v3.26.1
Stock-Based Compensation - Summary of option activity (Details) - Forge Nano, Inc. - USD ($)
$ / shares in Units, $ in Thousands
12 Months Ended
Aug. 08, 2022
Dec. 31, 2025
Dec. 31, 2024
Dec. 31, 2023
Number of Options        
Outstanding at beginning of the period   390,288 322,495  
Granted 82,512 102,974 150,161  
Exercised   (460) (14,808)  
Forfeited   (12,963) (5,754)  
Expired   (24,288) (61,806)  
Outstanding at ending of the period   455,551 390,288 322,495
Vested or expected to vest at end of the period   455,551 390,288  
Exercisable at ending of the period   323,323 238,041  
Weighted average Exercise Price        
Outstanding at beginning of the period   $ 38.57 $ 15.81  
Granted $ 96.95 165.43 31.56  
Exercised $ 121.19 6.86 15.81  
Forfeited   38.97 22.55  
Expired   16.43 13.11  
Outstanding at ending of the period   68.45 38.57 $ 15.81
Vested or expected to vest at end of the period   68.45 38.57  
Exercisable at ending of the period   75.23 43.59  
Weighted-average grant-date fair value of granted shares   20.78 13.18  
Weighted-average grant-date fair value of forfeited shares   $ 16.1 $ 10.39  
Weighted remaining contractual term (in Years)   5 years 1 month 17 days 5 years 7 months 6 days 4 years 2 months 4 days
Vested or expected to vest, weighted remaining contractual term (in Years)   5 years 1 month 17 days 5 years 7 months 6 days  
Exercisable, weighted remaining contractual term (in Years)   4 years 10 days 3 years 11 months 19 days  
Aggregate intrinsic value of options granted   $ 16,456 $ 4,586 $ 3,515
Aggregate intrinsic value of option exercised   35 325  
Aggregate intrinsic value of vested or expected to vest options   16,456 4,586  
Aggregate intrinsic value of exercisable options   $ 12,245 $ 3,493