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          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CN" xlink:label="country_CN"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="onto-20260331.xsd#onto_AccumulatedOtherComprehensiveLossAbstract" xlink:label="onto_AccumulatedOtherComprehensiveLossAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherSundryLiabilitiesCurrent" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="onto-20260331.xsd#onto_LitigationExpenses3" xlink:label="onto_LitigationExpenses3"/>
          <link:loc xlink:type="locator" xlink:href="onto-20260331.xsd#onto_OrderBacklogMember" xlink:label="onto_OrderBacklogMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommercialPaperMember" xlink:label="us-gaap_CommercialPaperMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccruedProfessionalFeesCurrent" xlink:label="us-gaap_AccruedProfessionalFeesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TransferredAtPointInTimeMember" xlink:label="us-gaap_TransferredAtPointInTimeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet"/>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_GeographicReportingAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Geographic reporting [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_GeographicReportingAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Geographic Reporting [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segments [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Incorporation, State or Country Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Incorporation, State or Country Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomerAMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer A [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomerAMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Customer A [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BalanceSheetDetailAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Balance Sheet Detail [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BalanceSheetDetailAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Balance Sheet Detail [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesWithinOneYearFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Fair Value, Maturity, Allocated and Single Maturity Date, Year One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesWithinOneYearFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value, Due within one year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, 12 Months or Longer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">In Unrealized Loss Position For Greater Than 12 Months, Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCurrentReportingStatus_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Current Reporting Status</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCurrentReportingStatus_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Current Reporting Status</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_JP_lbl" xlink:role="http://www.xbrl.org/2003/role/label">JAPAN</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_JP_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Japan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Expenses [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating expenses:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel2Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Inputs, Level 2 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel2Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Significant Other Observable Inputs (Level 2) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commitments and Contingencies Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Commitments and Contingencies</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Refund Liability, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer deposits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Shares Authorized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year Four</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2029</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ProductOrServiceAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product and Service [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ProductOrServiceAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product and Service</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFiscalPeriodFocus_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Fiscal Period Focus</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFiscalPeriodFocus_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Fiscal Period Focus</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue from Contract with Customer [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityShellCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Shell Company</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityShellCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Shell Company</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Accrued Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CommitmentsAndContingenciesTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Commitments and contingencies table.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CommitmentsAndContingenciesTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commitments And Contingencies [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CommitmentsAndContingenciesTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Commitments And Contingencies [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash and Cash Equivalent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash and cash equivalents</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Cash and Cash Equivalents, at Carrying Value, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Shares, Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Balance, shares - Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Balance, Shares - Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Asset Class [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Asset Class</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statement [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProductWarrantyAccrualWarrantyPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Product warranty accrual warranty period.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProductWarrantyAccrualWarrantyPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product Warranty Accrual Warranty Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProductWarrantyAccrualWarrantyPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Warranty period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AcquiredFinite-LivedIntangibleAssetsWeightedAverageUsefulLifeAtAquisitionDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Acquired Finite-Lived Intangible Assets, Weighted Average Useful Life At Aquisition Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AcquiredFinite-LivedIntangibleAssetsWeightedAverageUsefulLifeAtAquisitionDate_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Acquired Finite-Lived Intangible Assets, Weighted Average Useful Life At Aquisition Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statement [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TreasuryStockValueAcquiredCostMethod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Treasury Stock, Value, Acquired, Cost Method</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFilerCategory_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Filer Category</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFilerCategory_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Filer Category</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Activity for RSUs [Roll Forward]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reclassification from AOCI, Current Period, Net of Tax, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reclassifications</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities and Equity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total liabilities and stockholders&#8217; equity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments to Acquire Marketable Securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Purchases of marketable securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Lived Tangible Asset [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Long-Lived Tangible Asset</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Currency translation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Change in currency translation adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring and Related Costs [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue from External Customers by Products and Services [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Revenue from External Customers by Products and Services</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash and Cash Equivalents, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Standard and Extended Product Warranty Accrual, Decrease for Payments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Usage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ShareRepurchaseProgramTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Repurchase Program [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Goodwill, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Goodwill, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Goodwill, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncashIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Noncash Income (Expense)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncashIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Other, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncashIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Noncash Income (Expense), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Effective tax rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Effective Income Tax Rate Reconciliation, Percent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_InventoryDetailsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Inventory Details [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_InventoryDetailsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory Details [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_SegmentGeographicalDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Geographical [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_SegmentGeographicalDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Geographical</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetBackedSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Asset-Backed Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetBackedSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Asset-backed securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesAfterTenYearsAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amortized Cost, Due after ten years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_DirectorsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Directors(Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_DirectorsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Directors(Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Inventory, Current [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Inventories</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Additional Paid in Capital, Common Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Additional paid-in capital</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringCostInCostOfGoodsSold_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restructuring cost in cost of goods sold</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringCostInCostOfGoodsSold_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring cost in cost of goods sold</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringCostInCostOfGoodsSold_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restructuring and other cost recored to cost of goods sold</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProvisionForInventoryValuation_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Provision for inventory valuation.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProvisionForInventoryValuation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Provision For Inventory Valuation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProvisionForInventoryValuation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Provision for inventory valuation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Property Plant And Equipment [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Disaggregation of Revenue [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Disaggregation Of Revenue [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Basic and Diluted Earnings Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Increase (Decrease) in Other Operating Assets and Liabilities, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Changes in operating assets and liabilities, net of effects of business acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Increase (Decrease) in Other Operating Assets and Liabilities, Net, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Available for sale securities debt maturities after five years fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Available For Sale Securities Debt Maturities After Five Years Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value, Due after five years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerAssetGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Asset, before Allowance for Credit Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TrademarksAndTradeNamesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Trademarks and Trade Names [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TrademarksAndTradeNamesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Trademarks and trade names [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investments Classified by Contractual Maturity Date [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Amortized Cost and Estimated Fair Value of Marketable Securities Classified by Maturity Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share, Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Earnings Per Share, Basic, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Disaggregation of Revenue [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Disaggregation of Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StandardProductWarrantyAccrual_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Standard Product Warranty Accrual</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StandardProductWarrantyAccrual_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Balance, end of the period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StandardProductWarrantyAccrual_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Balance, beginning of the period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StandardProductWarrantyAccrual_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Standard Product Warranty Accrual, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestIncomeExpenseNonoperatingNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Income (Expense), Nonoperating</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestIncomeExpenseNonoperatingNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest income, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestIncomeExpenseNonoperatingNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Interest Income (Expense), Nonoperating, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationStepUpOfInventoryFairValueRecognizedSellThroughPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationStepUpOfInventoryFairValueRecognizedSellThroughPeriod</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationStepUpOfInventoryFairValueRecognizedSellThroughPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationStepUpOfInventoryFairValueRecognizedSellThroughPeriod</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjustment to Reconcile Net Income to Cash Provided by (Used in) Operating Activity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Adjustments to reconcile net income to net cash and cash equivalents provided by operating activities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory, Finished Goods, Net of Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finished goods</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesFairValueAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Fair Value, Fiscal Year Maturity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesCurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Liabilities, Current [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductConcentrationRiskMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product Concentration Risk [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductConcentrationRiskMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity, Attributable to Parent [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stockholders&#8217; equity:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntitySmallBusiness_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Small Business</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntitySmallBusiness_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Small Business</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Retained Earnings (Accumulated Deficit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Retained earnings</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Retained Earnings (Accumulated Deficit), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Contract with customer liability revenue recognized including additions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract With Customer Liability Revenue Recognized Including Additions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Recognition of deferred revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Share-Based Compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Organization, Consolidation and Presentation of Financial Statements [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SoutheastAsiaMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Southeast Asia.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SoutheastAsiaMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Southeast Asia [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SoutheastAsiaMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Southeast Asia [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Number of Shares Outstanding, Diluted, Adjustment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Employee stock options, employee stock purchase grants and restricted stock units - dilutive shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Weighted Average Number of Shares Outstanding, Diluted, Adjustment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Balance, end of the period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Balance, beginning of the period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Contract with Customer, Liability, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AmendmentFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amendment Flag</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AmendmentFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Amendment Flag</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ProductsAndServicesDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product and Service [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ProductsAndServicesDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product and Service</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk [Line Items]</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, Postal Zip Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, Postal Zip Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Operating Activity, Including Discontinued Operation</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product Warranty Accrual, Current</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Recognized Asset Acquired, Inventory, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Accumulated depreciation and amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDerivativeInstrumentsInStatementOfFinancialPositionFairValueTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDerivativeInstrumentsInStatementOfFinancialPositionFairValueTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Forward Contracts and Related Fair Values</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Available-for-sale Securities [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AquisitionTransactionRelatedCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AquisitionTransactionRelatedCosts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AquisitionTransactionRelatedCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">AquisitionRelatedCosts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Portion at Fair Value Measurement [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Disclosure Item Amounts [Default]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_lbl" xlink:role="http://fasb.org/us-gaap/role/label/axisDefault">Portion at Fair Value Measurement [Member] [Default]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ShareRepurchaseProgramAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Repurchase Program [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, Address Line One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, Address Line One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxesAndTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Income Taxes and Tax Credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxesAndTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxesAndTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Deferred Income Taxes and Tax Credits, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Hierarchy and NAV [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Hierarchy and NAV</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Supplemental Cash Flow Information [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Supplemental disclosure of cash flow information:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity Securities without Readily Determinable Fair Value, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_MergerAndAcquisitionsRelatedExpenses2_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Merger and acquisitions related expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_MergerAndAcquisitionsRelatedExpenses2_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Merger and acquisitions related (4)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Investment Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investment Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Right-of-Use Asset</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating lease right-of-use assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPosition_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Unrealized Loss Position</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPosition_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Debt Securities, Available-for-Sale, Unrealized Loss Position, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsOther_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Recognized Asset Acquired, Other Asset, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentType_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentType_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Taxes Paid, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income taxes paid (net of refunds)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income Taxes Paid, Net, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GrossProfit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Gross Profit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GrossProfit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Gross profit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Central Index Key</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Central Index Key</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Receivable, Allowance for Credit Loss, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Allowances for doubtful accounts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Marketable Securities by Category</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investments, Debt and Equity Securities [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Period Increase (Decrease), Including Exchange Rate Effect and Discontinued Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net increase (decrease) in cash and cash equivalents</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ForeignCurrencyContractsAssetFairValueDisclosureCAshCashEquivilents_lbl" xlink:role="http://www.xbrl.org/2003/role/label">ForeignCurrencyContractsAssetFairValueDisclosureCAsh&amp;CashEquivilents</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ForeignCurrencyContractsAssetFairValueDisclosureCAshCashEquivilents_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">ForeignCurrencyContractsAssetFairValueDisclosureCAsh&amp;CashEquivilents</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination Goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Business Combination Goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringCostInOperatingExpenses_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restructuring costs in operating expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringCostInOperatingExpenses_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring cost in operating expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringCostInOperatingExpenses_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restructuring and other cost recorded in operating expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Repurchased and Retired During Period, Shares</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SeniorSecuredBridgeLoanValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SeniorSecuredBridgeLoanValue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SeniorSecuredBridgeLoanValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">SeniorSecuredBridgeLoanValue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OtherAccruedTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other accrued taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OtherAccruedTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other accrued taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Par or Stated Value Per Share</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total other comprehensive loss, net of tax</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortized Cost</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Amortized Cost</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_PartsRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Parts Revenue [Member]</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Fair Value, Total marketable securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomerCMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer C [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomerCMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Customer C [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Adjustments to additional paid in capital income tax deficiency from share based compensations.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjustments To Additional Paid In Capital Income Tax Deficiency From Share Based Compensations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Share-based compensation plan withholdings</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationOperatingLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationOperatingLoss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationOperatingLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationOperatingLoss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherSundryLiabilitiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Sundry Liabilities, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherSundryLiabilitiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringExpenses1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringExpenses1_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restructuring and other (4)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Foreign Currency Adjustment Attributable to Parent [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated Foreign Currency Translation Adjustments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SegmentReportingByBusinessUnitAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Segment reporting by business unit.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SegmentReportingByBusinessUnitAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting By Business Unit [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeNotionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative, Notional Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeNotionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Notional amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccruedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accrued Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccruedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accrued liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccruedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total accrued liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfSalesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cost of Sales [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expensed and Capitalized, Amount [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CurrentFiscalYearEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Fiscal Year End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CurrentFiscalYearEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Current Fiscal Year End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Product Warranty Liability [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Changes in Warranty Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncurrentLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Noncurrent Liabilities [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncurrentLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Other Non-Current Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwillLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwillLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_DisposedOfFullyAmortiziedIdentifiableIntangibleAssetsGrossCarryingValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">DisposedOfFullyAmortiziedIdentifiableIntangibleAssetsGrossCarryingValue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_DisposedOfFullyAmortiziedIdentifiableIntangibleAssetsGrossCarryingValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">DisposedOfFullyAmortiziedIdentifiableIntangibleAssetsGrossCarryingValue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentQuarterlyReport_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Quarterly Report</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentQuarterlyReport_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Quarterly Report</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CustomerRelationshipsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer Relationships [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CustomerRelationshipsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer and distributor relationships [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TimingOfTransferOfGoodOrServiceAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Timing of Transfer of Good or Service [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TimingOfTransferOfGoodOrServiceAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Timing of Transfer of Good or Service</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, State or Province</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, State or Province</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Number of Shares, Ending balance (in shares)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Number of Shares, Beginning balance (in shares)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Number of nonvested shares outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Line of Credit Facility, Remaining Borrowing Capacity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Available line of credit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Comprehensive Income (Loss), Net of Tax, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total comprehensive income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Gross Unrealized Holding Gains</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Accumulated Gross Unrealized Gain, before Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StatementGeographicalAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Geographical [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StatementGeographicalAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Geographical</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Receivable [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharesPaidForTaxWithholdingForShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Shares Withheld for Tax Withholding Obligation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharesPaidForTaxWithholdingForShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Share-based compensation plan withholdings, Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Revenue by Major Customer by Reporting Segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Comprehensive Income (Loss), Net of Tax [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other comprehensive loss, net of tax:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Income Tax Assets, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds from Sale and Maturity of Marketable Securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Proceeds from maturities and sales of marketable securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Assets, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total other assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Marketable securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Liability, Cumulative Catch-up Adjustment to Revenue, Change in Measure of Progress</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferral of revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsPrepaidExpenseAndOtherAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Recognized Asset Acquired, Prepaid Expense and Other Asset, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_UnrecognizedTaxBenefitsIncludingInterestNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Unrecognized tax benefits including interest noncurrent.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_UnrecognizedTaxBenefitsIncludingInterestNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrecognized Tax Benefits Including Interest Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_UnrecognizedTaxBenefitsIncludingInterestNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Unrecognized tax benefits (including interest)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_InvestmentsFairValueDisclosureTotalAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">InvestmentsFairValueDisclosureTotalAssets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_InvestmentsFairValueDisclosureTotalAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">InvestmentsFairValueDisclosureTotalAssets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Cost by Plan [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AOCI Attributable to Parent [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated Other Comprehensive Income (Loss) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ComputerEquipmentAndSoftwareMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Computer Equipment And Software Member</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ComputerEquipmentAndSoftwareMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Computer Equipment And Software [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ComputerEquipmentAndSoftwareMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Computer equipment and software [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DepreciationAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Depreciation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Major Class Name [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite-Lived Intangible Assets, Major Class Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, after Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Thereafter</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Business Combination, Recognized Asset Acquired, Identifiable Intangible Asset, Excluding Goodwill, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MinimumMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Minimum [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MinimumMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Minimum [Member]</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferredTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Business Combination, Consideration Transferred [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_PerformanceRestrictedStockUnitsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Performance restricted stock units.</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsNonrecurringMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Nonrecurring [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Net, Amortization Expense, Fiscal Year Maturity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ShareRepurchaseProgramLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Repurchase Program [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Fair Value, Assets and Liabilities Measured on Recurring Basis [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Assets and Liabilities Carried at Fair Value Measured on a Recurring Basis</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_VariousExecutivesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">VariousExecutives(Member)</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Current liabilities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_NumberOfMajorCustomers_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of major customers.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_NumberOfMajorCustomers_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Major Customers</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_NumberOfMajorCustomers_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of major customer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringAndRelatedActivitiesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restructuring</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ServiceRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Service revenue.</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ServiceRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Service Revenue [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ServiceRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Service Revenue [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherCurrentLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Current Liabilities [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherCurrentLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Other Current Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Unrealized Loss Position, Fair Value [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Receivable, after Allowance for Credit Loss, Current</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounts receivable, less allowance of $2,613 and $2,659</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commitments and Contingencies</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Weighted Average Grant Date Fair Value, Ending balance (in dollars per share)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Weighted Average Grant Date Fair Value, Beginning balance (in dollars per share)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted average grant-date fair value per share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Shares Issued, Shares, Share-Based Payment Arrangement, after Forfeiture</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory, Work in Process, Net of Reserves</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfGoodwillTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Goodwill [Table Text Block]</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk Benchmark</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_MichaelPPlisinskiMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Michael P. Plisinski (Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_MichaelPPlisinskiMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Michael P. Plisinski (Member)</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Number of Shares Outstanding, Basic</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAcquiredDuringPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill, Acquired During Period</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationDeferredTaxLiablityEstablished_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationDeferredTaxLiablityEstablished</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationDeferredTaxLiablityEstablished_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationDeferredTaxLiablityEstablished</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferredTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Business Combination, Consideration Transferred [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationStepUpOfInventoryFairValueToBeRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationStepUpOfInventoryFairValueToBeRecognized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationStepUpOfInventoryFairValueToBeRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationStepUpOfInventoryFairValueToBeRecognized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CommitmentsAndContingenciesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Commitments and contingencies line items.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CommitmentsAndContingenciesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commitments And Contingencies [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CommitmentsAndContingenciesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Commitments And Contingencies [Line Items]</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">APIC, Share-Based Payment Arrangement, Increase for Cost Recognition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Share-based compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">APIC, Share-Based Payment Arrangement, Increase for Cost Recognition, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total stockholders&#8217; equity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Balance - Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Balance - Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyContractsLiabilityFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Currency Contracts, Liability, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyContractsLiabilityFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign currency forward contracts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Stockholders' Equity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Remainder of Fiscal Year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2025 (remainder)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UseOfEstimates_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Use of Estimates, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UseOfEstimates_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Use of Estimates</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Recognized Asset Acquired, Property, Plant, and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Business Combination, Recognized Asset Acquired, Property, Plant, and Equipment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseholdImprovementsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Leasehold Improvements [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseholdImprovementsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Leasehold improvements [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Gain (Loss), Foreign Currency Transaction, before Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign currency exchange losses, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Foreign Currency Transaction Gain (Loss), before Tax, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net current period other comprehensive income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">OCI, before Reclassifications, Net of Tax, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueDisclosuresTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Disclosures [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueDisclosuresTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Measurements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationConsiderationTransferredAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Consideration Transferred [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferredLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Consideration Transferred [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferredLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Business Combination, Consideration Transferred [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AproximateValueOfCommonStockOutstandingToBeAquiredUnderDefinitiveSharePurchaseAgreement_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AproximateValueOfCommonStockOutstandingToBeAquiredUnderDefinitiveSharePurchaseAgreement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AproximateValueOfCommonStockOutstandingToBeAquiredUnderDefinitiveSharePurchaseAgreement_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">AproximateValueOfCommonStockOutstandingToBeAquiredUnderDefinitiveSharePurchaseAgreement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_US_lbl" xlink:role="http://www.xbrl.org/2003/role/label">UNITED STATES</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_US_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">United States [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferredEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationConsiderationTransferredEquity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferredEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationConsiderationTransferredEquity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Accrued Liabilities [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Accrued Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments and Hedging Activities Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring Expense (Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestructuringExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restructuring Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_PaymentsToAquireNonMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">PaymentsToAquireNonMarketableSecurities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_PaymentsToAquireNonMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">PaymentsToAquireNonMarketableSecurities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Assets And Liabilities Measured On Recurring And Nonrecurring Basis [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesAfterTenYearsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Due after ten years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SystemsAndSoftwareRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Systems and software revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SystemsAndSoftwareRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Systems And Software Revenue [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SystemsAndSoftwareRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Systems and Software [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CertificatesOfDepositMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Certificates of Deposit [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CertificatesOfDepositMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Certificates of deposits [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_GeneralAndAdministrativeExcluding123_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjusted general and administrative</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_GeneralAndAdministrativeExcluding123_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Adjusted general and administrative (3)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BussinessCombinationAccruedExpensesAndOtherCurrentLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationAccruedExpensesAndOtherCurrentLiabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BussinessCombinationAccruedExpensesAndOtherCurrentLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationAccruedExpensesAndOtherCurrentLiabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAcquiredFiniteLivedIntangibleAssetsByMajorClassTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Acquired Finite-Lived Intangible Assets by Major Class [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, City or Town</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, City or Town</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Repurchased During Period, Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NumberOfReportableSegments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of Reportable Segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NumberOfReportableSegments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of reportable segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_SecurityExchangeName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Security Exchange Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_SecurityExchangeName_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Security Exchange Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_EuropeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Europe [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_EuropeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Europe [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Property, plant and equipment, gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Property, Plant and Equipment, Gross, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Property, Plant and Equipment, Gross, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Property, Plant and Equipment, Gross, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SingleReportableSegmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Single Reportable Segment (member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SingleReportableSegmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Single Reportable Segment (member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Assets Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Purchased Intangible Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income before income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income before provision for income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk Type [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueNetAssetLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Net Asset (Liability)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueNetAssetLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair value of assets (liability)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueNetAssetLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Fair Value, Net Asset (Liability), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_VariousExecutivesandEmployeesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">VariousExecutivesandEmployees(Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_VariousExecutivesandEmployeesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">VariousExecutivesandEmployees(Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_PercentOfCommonStockOustandingToBeAquiredUnderDefinitiveSharePurchaseAgreement_lbl" xlink:role="http://www.xbrl.org/2003/role/label">PercentOfCommonStockOustandingToBeAquiredUnderDefinitiveSharePurchaseAgreement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_PercentOfCommonStockOustandingToBeAquiredUnderDefinitiveSharePurchaseAgreement_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">PercentOfCommonStockOustandingToBeAquiredUnderDefinitiveSharePurchaseAgreement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Inventories, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total inventories, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Continuing Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Cash and cash equivalents at end of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Cash and cash equivalents at beginning of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expensed and Capitalized, Amount [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByMeasurementBasisAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Measurement Basis [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByMeasurementBasisAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Measurement Basis</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_RangeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statistical Measurement [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_RangeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statistical Measurement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total current assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Period End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Period End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_TitleOfIndividualAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Title and Position [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Hierarchy and NAV [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Hierarchy and NAV</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestrictedStockUnitsServiceBasedRSUsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restricted Stock Units, Service-Based RSUs.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestrictedStockUnitsServiceBasedRSUsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restricted Stock Units Service Based R S Us [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestrictedStockUnitsServiceBasedRSUsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restricted Stock Units, Service-Based RSUs [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsMiscellaneousNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Assets, Miscellaneous, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsMiscellaneousNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementOfFinancialPositionAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Financial Position [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restricted Stock Units (RSUs) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restricted Stock Units (RSUs) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Recognized Asset Acquired, Asset [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesNoncurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Liabilities, Noncurrent [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OtherExpenseIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other (expense) income.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OtherExpenseIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Expense Income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OtherExpenseIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommercialPaperNotIncludedWithCashAndCashEquivalentsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commercial Paper, Not Included with Cash and Cash Equivalents [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommercialPaperNotIncludedWithCashAndCashEquivalentsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Commercial paper [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Liabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Liabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomerDMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer D [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomerDMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Customer D [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Financial Instruments [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_KR_lbl" xlink:role="http://www.xbrl.org/2003/role/label">KOREA, REPUBLIC OF</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_KR_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">South Korea [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ForeignCurrencyContractsAssetFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Foreign Currency Contracts,Asset, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ForeignCurrencyContractsAssetFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Currency Contracts,Asset, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite-lived intangibles assets, Gross Carrying Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Finite-Lived Intangible Assets, Gross, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">In Unrealized Loss Position For Less Than 12 Months, Gross Unrealized Losses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerNumberOfPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, 12 Months or Longer, Number of Positions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Number of Shares Outstanding, Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Diluted earnings per share - weighted average shares outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFileNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Securities Act File Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFileNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity File Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">OCI, Debt Securities, Available-for-Sale, Unrealized Holding Gain (Loss), before Adjustment, after Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Unrealized gain (loss) on investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CoverAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cover [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SignificantCustomerMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Significant customer.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SignificantCustomerMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Significant Customer [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Prepaid Expense and Other Assets, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Prepaid expenses and other current assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Taxes Payable, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income tax payable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Taxes Payable, Current, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTypeCategorizationMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investments [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTypeCategorizationMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SalesRevenueNetMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue Benchmark [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SalesRevenueNetMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Sales [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationStepUpOfInventoryFairValueRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationStepUpOfInventoryFairValueRecognized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationStepUpOfInventoryFairValueRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationStepUpOfInventoryFairValueRecognized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TimingOfTransferOfGoodOrServiceDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Timing of Transfer of Good or Service [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TimingOfTransferOfGoodOrServiceDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Timing of Transfer of Good or Service</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment Reporting and Geographic Information</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GeneralAndAdministrativeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">General and Administrative Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GeneralAndAdministrativeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">General and administrative</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GeneralAndAdministrativeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">General and Administrative Expense, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferred_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationConsiderationTransferred</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferred_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationConsiderationTransferred</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Recognized Liability Assumed, Accounts Payable, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Finite-lived intangibles assets, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Finite-Lived Intangible Assets, Net, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Finite-Lived Intangible Assets, Net, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsGrossExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Assets, Gross (Excluding Goodwill)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsGrossExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Identifiable intangibles assets, Gross Carrying Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsGrossExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Intangible Assets, Gross (Excluding Goodwill), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MarketableSecuritiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Marketable Securities [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_Non-MarketableEquitySecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Non-Marketable Equity Securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_Non-MarketableEquitySecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Non-Marketable Equity Securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">New Accounting Pronouncements, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Adoption of Accounting Standards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Liability, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_GeneralAndAdministrativeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">General and administrative [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_GeneralAndAdministrativeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">General and administrative</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SalesAndMarketingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Sales and Marketing (Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SalesAndMarketingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Sales and Marketing (Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomeNoteTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Comprehensive Income (Loss) Note [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomeNoteTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated Other Comprehensive Income (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationOperatingIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationOperatingIncome</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationOperatingIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationOperatingIncome</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Depreciation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Depreciation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Depreciation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Depreciation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Depreciation_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Depreciation, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CarryingReportedAmountFairValueDisclosureMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reported Value Measurement [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CarryingReportedAmountFairValueDisclosureMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Carrying Value [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_YoonAhOhMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">YoonAhOh [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_YoonAhOhMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">YoonAhOh [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Shares, Outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Common Stock, Shares, Outstanding, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Common Stock, Shares, Outstanding, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Liability, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Current operating lease obligations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SeniorSecuredBridgeLoanTerm_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SeniorSecuredBridgeLoanTerm</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SeniorSecuredBridgeLoanTerm_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">SeniorSecuredBridgeLoanTerm</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentTransitionReport_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Transition Report</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentTransitionReport_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Transition Report</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingExpenses_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingExpenses_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total operating expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccruedLiabilitiesCurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accrued Liabilities, Current [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Research and Development Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Research and development</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Research and Development Expense, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RevenueRecognizedPriorPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Revenue Recognized - Prior Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RevenueRecognizedPriorPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue Recognized - Prior Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cost of Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cost of revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Cost of Revenue, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringChargesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring Charges [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IntangibleAssetsAccumulatedAmortizationExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Intangible assets accumulated amortization excluding goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IntangibleAssetsAccumulatedAmortizationExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Assets Accumulated Amortization Excluding Goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IntangibleAssetsAccumulatedAmortizationExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Identifiable intangibles assets, Accumulated Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments for Repurchase of Common Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Purchases and retirement of common stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Details of Income Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementOfCashFlowsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Cash Flows [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted Average Grant Date Fair Value for RSUs [Roll Forward]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments to Acquire Businesses, Net of Cash Acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Payments to Acquire Businesses, Net of Cash Acquired, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite Lived Intangible Assets [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Earnings Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShareBasedCompensationRestrictedStockUnitsAwardActivityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Restricted Stock Unit, Activity [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShareBasedCompensationRestrictedStockUnitsAwardActivityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Restricted Stock Unit Activity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetIncomeLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net Income (Loss) Attributable to Parent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsNetExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Assets, Net (Excluding Goodwill)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsNetExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Identifiable intangible assets, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsNetExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Identifiable intangibles assets, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CostOfRevenueExcluding12_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjusted cost of revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CostOfRevenueExcluding12_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Adjusted cost of revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ResearchAndDevelopmentExcluding12_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjusted reasearch and development</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ResearchAndDevelopmentExcluding12_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Adjusted research and development (2)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Standard and Extended Product Warranty Accrual, Increase for Warranties Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accruals</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">ASSETS</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFiscalYearFocus_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Fiscal Year Focus</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFiscalYearFocus_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Fiscal Year Focus</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LandAndBuildingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Land and Building [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LandAndBuildingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Land and building [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Components of Accumulated Other Comprehensive Loss, Net of Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk Benchmark [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk Benchmark</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Investing Activity, Including Discontinued Operation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash flows from investing activities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Payable, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounts payable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Accounts Payable, Current, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Research and Development Expense [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investments in Debt and Marketable Equity Securities (and Certain Trading Assets) Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Marketable Securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Contract Asset, Contract Liability, and Receivable [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Changes in Deferred Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Shares Issued, Value, Share-Based Payment Arrangement, after Forfeiture</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Issuance of shares through share-based compensation plans</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Shares Issued, Value, Share-Based Payment Arrangement, after Forfeiture, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2026</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestrictedStockUnitsActivityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restricted Stock Units Activity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RestrictedStockUnitsActivityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restricted Stock Units Activity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfOtherAssetsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Other Assets [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfOtherAssetsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Other Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueDisclosuresAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Disclosures [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commitments and Contingencies Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income (Loss), Net of Tax [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IdoDolevMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">IdoDolev [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IdoDolevMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">IdoDolev [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Recognized Asset Acquired to Liability Assumed, Excess (Less)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Business Combination, Recognized Asset Acquired to Liability Assumed, Excess (Less), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentForContingentConsiderationLiabilityFinancingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payment for Contingent Consideration Liability, Financing Activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total unrecognized compensation cost related to restricted stock units granted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Share-Based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Amount, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk, Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration risk, percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Customer concentration risk percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Revenues_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenues</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Revenues_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Revenues, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Investing Activity, Including Discontinued Operation</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_Security12bTitle_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Title of 12(b) Security</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_Security12bTitle_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Title of 12(b) Security</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Segment Reporting Information, by Segment [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Segment Reporting Information By Segment [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityInterestRateAtPeriodEnd_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Line of Credit Facility, Interest Rate at Period End</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityInterestRateAtPeriodEnd_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Available interest rate on line of credit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments and Hedging Activities Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative Instruments and Hedging Activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_LuminaInstrumentsIncMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lumina Instruments Inc (Member)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_LuminaInstrumentsIncMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Lumina Instruments, Inc.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchaseProgramRemainingAuthorizedRepurchaseAmount1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Repurchase Program, Remaining Authorized, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchaseProgramRemainingAuthorizedRepurchaseAmount1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amount available for future repurchase</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">OCI, Debt Securities, Available-for-Sale, Gain (Loss), before Adjustment, after Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in net unrealized gains (losses) on available-for-sale marketable securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">OCI, Debt Securities, Available-for-Sale, Gain (Loss), before Adjustment, after Tax, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesAfterOneThroughFiveYearsAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Amortized Cost, Maturity, Allocated and Single Maturity Date, after Year One Through Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesAfterOneThroughFiveYearsAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortized Cost, Due after one through five years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MoneyMarketFundsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Money Market Funds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomersAbove10Member_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Customers Above 10% [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomersAbove10Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customers Above 10% [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Liabilities, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other non-current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total other non-current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesAfterOneThroughFiveYearsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Fair Value, Maturity, Allocated and Single Maturity Date, after Year One Through Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesAfterOneThroughFiveYearsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value, Due after one through five years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Property, Plant and Equipment, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds, Issuance of Shares, Share-Based Payment Arrangement, Including Option Exercised</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Issuance of shares through share-based compensation plans</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Proceeds, Issuance of Shares, Share-Based Payment Arrangement, Including Option Exercised, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Recurring and Nonrecurring [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Assets And Liabilities Measured On Recurring And Nonrecurring Basis [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdditionalPaidInCapitalMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Additional Paid-in Capital [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdditionalPaidInCapitalMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Additional Paid-in Capital [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_DueFromUnrelatedThirdParties_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Due from unrelated third Parties.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_DueFromUnrelatedThirdParties_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Due From Unrelated Third Parties</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_DueFromUnrelatedThirdParties_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Due from unrelated third parties</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Measurement Frequency [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Measurement Frequency</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StockRepurchaseProgramAuthorizedAmount1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Repurchase Program, Authorized, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StockRepurchaseProgramAuthorizedAmount1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock repurchase, authorized amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeStatementLocationAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Income Location, Balance [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_TradingSymbol_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Trading Symbol</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_TradingSymbol_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Trading Symbol</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Asset, Finite-Lived [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Finite Lived Intangible Assets [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesWithinOneYearAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Amortized Cost, Maturity, Allocated and Single Maturity Date, Year One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesWithinOneYearAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortized Cost, Due within one year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Finite-Lived Intangible Assets [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Purchased Intangible Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Employee-related Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Payroll and related expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Employee-related Liabilities, Current, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_TW_lbl" xlink:role="http://www.xbrl.org/2003/role/label">TAIWAN</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_TW_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Taiwan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Financing Activity, Including Discontinued Operation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash flows from financing activities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Recurring [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value, Measurements, Recurring [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SellingAndMarketingExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Selling and Marketing Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SellingAndMarketingExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Sales and marketing</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SellingAndMarketingExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Selling and Marketing Expense, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BalanceSheetDetailsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Balance sheet details.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BalanceSheetDetailsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Balance Sheet Details [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BalanceSheetDetailsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Balance Sheet Details</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementEquityComponentsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity Components [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementEquityComponentsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Retained Earnings (Accumulated Deficit) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Available for sale securities debt maturities after five years amortized cost.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Available For Sale Securities Debt Maturities After Five Years Amortized Cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortized Cost, Due after five years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_Restructuringcost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">RestructuringCost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_Restructuringcost_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">RestructuringCost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquityComponentDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity Component [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquityComponentDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Equity Component</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByAssetClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Asset Class [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByAssetClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Asset Class</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill and Intangible Assets Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IdentifiableIntangibleAssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Identifiable Intangible Assets [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IdentifiableIntangibleAssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Identifiable Intangible Assets [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveThroughTenYearsAmortizedCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amortized Cost, Due after five through ten years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MachineryAndEquipmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Machinery and Equipment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MachineryAndEquipmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Machinery and equipment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MajorCustomersAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MajorCustomersAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_USTreasuryAndGovernmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Government notes and bonds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_USTreasuryAndGovernmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">US Treasury and Government [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Comprehensive Income [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Assets [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MaximumMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Maximum [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MaximumMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Maximum [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_RangeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statistical Measurement [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_RangeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statistical Measurement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Liability, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Long-term deferred revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomerBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CustomerBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Customer B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Accumulated Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite-lived intangibles assets, Accumulated Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Value, Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillRollForward_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill [Roll Forward]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Finite-Lived Intangible Assets, Future Amortization Expense [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Estimated Future Amortization Expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets by Major Class [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite-Lived Intangible Assets by Major Class</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_TaxEffectMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">tax effects on net income of amounts recorded in other comprehensive loss for net unrealized losses on available-for-sale marketable securities.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_TaxEffectMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Tax Effect Marketable Securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_TaxEffectMarketableSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Tax Effect Marketable Securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payment, Tax Withholding, Share-Based Payment Arrangement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Tax payments related to shares withheld for share-based compensation plans</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue from Contract with Customer [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityRegistrantName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Registrant Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityRegistrantName_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Registrant Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Gross Unrealized Holding Losses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Accumulated Gross Unrealized Loss, before Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CustomerConcentrationRiskMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer Concentration Risk [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CustomerConcentrationRiskMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer Concentration Risk</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year Two</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2027</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TreasuryStockSharesAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Treasury Stock, Shares, Acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Nonoperating Income (Expense)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other expense, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total other expense, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated Other Comprehensive Income Loss [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income (Loss) [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Events [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfOtherNonoperatingIncomeExpenseTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Other Nonoperating Income (Expense) [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfOtherNonoperatingIncomeExpenseTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Other Expense, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year Three</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2028</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SalesAndMarketingExcluding12_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjusted sales and marketing</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_SalesAndMarketingExcluding12_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">adjusted sales and marketing (2)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Provision for income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income Tax Expense (Benefit), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Measurement Frequency [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Measurement Frequency</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Repurchased During Period, Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Share Based Compensation Arrangement By Share Based Payment Award [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Common Stock, Shares Outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Entity Common Stock, Shares Outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_USStatesAndPoliticalSubdivisionsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Government notes and bonds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_USStatesAndPoliticalSubdivisionsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">US States and Political Subdivisions Debt Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherIncomeAndOtherExpenseDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Income and Other Expense Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherIncomeAndOtherExpenseDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other Expense, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Accumulated other comprehensive loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income (Loss), Net of Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated other comprehensive (loss) income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Accumulated Other Comprehensive Income (Loss), Net of Tax, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IntellectualPropertyIndemnificationObligations_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Intellectual property indemnification obligation.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IntellectualPropertyIndemnificationObligations_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intellectual Property Indemnification Obligations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_IntellectualPropertyIndemnificationObligations_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Liabilities recorded for obligations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventsDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Event, Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments to Acquire Property, Plant, and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Purchases of property, plant and equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Payments to Acquire Property, Plant, and Equipment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of Shares, Granted (in shares)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Assets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Assets_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Property Plant And Equipment [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeStatementAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Statement [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share, Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Earnings Per Share, Diluted, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Segment Reporting Information, by Segment [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2030</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Title and Position [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CityAreaCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">City Area Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CityAreaCode_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">City Area Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OtherIncomeExpenseAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other Income (Expense) [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OtherIncomeExpenseAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Income Expense [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingInformationLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting Information [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingInformationLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment Reporting Information [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_NetIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_NetIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Net Income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_NetIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net Income, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredRevenueDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Revenue Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Maximum borrowing capacity percentage of eligible securities held at line of credit accessed.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Maximum Borrowing Capacity Percentage Of Eligible Securities Held At Line Of Credit Accessed</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Percentage of maximum borrowing capacity of value of eligible securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ShareRepurchaseTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Share Repurchase [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ShareRepurchaseTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Repurchase [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ShareRepurchaseTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Share Repurchase Authorization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_FairValueDisclosureTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">FairValueDisclosureTable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_FairValueDisclosureTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">FairValueDisclosure [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Property, plant and equipment, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total property, plant and equipment, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CorporateBondSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Corporate Bonds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CorporateBondSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Corporate Bond Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Income (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Operating income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Retained Earnings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Retained Earnings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Noncash Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Share-based compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Share-Based Payment Arrangement, Noncash Expense, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">In Unrealized Loss Position For Less Than 12 Months, Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Liability, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Non-current operating lease obligations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel1Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Inputs, Level 1 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel1Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Financing Activity, Including Discontinued Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net cash and cash equivalents used in financing activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RevenueRecognizedCurrentYear_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Revenue Recognized - Current Year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_RevenueRecognizedCurrentYear_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue Recognized - Current Year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DevelopedTechnologyRightsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Developed Technology Rights [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DevelopedTechnologyRightsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Developed technology [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Income Tax Liabilities, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveThroughTenYearsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Due after five through ten years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investments, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Investments, Fair Value Disclosure, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfGoodwillTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsReceivables_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Recognized Asset Acquired, Receivable, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CorporateDebtSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Corporate Debt Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CorporateDebtSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Corporate bonds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CorporateDebtSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Corporate bonds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CashAndCashEquivalentsFairValueDisclosureTotalAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">CashAndCashEquivalentsFairValueDisclosureTotalAssets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_CashAndCashEquivalentsFairValueDisclosureTotalAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">CashAndCashEquivalentsFairValueDisclosureTotalAssets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityInteractiveDataCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Interactive Data Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityInteractiveDataCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Interactive Data Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeStatementLocationDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Income Location, Balance [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueDisclosureItemAmountsDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Measurement [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueDisclosureItemAmountsDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Measurement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Operating Activity, Including Discontinued Operation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash flows from operating activities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FurnitureAndFixturesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Furniture and Fixtures [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FurnitureAndFixturesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Furniture and fixtures [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TransferredOverTimeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Transferred Over Time [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TransferredOverTimeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Transferred over Time [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accretion (Amortization) of Discounts and Premiums, Investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProceedsFromAccountsReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Proceeds from accounts receivable.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProceedsFromAccountsReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds From Accounts Receivable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_ProceedsFromAccountsReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Sold receivables amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferredCash_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationConsiderationTransferredCash</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationConsiderationTransferredCash_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationConsiderationTransferredCash</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">BusinessCombinationRevenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_BusinessCombinationRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">BusinessCombinationRevenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Tax Identification Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Tax Identification Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsNumberOfPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months, Number of Positions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Basis of Presentation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_LocalPhoneNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Local Phone Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_LocalPhoneNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Local Phone Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income (Loss) [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated Other Comprehensive Income Loss [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total other current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_CN_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">China [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_CN_lbl" xlink:role="http://www.xbrl.org/2003/role/label">CHINA</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Number of Shares Outstanding, Diluted [Abstract]</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AccumulatedOtherComprehensiveLossAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Accumulated Other Comprehensive Loss [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_AccumulatedOtherComprehensiveLossAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Loss [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Disaggregation of Revenue [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Disaggregation Of Revenue [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Sundry Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue from Contract with Customer, Excluding Assessed Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_LitigationExpenses3_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Litigation expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_LitigationExpenses3_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Litigation (4)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OrderBacklogMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Order backlog.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OrderBacklogMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Order Backlog [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="onto_OrderBacklogMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Backlog [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AOCI, Accumulated Gain (Loss), Debt Securities, Available-for-Sale, Parent [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated Net Unrealized Losses on Available-for-sale Marketable Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommercialPaperMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commercial Paper [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Period for Recognition</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TransferredAtPointInTimeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Transferred at Point in Time [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Emerging Growth Company</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Emerging Growth Company</link:label>
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          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Business Combination, Recognized Asset Acquired to Liability Assumed, Excess (Less), and Goodwill, Total</link:label>
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  <xsd:element id="onto_RestrictedStockUnitsActivityAbstract" name="RestrictedStockUnitsActivityAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BalanceSheetDetailsTextBlock" name="BalanceSheetDetailsTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="onto_GeographicReportingAbstract" name="GeographicReportingAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_AquisitionTransactionRelatedCosts" name="AquisitionTransactionRelatedCosts" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_BusinessCombinationConsiderationTransferredTable" name="BusinessCombinationConsiderationTransferredTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_NumberOfMajorCustomers" name="NumberOfMajorCustomers" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false"/>
  <xsd:element id="onto_OtherExpenseIncome" name="OtherExpenseIncome" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_AproximateValueOfCommonStockOutstandingToBeAquiredUnderDefinitiveSharePurchaseAgreement" name="AproximateValueOfCommonStockOutstandingToBeAquiredUnderDefinitiveSharePurchaseAgreement" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_ResearchAndDevelopmentExcluding12" name="ResearchAndDevelopmentExcluding12" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_ServiceRevenueMember" name="ServiceRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BusinessCombinationConsiderationTransferredLiabilitiesSettled" name="BusinessCombinationConsiderationTransferredLiabilitiesSettled" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_ProvisionForInventoryValuation" name="ProvisionForInventoryValuation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_NetIncome" name="NetIncome" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_EarningsPerSharesBasicAndDilutedAbstract" name="EarningsPerSharesBasicAndDilutedAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_AcquiredFinite-LivedIntangibleAssetsWeightedAverageUsefulLifeAtAquisitionDate" name="AcquiredFinite-LivedIntangibleAssetsWeightedAverageUsefulLifeAtAquisitionDate" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false"/>
  <xsd:element id="onto_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwillLineItems" name="BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwillLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_Restructuringcost" name="Restructuringcost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_AccumulatedOtherComprehensiveLossAbstract" name="AccumulatedOtherComprehensiveLossAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations" name="AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_CommitmentsAndContingenciesLineItems" name="CommitmentsAndContingenciesLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BusinessCombinationConsiderationTransferredCash" name="BusinessCombinationConsiderationTransferredCash" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_BusinessCombinationStepUpOfInventoryFairValueRecognizedSellThroughPeriod" name="BusinessCombinationStepUpOfInventoryFairValueRecognizedSellThroughPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false"/>
  <xsd:element id="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost" name="AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_InventoryDetailsAbstract" name="InventoryDetailsAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BusinessCombinationOperatingLoss" name="BusinessCombinationOperatingLoss" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_SeniorSecuredBridgeLoanValue" name="SeniorSecuredBridgeLoanValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_BusinessCombinationConsiderationTransferredLineItems" name="BusinessCombinationConsiderationTransferredLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_IntellectualPropertyIndemnificationObligations" name="IntellectualPropertyIndemnificationObligations" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_ForeignCurrencyContractsAssetFairValueDisclosure" name="ForeignCurrencyContractsAssetFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_CustomerBMember" name="CustomerBMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_CostOfRevenueExcluding12" name="CostOfRevenueExcluding12" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions" name="ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_RestrictedStockUnitsServiceBasedRSUsMember" name="RestrictedStockUnitsServiceBasedRSUsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_VariousExecutivesandEmployeesMember" name="VariousExecutivesandEmployeesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_YoonAhOhMember" name="YoonAhOhMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue" name="AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_BusinessCombinationRevenue" name="BusinessCombinationRevenue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_RestructuringExpenses1" name="RestructuringExpenses1" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_SeniorSecuredBridgeLoanTerm" name="SeniorSecuredBridgeLoanTerm" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="onto_SoutheastAsiaMember" name="SoutheastAsiaMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BusinessCombinationConsiderationTransferredTableTextBlock" name="BusinessCombinationConsiderationTransferredTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="onto_OtherIncomeExpenseAbstract" name="OtherIncomeExpenseAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BussinessCombinationAccruedExpensesAndOtherCurrentLiabilities" name="BussinessCombinationAccruedExpensesAndOtherCurrentLiabilities" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_CashAndCashEquivalentsFairValueDisclosureTotalAssets" name="CashAndCashEquivalentsFairValueDisclosureTotalAssets" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_ForeignCurrencyContractsAssetFairValueDisclosureCAshCashEquivilents" name="ForeignCurrencyContractsAssetFairValueDisclosureCAshCashEquivilents" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_BalanceSheetDetailAbstract" name="BalanceSheetDetailAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_CustomerCMember" name="CustomerCMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_DisposedOfFullyAmortiziedIdentifiableIntangibleAssetsGrossCarryingValue" name="DisposedOfFullyAmortiziedIdentifiableIntangibleAssetsGrossCarryingValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_ShareRepurchaseTextBlock" name="ShareRepurchaseTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="onto_FairValueDisclosureTable" name="FairValueDisclosureTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BusinessCombinationStepUpOfInventoryFairValueRecognized" name="BusinessCombinationStepUpOfInventoryFairValueRecognized" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_OtherAccruedTaxes" name="OtherAccruedTaxes" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_BusinessCombinationOperatingIncome" name="BusinessCombinationOperatingIncome" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_ComputerEquipmentAndSoftwareMember" name="ComputerEquipmentAndSoftwareMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_CustomersAbove10Member" name="CustomersAbove10Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BusinessCombinationConsiderationTransferredEquity" name="BusinessCombinationConsiderationTransferredEquity" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_BusinessCombinationConsiderationTransferred" name="BusinessCombinationConsiderationTransferred" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_DueFromUnrelatedThirdParties" name="DueFromUnrelatedThirdParties" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_InvestmentsFairValueDisclosureTotalAssets" name="InvestmentsFairValueDisclosureTotalAssets" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_MichaelPPlisinskiMember" name="MichaelPPlisinskiMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_ProceedsFromAccountsReceivable" name="ProceedsFromAccountsReceivable" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_LitigationExpenses3" name="LitigationExpenses3" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_Non-MarketableEquitySecurities" name="Non-MarketableEquitySecurities" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_CustomerDMember" name="CustomerDMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_UnrecognizedTaxBenefitsIncludingInterestNoncurrent" name="UnrecognizedTaxBenefitsIncludingInterestNoncurrent" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_GeneralAndAdministrativeExcluding123" name="GeneralAndAdministrativeExcluding123" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_IdentifiableIntangibleAssetsAbstract" name="IdentifiableIntangibleAssetsAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_IntangibleAssetsAccumulatedAmortizationExcludingGoodwill" name="IntangibleAssetsAccumulatedAmortizationExcludingGoodwill" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_TaxEffectMarketableSecurities" name="TaxEffectMarketableSecurities" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_SingleReportableSegmentMember" name="SingleReportableSegmentMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_RevenueRecognizedPriorPeriod" name="RevenueRecognizedPriorPeriod" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_RestructuringCostInOperatingExpenses" name="RestructuringCostInOperatingExpenses" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_RestructuringExpenseMember" name="RestructuringExpenseMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_OrderBacklogMember" name="OrderBacklogMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_CustomerAMember" name="CustomerAMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_VariousExecutivesMember" name="VariousExecutivesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BusinessCombinationDeferredTaxLiablityEstablished" name="BusinessCombinationDeferredTaxLiablityEstablished" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_RevenueRecognizedCurrentYear" name="RevenueRecognizedCurrentYear" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_LuminaInstrumentsIncMember" name="LuminaInstrumentsIncMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_GeneralAndAdministrativeMember" name="GeneralAndAdministrativeMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_BusinessCombinationGoodwill" name="BusinessCombinationGoodwill" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_BusinessCombinationStepUpOfInventoryFairValueToBeRecognized" name="BusinessCombinationStepUpOfInventoryFairValueToBeRecognized" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_DirectorsMember" name="DirectorsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_PartsRevenueMember" name="PartsRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_PaymentsToAquireNonMarketableSecurities" name="PaymentsToAquireNonMarketableSecurities" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="onto_MergerAndAcquisitionsRelatedExpenses2" name="MergerAndAcquisitionsRelatedExpenses2" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_PercentOfCommonStockOustandingToBeAquiredUnderDefinitiveSharePurchaseAgreement" name="PercentOfCommonStockOustandingToBeAquiredUnderDefinitiveSharePurchaseAgreement" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="onto_SalesAndMarketingExcluding12" name="SalesAndMarketingExcluding12" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="onto_IdoDolevMember" name="IdoDolevMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_SalesAndMarketingMember" name="SalesAndMarketingMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_PerformanceRestrictedStockUnitsMember" name="PerformanceRestrictedStockUnitsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_CommitmentsAndContingenciesTable" name="CommitmentsAndContingenciesTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_SignificantCustomerMember" name="SignificantCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_SegmentReportingByBusinessUnitAbstract" name="SegmentReportingByBusinessUnitAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_SystemsAndSoftwareRevenueMember" name="SystemsAndSoftwareRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
</xsd:schema>
