Cover [Abstract] Document Type Document Quarterly Report Document Period End Date Document Transition Report Securities Act File Number Entity Registrant Name Entity Incorporation, State or Country Code Entity Tax Identification Number Entity Address, Address Line One Entity Address, City or Town Entity Address, State or Province Entity Address, Postal Zip Code City Area Code Local Phone Number Title of 12(b) Security Trading Symbol Security Exchange Name Entity Current Reporting Status Entity Interactive Data Current Entity Filer Category Entity Small Business Entity Emerging Growth Company Entity Shell Company Entity Common Stock, Shares Outstanding Entity Central Index Key Current Fiscal Year End Date Document Fiscal Year Focus Document Fiscal Period Focus Amendment Flag Consolidated Balance Sheets Assets [Abstract] Assets Assets, Current [Abstract] Current assets: Cash and Cash Equivalent Cash and cash equivalents Debt Securities, Available-for-Sale, Current Short-term investments Accounts Receivable, after Allowance for Credit Loss, Current Accounts receivable, net Unbilled Contracts Receivable Contract assets Inventory, Net Inventories Total Prepaid Expense and Other Assets, Current Prepaid expenses and other current assets Assets, Current Total current assets Property, Plant and Equipment, Net Property, plant, and equipment, net Property, plant, and equipment, net Operating Lease, Right-of-Use Asset Operating lease right-of-use assets Finite-Lived Intangible Assets, Net Total Net Intangible Assets Intangible assets, net Goodwill Goodwill Deferred Income Tax Assets, Net Deferred income taxes Other Assets, Noncurrent Other assets Assets Total assets Liabilities and Equity [Abstract] Liabilities and stockholders' equity Liabilities, Current [Abstract] Current liabilities: Accounts Payable, Current Accounts payable Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer. Accrued and Other Liabilities, Current Accrued expenses and other current liabilities Total accrued expenses and other current liabilities Deferred Revenue, Current Contract liabilities Accrued Income Taxes, Current Income taxes payable Liabilities, Current Total current liabilities Deferred Income Tax Liabilities, Net Deferred income taxes Long-Term Debt, Excluding Current Maturities Long-term debt Operating Lease, Liability, Noncurrent Long-term operating lease liabilities Other Liabilities, Noncurrent Other liabilities Liabilities Total liabilities Equity, Attributable to Parent [Abstract] Stockholders' equity: Common Stock, Value, Issued Common stock, $0.01 par value; 120,000,000 shares authorized; 61,032,453 shares issued and outstanding at March 31, 2026 and 60,388,539 shares issued and outstanding at December 31, 2025 Additional Paid in Capital, Common Stock Additional paid-in capital Retained Earnings (Accumulated Deficit) Accumulated deficit Accumulated Other Comprehensive Income (Loss), Net of Tax Accumulated other comprehensive income Equity, Attributable to Parent Balance at the end of the period Balance at the beginning of the period Total stockholders' equity Liabilities and Equity Total liabilities and stockholders' equity Preferred Stock, Par or Stated Value Per Share Preferred stock, par value (in dollars per share) Preferred Stock, Shares Authorized Preferred stock, shares authorized Preferred Stock, Shares Issued Preferred stock, shares issued Preferred Stock, Shares Outstanding Preferred stock, shares outstanding Common Stock, Par or Stated Value Per Share Common stock, par value (in dollars per share) Common Stock, Shares Authorized Common stock, authorized shares Common Stock, Shares, Issued Common stock, shares issued Common Stock, Shares, Outstanding Common stock, shares outstanding Consolidated Statements of Operations Revenue from Contract with Customer, Including Assessed Tax Net sales Net Sales to Unaffiliated Customers Cost of Product and Service Sold Cost of sales Gross Profit Gross profit Operating Expenses [Abstract] Operating expenses, net: Research and Development Expense Research and development Selling, General and Administrative Expense Selling, general, and administrative Amortization of Intangible Assets Amortization of intangible assets Business Combination, Acquisition-Related Cost, Expense Acquisition related costs Merger costs Other Operating Income (Expense), Net Other operating expense (income), net Operating Expenses Total operating expenses, net Operating Income (Loss) Operating income (loss) Investment Income, Interest Interest income Interest Expense, Nonoperating Interest expense Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest Income (loss) before income taxes Income before income taxes Income Tax Expense (Benefit) Income tax expense (benefit) Income tax expense Net income (loss) Net income (loss) Income Per Common Share Income (loss) per common share: Earnings Per Share, Basic Basic (in dollars per share) Earnings Per Share, Diluted Diluted (in dollars per share) Weighted Average Number of Shares Outstanding, Diluted [Abstract] Weighted average number of shares: Weighted Average Number of Shares Outstanding, Basic Basic (in shares) Basic weighted average shares outstanding Weighted Average Number of Shares Outstanding, Diluted Diluted (in shares) Diluted weighted average shares outstanding Consolidated Statements of Comprehensive Income (Loss) Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent [Abstract] Other comprehensive income (loss), net of tax: Other Comprehensive Income (Loss), Available-for-Sale Securities Adjustment, Net of Tax, Portion Attributable to Parent [Abstract] Available-for-sale securities: Other Comprehensive Income (Loss), Available-for-Sale Securities Adjustment, Net of Tax, Portion Attributable to Parent Unrealized gain (loss) on available-for-sale securities Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent [Abstract] Currency translation adjustments: Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Gain (Loss) Arising During Period, Net of Tax Change in currency translation adjustments Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent Other comprehensive income (loss) Total other comprehensive income (loss), net of tax Comprehensive Income (Loss), Net of Tax, Attributable to Parent Total comprehensive income (loss) Consolidated Statements of Cash Flows Cash Provided by (Used in) Operating Activity, Continuing Operation [Abstract] Cash Flows from Operating Activities Net Income (Loss), Including Portion Attributable to Noncontrolling Interest Net income (loss) Adjustment to Reconcile Net Income to Cash Provided by (Used in) Operating Activity [Abstract] Adjustments to reconcile net income to net cash provided by (used in) operating activities: Depreciation, Depletion and Amortization Depreciation and amortization Amortization of Debt Issuance Costs and Discounts Amortization of debt discount/transaction costs Non-cash interest expense Deferred Income Tax Expense (Benefit) Deferred income taxes Share-Based Payment Arrangement, Noncash Expense Share-based compensation expense Adjustment to Reconcile Net Income to Cash Provided by (Used in) Operating Activity, Increase (Decrease) in Operating Capital [Abstract] Changes in operating assets and liabilities: The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services and contract assets. Increase Decrease in Accounts Receivable and Contract Assets Accounts receivable and contract assets Increase (Decrease) in Inventories Inventories Increase (Decrease) in Prepaid Expense and Other Assets Prepaid expenses and other current assets Increase (Decrease) in Accounts Payable and Accrued Liabilities Accounts payable and accrued expenses Increase (Decrease) in Contract with Customer, Liability Contract liabilities Increase (Decrease) in Income Taxes Payable, Net of Income Taxes Receivable Income taxes receivable and payable, net Increase (Decrease) in Other Operating Assets and Liabilities, Net Other, net Cash Provided by (Used in) Operating Activity, Including Discontinued Operation Net cash provided by (used in) operating activities Cash Provided by (Used in) Investing Activity, Continuing Operation [Abstract] Cash Flows from Investing Activities Payments to Acquire Property, Plant, and Equipment Capital expenditures Proceeds from Sale and Maturity of Debt Securities, Available-for-Sale Proceeds from the sale of investments Payments to Acquire Debt Securities, Available-for-Sale Payments for purchases of investments Cash Provided by (Used in) Investing Activity, Including Discontinued Operation Net cash provided by (used in) investing activities Cash Provided by (Used in) Financing Activity, Continuing Operation [Abstract] Cash Flows from Financing Activities Payment, Tax Withholding, Share-Based Payment Arrangement Restricted stock tax withholdings Repayments of Convertible Debt Repayment and extinguishment of convertible debt Cash paid for repurchase of notes Payments of Debt Issuance Costs Debt issuance costs Transaction costs Proceeds, Issuance of Shares, Share-Based Payment Arrangement, Including Option Exercised Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan Proceeds from Convertible Debt Proceeds from issuance of Notes, net of issuance cost Proceeds from issuance of 2029 Notes, net of issuance costs Cash Provided by (Used in) Financing Activity, Including Discontinued Operation Net cash provided by (used in) financing activities Effect of Exchange Rate on Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Including Discontinued Operation Effect of exchange rate changes on cash and cash equivalents Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Period Increase (Decrease), Including Exchange Rate Effect and Discontinued Operation Net increase (decrease) in cash and cash equivalents Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Continuing Operation Cash and cash equivalents - end of period Cash and cash equivalents - beginning of period Supplemental Cash Flow Information [Abstract] Supplemental Disclosure of Cash Flow Information Interest Paid, Excluding Capitalized Interest, Operating Activity Interest paid Income Taxes Paid, Net Income taxes paid, net of refunds received No definition available. Non Cash Operating and Financing Activities [Abstract] Non-cash activities Capital Expenditures Incurred but Not yet Paid Capital expenditures included in accounts payable and accrued expenses Right-of-Use Asset Obtained in Exchange for Operating Lease Liability Right-of-use assets obtained in exchange for lease obligations Basis of Presentation Basis of Presentation and Significant Accounting Policies [Text Block] Basis of Presentation Earnings Per Share [Text Block] Income Per Common Share No definition available. Assets. The entire disclosure for balance sheet assets. Balance Sheet Related Assets Disclosures [Text Block] Assets No definition available. Liabilities. The entire disclosure for balance sheet liabilities. Balance Sheet Related Liabilities Disclosures [Text Block] Liabilities Commitments and Contingencies Commitments and Contingencies Disclosure [Text Block] Commitments and Contingencies Equity Equity [Text Block] Equity Share-based Compensation Share-Based Payment Arrangement [Text Block] Share-based Compensation Income Taxes Income Tax Disclosure [Text Block] Income Taxes Segment Reporting and Geographic Information Segment Reporting Disclosure [Text Block] Segment Reporting and Geographic Information No definition available. Merger The entire disclosure relating to mergers. Merger Disclosure [Text Block] Merger Basis of Accounting, Policy [Policy Text Block] Basis of Presentation New Accounting Pronouncements, Policy [Policy Text Block] Recent Accounting Standards Not Yet Adopted Business Combination [Policy Text Block] Pending Merger with Axcelis Technologies, Inc. Schedule of Earnings Per Share, Basic and Diluted [Table Text Block] Schedule of computations of basic and diluted income per share Fair Value, Assets Measured on Recurring Basis [Table Text Block] Schedule of assets measured on a recurring basis at fair value Schedule of Available-for-Sale Securities Reconciliation [Table Text Block] Schedule of amortized cost and fair value of available-for-sale securities Debt Securities, Available-for-Sale, Unrealized Loss Position, Fair Value [Table Text Block] Schedule of fair value and unrealized losses of available-for-sale securities in a loss position Investments Classified by Contractual Maturity Date [Table Text Block] Schedule of contractual maturities of securities classified as available-for-sale Schedule of Inventory, Current [Table Text Block] Schedule of inventories Property, Plant and Equipment [Table Text Block] Schedule of property, plant, and equipment Tabular disclosure of assets, excluding financial assets and goodwill, which lack physical substance with a finite life or exist in perpetuity, by major class. Schedule of Intangible Assets, Excluding Goodwill [Table Text Block] Schedule of intangible assets excluding goodwill Schedule of Accrued Liabilities [Table Text Block] Schedule of accrued expenses and other current liabilities Schedule of Product Warranty Liability [Table Text Block] Schedule of changes in product warranty reserves Convertible Debt [Table Text Block] Schedule of carrying value of Convertible Senior Notes Interest Income and Interest Expense Disclosure [Table Text Block] Schedule of interest expense related to Convertible Senior Notes Lessee, Operating Lease, Liability, to be Paid, Maturity [Table Text Block] Schedule of maturities of lease liabilities Schedule of Stockholders Equity [Table Text Block] Schedule of Stockholders' Equity Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block] Schedule of the changes in the balances of each component of AOCI, net of tax Share-Based Payment Arrangement, Expensed and Capitalized, Amount [Table Text Block] Schedule of share-based compensation expense Share-Based Payment Arrangement, Restricted Stock and Restricted Stock Unit, Activity [Table Text Block] Summary of non-vested restricted and performance shares activity Tabular disclosure of pre-tax income (loss) and provision for income tax. Pre-tax Income (Loss) and Provision for Income Tax [Table Text Block] Schedule of income before income taxes and income tax expense Revenue from External Customers by Products and Services [Table Text Block] Schedule of sales by end-market Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block] Schedule of sales by geographic region Fiscal Period Duration Fiscal period duration (in days) No definition available. Net Income (Loss) Available to Common Stockholders [Abstract] Numerator: Net Income (Loss) Available to Common Stockholders, Basic Net income (loss) Interest on Convertible Debt, Net of Tax Interest expense associated with convertible notes Net Income (Loss) Available to Common Stockholders, Diluted Net income (loss) available to common shareholders Weighted Average Number of Shares Outstanding Reconciliation [Abstract] Denominator: Incremental Common Shares Attributable to Dilutive Effect of Share-Based Payment Arrangements Effect of potentially dilutive share-based awards Incremental Common Shares Attributable to Dilutive Effect of Conversion of Debt Securities Dilutive effect of convertible notes No definition available. Earnings Per Share, Disclosure [Abstract] Net income (loss) per common share: Antidilutive Security, Excluded EPS Calculation [Table] Antidilutive Securities [Axis] Antidilutive Securities, Name [Domain] Represents information pertaining to potentially dilutive shares not otherwise specified. Potentially Dilutive Shares [Member] Potentially dilutive shares Borrowing which takes priority over other debt securities sold by the issuer that can be exchanged for a specified number of another security at the option of the issuer or the holder, for example, but not limited to, the entity's common stock. Convertible Senior Notes [Member] Convertible senior notes Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items] Antidilutive securities Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount Securities excluded from the diluted calculation as their effect would be antidilutive Fair Value, Recurring and Nonrecurring [Table] Measurement Frequency [Axis] Measurement Frequency [Domain] Fair Value, Recurring [Member] Measured on a recurring basis Fair Value Hierarchy and NAV [Axis] Fair Value Hierarchy and NAV [Domain] Fair Value, Inputs, Level 1 [Member] Level 1 Fair Value, Inputs, Level 2 [Member] Level 2 Cash and Cash Equivalents [Axis] Cash and Cash Equivalents [Domain] Represents the information pertaining to certificate of deposits and time deposits. Certificate Of Deposits And Time Deposits [Member] Certificate of deposits and time deposits Money Market Funds [Member] Money market cash Financial Instrument [Axis] Financial Instruments [Domain] US Treasury Securities [Member] U.S. treasuries US Government Agencies Debt Securities [Member] Government agency securities Corporate Debt Securities [Member] Corporate debt Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] Major categories of assets and liabilities measured on a recurring basis, at fair value Cash and Cash Equivalents [Abstract] Cash equivalents Fair value portion of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Cash Equivalents, Fair Value Disclosure Total Cash equivalents Short-Term Investments [Abstract] Short-term investments Investments, Fair Value Disclosure Total Short-term investments Amount of transfers of assets measured on a recurring basis out of Level 1 of the fair value hierarchy into Level 2. Fair Value, Assets, Level 1 to Level 2 Transfers, Amount 1 Transfer of assets from Level 1 to Level 2 Amount of transfers of assets measured on a recurring basis out of Level 2 of the fair value hierarchy into Level 1. Fair Value, Assets, Level 2 to Level 1 Transfers, Amount 1 Transfer of assets from Level 2 to Level 1 Debt Securities, Available-for-Sale [Table] Debt Securities, Available-for-Sale [Line Items] Total available-for-sale securities Debt Securities, Available-for-Sale, Amortized Cost Amortized Cost Debt Securities, Available-for-Sale, Accumulated Gross Unrealized Gain, before Tax Gross Unrealized Gains Debt Securities, Available-for-Sale, Accumulated Gross Unrealized Loss, before Tax Gross Unrealized Losses Debt Securities, Available-for-Sale Estimated Fair Value Available-for-sale Securities, Debt Securities, Total Debt Securities, Available-for-Sale [Abstract] Available-for-sale securities in a loss position Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months Investments, Continuous loss position for less than 12 months, Estimated Fair Value Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses Debt Securities, Available-for-Sale, Maturity, Allocated and Single Maturity Date, Amortized Cost, Rolling Maturity [Abstract] Contractual maturities - Amortized Cost Debt Securities, Available-for-Sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Amortized Cost Amortized Cost, Due in one year or less Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year through second year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date. Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Amortized Cost Amortized Cost, Due after one year through two years Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in second through third year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date. Debt Securities, Available For Sale, Maturity, Allocated And Single Maturity Date, Rolling After Two Through Three Years, Amortized Cost Amortized Cost, Due after two years through three years Debt Securities, Available-for-Sale, Maturity, Allocated and Single Maturity Date, Rolling Maturity, Fair Value [Abstract] Contractual maturities - Estimated Fair Value Debt Securities, Available-for-Sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Fair Value Estimated Fair Value, Due in one year or less Fair value of investment in debt security, measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year through second year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date. Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Fair Value Estimated Fair Value, Due after one year through two years Fair value of investment in debt security, measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in second through third year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date. Debt Securities, Available For Sale, Maturity, Allocated And Single Maturity Date, Rolling After Two Through Three Years, Fair Value Estimated Fair Value, Due after two years through three years Debt Securities, Available-for-Sale, Realized Gain (Loss) [Abstract] Realized gains or losses Debt Securities, Available-for-Sale, Realized Gain (Loss) Realized gains or losses Debt Securities, Available-for-Sale, Unrealized Loss Unrealized losses Accounts and Financing Receivables [Table] Accounts, Notes, Loans and Financing Receivable [Line Items] Accounts Receivable Accounts Receivable, Allowance for Credit Loss, Current Allowance for doubtful accounts receivable Inventory, Net [Abstract] Inventories Inventory, Raw Materials, Net of Reserves Materials Inventory, Work in Process, Net of Reserves Work-in-process Inventory, Finished Goods, Net of Reserves Finished goods Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date for elements of evaluation inventory. Inventory, Evaluation Inventory, Net of Reserves Evaluation inventory Prepaid Expense and Other Assets, Current [Abstract] Prepaid expenses and other current assets Deposit Assets Deposits with suppliers Property, Plant and Equipment [Table] Long-Lived Tangible Asset [Axis] Long-Lived Tangible Asset [Domain] Land [Member] Land Building and Building Improvements [Member] Building and improvements Machinery and Equipment [Member] Machinery and equipment Leasehold Improvements [Member] Leaseholds improvements Property, Plant and Equipment [Line Items] Property, plant, and equipment Property, Plant and Equipment, Gross Gross property, plant and equipment Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment Less: accumulated depreciation and amortization Depreciation Depreciation expense Goodwill [Table] Goodwill [Line Items] Goodwill disclosures Goodwill [Roll Forward] Changes in goodwill balances Goodwill, Period Increase (Decrease) Increase (decrease) in goodwill Disclosure of finite-lived and indefinite-lived intangible assets, excluding goodwill, in total and by major class. Finite Lived and Indefinite Lived Intangible Assets by Major Class [Table] Finite-Lived Intangible Assets by Major Class [Axis] Finite-Lived Intangible Assets, Major Class Name [Domain] Technology-Based Intangible Assets [Member] Technology Customer Relationships [Member] Customer relationships Trademarks and Trade Names [Member] Trademarks and tradenames Other Intangible Assets [Member] Other Intangible Assets No definition available. Finite Lived and Indefinite Lived Intangible Assets By Major Class [Line Items] Intangible assets Finite-Lived Intangible Assets, Gross Gross Carrying Amount, Intangible assets Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance with a finite life. Finite-Lived Intangible Assets, Accumulated Amortization and Impairment Accumulated Amortization and Impairment, Intangible assets Accrued Liabilities, Current [Abstract] Accrued expenses and other current liabilities Employee-related Liabilities, Current Payroll and related benefits Product Warranty Accrual, Current Warranty Operating Lease, Liability, Current Accrued expenses and other current liabilities Operating lease liabilities Interest Payable, Current Interest Accrued Professional Fees, Current Professional fees Taxes Payable, Current Sales, use, and other taxes Carrying value as of the balance sheet date of obligations incurred and payable for merger and acquisition costs. Accrued Acquisition Costs Merger costs Business Combination, Contingent Consideration, Liability, Current Contingent consideration Other Accrued Liabilities, Current Other Product Warranties Disclosures [Abstract] Warranty Represents the warranty period from the date of final acceptance on the products purchased by customers. Product Warranty Period Warranty period Standard and Extended Product Warranty Accrual Balance, end of the period Balance, beginning of the period Standard and Extended Product Warranty Accrual, Increase for Warranties Issued Warranties issued Standard and Extended Product Warranty Accrual, Decrease for Payments Consumption of reserves Standard and Extended Product Warranty Accrual, Increase (Decrease) for Preexisting Warranties Changes in estimate Movement in Deferred Revenue [Roll Forward] Changes in deferred revenue Contract with Customer, Liability Contract liability Contract with Customer, Liability, Revenue Recognized Amount of contract liability recognized into revenue Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction [Table] Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis] Statistical Measurement [Axis] Statistical Measurement [Domain] Minimum [Member] Minimum Maximum [Member] Maximum Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction [Line Items] Performance obligations Revenue, Remaining Performance Obligation, Amount Remaining performance obligations Period at time of contract origination in which remaining performance obligation is expected to be recognized as revenue, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Original Period Performance obligation at time of contract origination Percentage of remaining performance obligation expected to be recognized. Revenue Remaining Performance Obligation Expected Timing Percentage Percentage of remaining performance obligation expected to be recognized Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Period Remaining performance obligations, expected timing of satisfaction Revenue, Remaining Performance Obligation, Optional Exemption, Performance Obligation [true false] Revenue, Practical Expedient, Remaining Performance Obligation Schedule of Long-Term Debt Instruments [Table] Debt Instrument [Axis] Debt Instrument, Name [Domain] Convertible Debt [Member] Convertible Notes Convertible Senior Unsecured Notes, due 2025, due 2027, and due 2029 (2025 Notes, 2027 Notes, and 2029 Notes). Convertible Senior Unsecured Notes, Due 2025, Due 2027 and Due 2029 [Member] 2025 Notes, 2027 Notes, and 2029 Notes Convertible Senior Unsecured Notes, due 2025 and due 2027 (2025 Notes and 2027 Notes). Convertible Senior Unsecured Notes, Due 2025 and Due 2027 [Member] 2025 Notes and 2027 Notes Convertible Senior Unsecured Notes, Due 2025 (2025 Notes). Convertible Senior Unsecured Notes, Due 2025 [Member] 2025 Notes Convertible Senior Unsecured Notes, due 2027 and due 2029 (2027 Notes and 2029 Notes). Convertible Senior Unsecured Notes, Due 2027 and Due 2029 [Member] 2027 Notes and 2029 Notes Convertible Senior Unsecured Notes, Due 2027 (2027 Notes). Convertible Senior Unsecured Notes, Due 2027 [Member] 2027 Notes Convertible Senior Unsecured Notes, Due 2029 (2029 Notes). Convertible Senior Unsecured Notes, Due 2029 [Member] 2029 Notes Debt Instrument [Line Items] Debt Debt Instrument, Face Amount Principal amount Debt Instrument, Interest Rate, Stated Percentage Interest rate (as a percent) Payments for Derivative Instrument, Financing Activities Purchase of capped calls Extinguishment of Debt, Amount Repurchased and retired amount Stock Issued During Period, Value, Conversion of Convertible Securities Settlement of convertible notes Stock Issued During Period, Shares, Conversion of Convertible Securities Settlement of convertible notes (in shares) Amount of adjustment to additional paid in capital (APIC) resulting from extinguishment of equity component of repurchased or exchanged notes. Adjustments To Additional Paid In Capital Extinguishment Equity Component Of Notes Repurchased Reduction of additional paid-in capital for extinguishment of equity component of note repurchased/exchanged Debt Instrument, Redemption Price, Percentage Redemption price as a percent of principal amount Debt Instrument, Convertible, Threshold Percentage of Stock Price Trigger Stock price conversion trigger (as a percent) Debt Instrument, Convertible, Threshold Trading Days Trading days threshold Debt Instrument, Convertible, Threshold Consecutive Trading Days Number of consecutive trading days, scenario one Debt Instrument, Convertible, Conversion Ratio Conversion rate Represents the multiples of the principal amount of debt that holders may convert at their option under circumstances specified under the agreement. Debt Instrument Principal Amount Denomination For Conversion Into Common Stock Multiples of principal holders may convert Debt Instrument, Convertible, Conversion Price Conversion price (in dollars per share) Number of consecutive business days used in determining if holder has met conversion requirements. Debt Instrument, Conversion, Number of Business Days Number of consecutive business days Threshold period of specified consecutive trading days within which trading price as a percentage of product of last reported sale price of common stock and conversion rate on each specified trading day must be less than threshold percentage for specified number of trading days to trigger conversion feature. Debt Instrument, Convertible, Threshold Consecutive Trading Days, 2 Number of consecutive trading days, scenario two Maximum trading price as a percentage of product of the last reported sale price of common stock and the conversion rate on each specified trading day to determine eligibility of conversion of note. Debt Instruments, Convertible Features , Maximum Percentage of Common Stock could be Converted Trading price conversion trigger (as a percent) Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net Unamortized transaction costs Long-Term Debt Net carrying value No definition available. Cash Interest Expense Cash Interest Expense Interest Expense, Debt, Excluding Amortization Coupon interest expense No definition available. Non-Cash Interest Expense Non-Cash Interest Expense Interest Expense, Debt Total Interest Expense Convertible Debt, Fair Value Disclosures Estimated fair value Debt Instrument, Convertible, Fair Value by Fair Value Hierarchy Level [Extensible Enumeration] Convertible Debt, Fair Value by Fair Value Hierarchy Level Derivative Instrument [Axis] Derivative Contract [Domain] Capped call contract. Derivative Contract Capped Call [Member] Capped Call Transactions Number of shares that were underlying in capped call transaction. Capped Call Transactions, Underlying Shares Covering the initial underlying shares Aggregate price of capped call transaction. Capped Call Transactions, Price Aggregate price of capped call transaction Exercise price per share under capped call transactions. Capped Call Transactions, Exercise Price Capped call transactions, exercise price Cap price of the capped call transactions. Capped Call Transactions, Cap Price Cap price of the capped call transactions (in dollars per share) Revolving Credit Facility, entered into December 16, 2021. Revolving Credit Facility, December 2021 [Member] Credit Facility Revolving Credit Facility Letter of Credit, entered into December 16, 2021. Revolving Credit Facility, December 2021, Letter Of Credit [Member] Credit Facility, Letter of Credit Variable Rate [Axis] Variable Rate [Domain] Base Rate [Member] Base rate Secured Overnight Financing Rate (SOFR) [Member] SOFR Line of Credit Facility, Maximum Borrowing Capacity Borrowing capacity The contingent increase above the maximum borrowing capacity under the credit facility, if any one or more of the existing banks or new banks agree to provide such increased commitment amount. Line of Credit Facility Contingent Increase, Additional Borrowing Capacity Additional increase in borrowing subject to certain conditions Debt Instrument, Basis Spread on Variable Rate Basis spread on base rate (as a percent) Floor rate on debt instrument. Debt Instrument Floor Rate Floor rate on debt instrument (as a percent) Line of Credit Facility, Unused Capacity, Commitment Fee Percentage Unused commitment fee percentage (as a percent) Interest coverage ratio, as defined by the agreement. Debt Instrument, Interest Coverage Ratio Interest coverage ratio Total net leverage ratio, as defined by the agreement. Debt Instrument, Total Net Leverage Ratio Total net leverage ratio Secured net leverage ratio, as defined by the agreement. Debt Instrument, Secured Net Leverage Ratio Secured net leverage ratio Line of Credit Facility, Maximum Amount Outstanding During Period Outstanding amount Other Liabilities [Abstract] Other liabilities Lessee, Operating Lease, Description [Abstract] Leases Lessee, Operating Lease, Renewal Term Lease renewal term Operating Lease, Weighted Average Remaining Lease Term Weighted average remaining lease term Lessee, Operating Lease, Discount Rate Weighted average discount rate (as a percent) Lessee, Operating Lease, Liability, to be Paid, Fiscal Year Maturity [Abstract] Minimum lease commitments, Payments due by period: Lessee, Operating Lease, Liability, to be Paid, Remainder of Fiscal Year 2026 Lessee, Operating Lease, Liability, to be Paid, Year One 2027 Lessee, Operating Lease, Liability, to be Paid, Year Two 2028 Lessee, Operating Lease, Liability, to be Paid, Year Three 2029 Lessee, Operating Lease, Liability, to be Paid, Year Four 2030 Amount of lessee's undiscounted obligation for lease payment for operating lease due after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach). Lessee, Operating Lease, Liability, to be Paid, after Year Four Thereafter Lessee, Operating Lease, Liability, to be Paid Total future minimum lease payments Lessee, Operating Lease, Liability, Undiscounted Excess Amount Less: Imputed interest Operating Lease, Liability Total operating lease liabilities Total operating lease liabilities Operating Lease, Liability, Statement of Financial Position [Extensible Enumeration] Operating Lease, Liability, Statement of Financial Position Operating Lease, Liability, Current, Statement of Financial Position [Extensible Enumeration] Operating Lease, Liability, Current, Statement of Financial Position Lease, Cost [Abstract] Lease cost Operating Lease, Cost Operating lease costs Variable Lease, Cost Variable lease costs Operating Lease, Payments Cash outflows from operating leases Maximum amount of trade receivables from customers to be sold without recourse under the terms of the receivable purchase agreement. Receivable Purchase Agreement, Maximum Amount Maximum amount of trade receivables to be sold under agreement Amount of accounts receivable that has been sold to other entities. Trade Receivables Sold Under Receivable Purchase Agreement Receivables sold Amount of trade receivables available to be sold from customers without recourse under the terms of the receivable purchase agreement. Receivable Purchase Agreement, Amount Available Amount of trade receivables available to be sold under agreement Purchase Obligation, Fiscal Year Maturity [Abstract] Purchase commitments Unrecorded Unconditional Purchase Obligation, Due in Next Rolling 12 Months Purchase commitments due within one year Guarantees [Abstract] Bank guarantees Guarantor Obligations, Current Carrying Value Bank guarantees and letters of credit outstanding Line of Credit Facility, Remaining Borrowing Capacity Unused bank guarantees and letters of credit Accumulated Other Comprehensive Income (Loss) [Table] Equity Components [Axis] Equity Component [Domain] Common Stock [Member] Common Stock Additional Paid-in Capital [Member] Additional Paid-in Capital Retained Earnings [Member] Accumulated Deficit AOCI Attributable to Parent [Member] Accumulated Other Comprehensive Income Accumulated Other Comprehensive Income (Loss) [Line Items] Accumulated Other Comprehensive Income Increase (Decrease) in Stockholders' Equity [Roll Forward] Increase (Decrease) in Stockholders' Equity Shares, Outstanding Balance at the end of the period (in shares) Balance at the beginning of the period (in shares) Amount after tax and reclassification adjustments of other comprehensive income (loss). Includes foreign currency gains (losses) on transactions included in operating results. Other Comprehensive Income (Loss) Including Foreign Currency Gains (Losses) on Transactions Included in Operating Results, Net of Tax Other comprehensive income (loss), net of tax APIC, Share-Based Payment Arrangement, Increase for Cost Recognition Share-based compensation expense Value, after forfeiture, of shares issued under share-based payment arrangement when RSA vests are greater than RSU vests. Shares Issued, Value, Share-Based Payment Arrangement, RSA Vests Greater Than RSU Vests Net issuance under employee stock plans Number, after forfeiture, of shares or units issued under share-based payment arrangement when RSA vests are greater than RSU vests. Shares Issued, Shares, Share-Based Payment Arrangement, RSA Vests Greater than RSU Vests Net issuance under employee stock plans (in shares) Accumulated Foreign Currency Adjustment Attributable to Parent [Member] Foreign Currency Translation AOCI, Accumulated Gain (Loss), Debt Securities, Available-for-Sale, Parent [Member] Unrealized Gains (Losses) on Available-for-Sale Securities AOCI Attributable to Parent, Net of Tax [Roll Forward] Changes in the balances of each component of AOCI Schedule of Share-Based Compensation Arrangements by Share-Based Payment Award [Table] Statement of Income Location, Balance [Axis] Statement of Income Location, Balance [Domain] Cost of Sales [Member] Cost of Sales Research and Development Expense [Member] Research and development Selling, General and Administrative Expenses [Member] Selling, general and administrative Restricted Stock [Member] Restricted stock Share-Based Compensation Arrangement by Share-Based Payment Award [Line Items] Share-based compensation Share-Based Compensation Arrangement by Share-Based Payment Award, Expiration Period Expiration term Share-Based Payment Arrangement, Additional Disclosure [Abstract] Recognized share-based compensation Share-Based Payment Arrangement, Expense Total share-based compensation expense Represents the information pertaining to restricted and performance shares. Restricted And Performance Shares [Member] Non-vested restricted shares and performance shares Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward] Number of Shares Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Number Outstanding at the end of the period (in shares) Outstanding at the beginning of the period (in shares) Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period Granted (in shares) The number of performance award adjustments made during the period on other than stock (or unit) option plans resulting in decrease in awards outstanding. Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Performance Award Adjustments In Period Performance award adjustments (in shares) Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Vested in Period Vested (in shares) Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Forfeited in Period Forfeited (in shares) Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Additional Disclosures [Abstract] Weighted Average Grant Date Fair Value Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value Outstanding at the end of the period (in dollars per share) Outstanding at the beginning of the period (in dollars per share) Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value Granted (in dollars per share) The weighted average fair value of performance award adjustments during the period for nonvested equity-based awards other than stock (or unit) option plans. Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Performance Award Adjustments Weighted Average Grant Date Fair Value Performance award adjustments (in dollars per share) Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value Vested (in dollars per share) Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value Forfeited (in dollars per share) Income Tax Expense (Benefit), Effective Income Tax Rate Reconciliation, Amount [Abstract] Tax reconciliation disclosures Effective Income Tax Rate Reconciliation, Percent Effective tax rate (as a percent) Effective Income Tax Rate Reconciliation, Nondeductible Expense, Share-Based Payment Arrangement, Amount Income tax expense related to adjustments made for share-based compensation Schedule of Segment Reporting Information, by Segment [Table] Product and Service [Axis] Product and Service [Domain] Represents the entity's Semiconductor reporting segment. Semiconductor [Member] Semiconductor Represents the entity's Compound Semiconductor reporting segment. Compound Semiconductor [Member] Compound Semiconductor Represents the entity's Data Storage reporting segment. Data Storage segment consists of ion beam etch, ion beam deposition, diamond-like carbon, physical vapor deposition and dicing and slicing products sold primarily to customers in the data storage industry. Data Storage [Member] Data Storage Represents the entity's Scientific & Other reporting segment. Scientific And Other [Member] Scientific & Other Geographical [Axis] Geographical [Domain] UNITED STATES United States EMEA [Member] EMEA CHINA China Region of Asia Pacific, excluding China. Asia Pacific Excluding China [Member] Rest of APAC Remaining regions of the world not specifically identified. Rest Of World [Member] Rest Of World Segment Reporting Information [Line Items] Revenue reporting by end-market and geographic region Number of Operating Segments Number of operating segments Number of Reportable Segments Number of reportable segments Represents the number of primary or end-markets the entity sells into. Number of Sales Markets Number of end-markets Disclosure of information related to mergers. Merger [Table] Business Combination [Axis] Business Combination [Domain] Represents the information pertaining to Veeco Instruments Inc. Veeco Instruments Inc [Member] Veeco Instruments Inc Legal Entity [Axis] All Entities [Member] Represents the information pertaining to Axcelis Technologies, Inc. Axcelis Technologies, Inc [Member] Axcelis Technologies, Inc Ownership [Axis] Ownership [Domain] Scenario [Axis] Scenario [Domain] Represents the information pertaining to Axcelis Technologies Inc identified as a non-terminating party Non Terminating Party, Axcelis Technologies Inc [Member] Non Terminating Party, Axcelis Technologies Inc Represents the information pertaining to Veeco Instruments Inc identified as a non-terminating party. Non-Terminating Party, Veeco Instruments Inc [Member] Non-Terminating Party, Veeco Instruments Inc Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. Merger [Line Items] Merger The number of directors who recused from voting on the merger. Number of Directors Who Recused from Voting on the Merger Number of director who serves on the Axcelis board Represents the share exchange ratio of new shares to be received for each shares held. Business Combination, Share Exchange Ratio Share exchange ratio of new shares to be received Subsidiary, Ownership Percentage, Parent Ownership percentage Subsidiary, Ownership Percentage, Noncontrolling Owner Ownership percentage, noncontrolling owner The amount of termination fee paid by the non-terminating party. Business Combination, Termination Fee Termination fee The threshold period for entering into a competing proposal by the parties in a contract, from the termination of merger, within which if a proposal is entered, a termination fee would be payable by the party. Business Combination, Termination Fee, Threshold Period for Competing Proposal Termination fee, Threshold period for competing proposal The amount of fixed expense reimbursement amount to be paid by the non-terminating party, if the merger agreement is terminated by a party as a result of the other party's failure to obtain stockholder approval, or is terminated by a party due to the other party's breach of the merger agreement that would result in a failure of an applicable closing condition (subject to the applicable cure period set forth in the merger agreement). Business Combination, Fixed Expense Reimbursement Amount Fixed expense reimbursement amount