v3.26.1
Acquired Intangible Assets and Goodwill - Estimated amortization expense (Details) - Forge Nano, Inc. - USD ($)
$ in Thousands
Dec. 31, 2025
Dec. 31, 2024
Estimated amortization expense    
2026 $ 203  
2027 203  
2028 194  
2029 165  
2030 165  
Thereafter 659  
Acquired patents, Net $ 1,589 $ 1,792