v3.26.1
Acquired Intangible Assets and Goodwill - Intangible assets (Details) - Forge Nano, Inc. - USD ($)
$ in Thousands
12 Months Ended
Dec. 31, 2025
Dec. 31, 2024
Acquired Intangible Assets and Goodwill    
Acquired patents, Gross Carrying Amount $ 3,212 $ 3,212
Acquired patents, Accumulated Amortization (1,623) (1,420)
Acquired patents, Net $ 1,589 1,792
Acquired patents useful life 15 years  
Amortization of intangible assets $ 203 $ 253