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  <xsd:element name="AxcelisTechnologiesIncMember" id="veco_AxcelisTechnologiesIncMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="BusinessCombinationTerminationFee" id="veco_BusinessCombinationTerminationFee" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="BusinessCombinationShareExchangeRatio" id="veco_BusinessCombinationShareExchangeRatio" type="xbrli:pureItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="NonTerminatingPartyAxcelisTechnologiesIncMember" id="veco_NonTerminatingPartyAxcelisTechnologiesIncMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="BusinessCombinationTerminationFeeThresholdPeriodForCompetingProposal" id="veco_BusinessCombinationTerminationFeeThresholdPeriodForCompetingProposal" type="xbrli:durationItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="BusinessCombinationFixedExpenseReimbursementAmount" id="veco_BusinessCombinationFixedExpenseReimbursementAmount" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="NonTerminatingPartyVeecoInstrumentsIncMember" id="veco_NonTerminatingPartyVeecoInstrumentsIncMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="SharesIssuedValueShareBasedPaymentArrangementRsaVestsGreaterThanRsuVests" id="veco_SharesIssuedValueShareBasedPaymentArrangementRsaVestsGreaterThanRsuVests" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="credit" />
  <xsd:element name="SharesIssuedSharesShareBasedPaymentArrangementRsaVestsGreaterThanRsuVests" id="veco_SharesIssuedSharesShareBasedPaymentArrangementRsaVestsGreaterThanRsuVests" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="ConvertibleSeniorNotesMember" id="veco_ConvertibleSeniorNotesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterTwoThroughThreeYearsAmortizedCost" id="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterTwoThroughThreeYearsAmortizedCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
  <xsd:element name="DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterTwoThroughThreeYearsFairValue" id="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterTwoThroughThreeYearsFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
  <xsd:element name="AccruedAcquisitionCosts" id="veco_AccruedAcquisitionCosts" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="credit" />
  <xsd:element name="MergersDisclosureAbstract" id="veco_MergersDisclosureAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="MergerTable" id="veco_MergerTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="MergerLineItems" id="veco_MergerLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="MergerDisclosureTextBlock" id="veco_MergerDisclosureTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
</xsd:schema>
