v3.26.1
Stock-Based Compensation - Restricted Stock (Details) - Forge Nano, Inc. - USD ($)
$ / shares in Units, $ in Thousands
12 Months Ended
Dec. 31, 2025
Dec. 31, 2024
Stock-Based Compensation    
Granted 5,300 24,308
Vested 7,505 3,994
Weight average grant date fair value of vested shares vested shares $ 33.71 $ 25.43
Forfeited 0 13,708
Shares outstanding 5,526 7,731
Weighted average grant date fair value of outstanding shares $ 31.23 $ 29.18
Unrecognized compensation expense $ 112 $ 216