - Hierarchy (Details) link:presentationLink link:calculationLink link:definitionLink 99940602 - Disclosure - Fair Value Measurements - Contingent consideration valuation (Details) link:presentationLink link:calculationLink link:definitionLink 99940603 - Disclosure - Fair Value Measurements - Contingent consideration changes (Details) link:presentationLink link:calculationLink link:definitionLink 99940701 - Disclosure - Warrant Liabilities - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 99940702 - Disclosure - Warrant Liabilities - Valuation Assumptions (Details) link:presentationLink link:calculationLink link:definitionLink 99940703 - Disclosure - Warrant Liabilities - Changes in carrying amount (Details) link:presentationLink link:calculationLink link:definitionLink 99941001 - Disclosure - Stockholders' Equity (Details) link:presentationLink link:calculationLink link:definitionLink 99941101 - Disclosure - Revenue - Disaggregation of Revenue (Details) link:presentationLink link:calculationLink link:definitionLink 99941103 - Disclosure - Revenue - Estimated future revenue (Details) link:presentationLink link:calculationLink link:definitionLink 41103 - Disclosure - Revenue - Estimated future revenue Default (Details) link:presentationLink link:calculationLink link:definitionLink 99941201 - Disclosure - Employee Benefit Plans - Stock Option and Incentive Plan (Details) link:presentationLink link:calculationLink link:definitionLink 99941202 - Disclosure - Employee Benefit Plans - Service Stock Options Awards (Details) link:presentationLink link:calculationLink link:definitionLink 99941203 - Disclosure - Employee Benefit Plans - Market Condition Stock Option Awards (Details) link:presentationLink link:calculationLink link:definitionLink 99941204 - Disclosure - Employee Benefit Plans - Restricted Common Stock and Restricted Stock Unit Awards (Details) link:presentationLink link:calculationLink link:definitionLink 99941205 - Disclosure - Employee Benefit Plans - 401(K) Saving and Retirement Plan (Details) link:presentationLink link:calculationLink link:definitionLink 99941206 - Disclosure - Employee Benefit Plans - Non-Employee Director Compensation (Details) link:presentationLink link:calculationLink link:definitionLink 99941301 - Disclosure - Restructuring - Restructuring charges incurred (Details) link:presentationLink link:calculationLink link:definitionLink 99941302 - Disclosure - Restructuring - Accrued restructuring balances (Details) link:presentationLink link:calculationLink link:definitionLink 99941303 - Disclosure - Restructuring - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 99941401 - Disclosure - Income Taxes (Details) link:presentationLink link:calculationLink link:definitionLink 99941501 - Disclosure - Earnings Per Share (Details) link:presentationLink link:calculationLink link:definitionLink 99941701 - Disclosure - Commitments and Contingencies - Restricted cash (Details) link:presentationLink link:calculationLink link:definitionLink 99941702 - Disclosure - Commitments and Contingencies - Guarantee (Details) link:presentationLink link:calculationLink link:definitionLink 99941801 - Disclosure - Government Tax Credits (Details) link:presentationLink link:calculationLink link:definitionLink 99941901 - Disclosure - Variable Interest Entities (Details) link:presentationLink link:calculationLink link:definitionLink 995210101 - Disclosure - Nature of Operations link:presentationLink link:calculationLink link:definitionLink 995210201 - Disclosure - Summary of Significant Accounting Policies link:presentationLink link:calculationLink link:definitionLink 995210301 - Disclosure - Inventory link:presentationLink link:calculationLink link:definitionLink 995210401 - Disclosure - Intangible Assets link:presentationLink link:calculationLink link:definitionLink 995210501 - Disclosure - Investments link:presentationLink link:calculationLink link:definitionLink 995210601 - Disclosure - Fair Value Measurements link:presentationLink link:calculationLink link:definitionLink 995210701 - Disclosure - Warrant Liabilities link:presentationLink link:calculationLink link:definitionLink 995210901 - Disclosure - Extended Maintenance Contracts and Warranty Reserve link:presentationLink link:calculationLink link:definitionLink 995211001 - Disclosure - Stockholders' Equity link:presentationLink link:calculationLink link:definitionLink 995211101 - Disclosure - Revenue link:presentationLink link:calculationLink link:definitionLink 995211201 - Disclosure - Employee Benefit Plans link:presentationLink link:calculationLink link:definitionLink 995211301 - Disclosure - Restructuring link:presentationLink link:calculationLink link:definitionLink 995211401 - Disclosure - Income Taxes link:presentationLink link:calculationLink link:definitionLink 995211501 - Disclosure - Earnings Per Share link:presentationLink link:calculationLink link:definitionLink 995211601 - Disclosure - Segment and Geographic Area Reporting link:presentationLink link:calculationLink link:definitionLink 995211701 - Disclosure - Commitments and Contingencies link:presentationLink link:calculationLink link:definitionLink 995211801 - Disclosure - Government Tax Credits link:presentationLink link:calculationLink link:definitionLink 995211901 - Disclosure - Variable Interest Entities link:presentationLink link:calculationLink link:definitionLink 99920202 - Disclosure - Summary of Significant Accounting Policies (Policies) link:presentationLink link:calculationLink link:definitionLink 99930303 - Disclosure - Inventory (Tables) link:presentationLink link:calculationLink link:definitionLink 99930403 - Disclosure - Intangible Assets (Tables) link:presentationLink link:calculationLink link:definitionLink 99930503 - Disclosure - Investments (Tables) link:presentationLink link:calculationLink link:definitionLink 99930703 - Disclosure - Warrant Liabilities (Tables) link:presentationLink link:calculationLink link:definitionLink 99930903 - Disclosure - Extended Maintenance Contracts and Warranty Reserve (Tables) link:presentationLink link:calculationLink link:definitionLink 99931103 - Disclosure - Revenue (Tables) link:presentationLink link:calculationLink link:definitionLink 99931303 - Disclosure - Restructuring (Tables) link:presentationLink link:calculationLink link:definitionLink 99931603 - Disclosure - Segment and Geographic Area Reporting (Tables) link:presentationLink link:calculationLink link:definitionLink 99931703 - Disclosure - Commitments and Contingencies (Tables) link:presentationLink link:calculationLink link:definitionLink 99931903 - Disclosure - Variable Interest Entities (Tables) link:presentationLink link:calculationLink link:definitionLink 99940501 - Disclosure - Investments - Non-marketable Securities (Details) link:presentationLink link:calculationLink link:definitionLink 99940901 - Disclosure - Extended Maintenance Contracts and Warranty Reserve (Details) link:presentationLink link:calculationLink link:definitionLink 99900 - Disclosure - Standard And Custom Axis Domain Defaults link:presentationLink link:calculationLink link:definitionLink