v3.26.1
Stock-Based Compensation - Summary of unvested shares (Details) - Forge Nano, Inc. - USD ($)
$ / shares in Units, $ in Thousands
12 Months Ended
Aug. 08, 2022
Dec. 31, 2025
Dec. 31, 2024
Number of Options      
Unvested at beginning of the period   152,247 59,259
Granted 82,512 102,974 150,161
Vested   (110,030) (51,419)
Forfeited   (12,963) (5,754)
Unvested at ending of the period   132,228 152,247
Unvested at beginning of the period   $ 30.72 $ 20.09
Granted $ 96.95 165.43 31.56
Vested   130.41 21.77
Forfeited   38.97 22.55
Unvested at ending of the period   51.87 30.72
Weighted-average Grant-date Fair Value      
Unvested at beginning of the period   12.97 8.68
Granted   20.78 13.18
Vested   7.9 8.91
Forfeited   16.1 10.39
Unvested at ending of the period   $ 22.97 $ 12.97
Weighted remaining contractual term of vested shares   7 years 10 months 24 days 7 years 1 month 17 days
Aggregate intrinsic value of vested shares   $ 3,274 $ 823