The Company’s 2020 and 2010 Equity Incentive Plans are described in the Annual Report.

As of March 31, 2026, the Company had 4,919,852 authorized shares available for future issuance under all of its stock incentive plans.

The following table shows total share-based compensation expense included in the consolidated statements of operations for the three and nine months ended March 31, 2026 and 2025 (in thousands):


	Three Months Ended March 31,				Nine Months Ended March 31,
	2026		2025		2026		2025
Cost of revenues	$	59	$	62	$	201	$	173
Research and development	1,052		1,351		3,675		3,907
Sales, general and administrative	501		435		1,525		1,257
	$	1,612	$	1,848	$	5,401	$	5,337

There were no options exercised under the Company’s stock incentive plans during the three and nine months ended March 31, 2026 and 2025.

As of March 31, 2026, the Company had no unrecognized compensation costs related to stock options, and the Company did not grant any employee stock options during the three and nine months ended March 31, 2026, and 2025.

The following table summarizes the activity of the RSUs made by the Company:


	Number of Shares	Weighted Average Grant Date Fair Value Per Share
Non-vested RSUs, June 30, 2025	100,064	$	209.90
RSUs granted	19,773	$	517.34
RSUs vested	(32,679)	$	219.61
RSUs canceled	(9,261)	$	214.95
Non-vested RSUs, March 31, 2026	77,897	$	283.27

The intrinsic value of RSUs vested in the three months ended March 31, 2026 and 2025 was $12.2 million and $6.9 million, respectively.

The intrinsic value of RSUs vested in the nine months ended March 31, 2026 and 2025 was $16.7 million and $8.5 million, respectively.

The total intrinsic value of all outstanding RSUs was $61.6 million as of March 31, 2026.

As of March 31, 2026, there were unrecognized compensation costs related to RSUs of $16.9 million which the Company expects to recognize over a weighted average period of 3.3 years.