Fair Value Measurements - Liabilities measured at fair value on a recurring basis (Details) - Forge Nano, Inc. - Recurring - USD ($) $ in Thousands	Dec. 31, 2025	Dec. 31, 2024
Liabilities
Warrants (Note 17)	$ 5,624	$ 6,264
Contingent consideration (Note 7)	748	811
Derivative - conversion feature embedded in convertible debt (Note 17)		393
Total liabilities	6,372	7,468
Level 3
Liabilities
Warrants (Note 17)	5,624	6,264
Contingent consideration (Note 7)	748	811
Derivative - conversion feature embedded in convertible debt (Note 17)		393
Total liabilities	$ 6,372	$ 7,468

Fair value, after the effects of master netting arrangements, of a financial liability or contract with one or more underlyings, notional amount or payment provision or both, and the contract can be net settled by means outside the contract or delivery of an asset. Includes liabilities not subject to a master netting arrangement and not elected to be offset.

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+ Details