v3.26.1
Merger (Details)
3 Months Ended
Sep. 30, 2025
USD ($)
director
Mar. 31, 2026
USD ($)
Merger    
Acquisition related costs   $ 2,012,000
Axcelis Technologies, Inc    
Merger    
Ownership percentage, noncontrolling owner 41.60%  
Axcelis Technologies, Inc | Axcelis Technologies, Inc    
Merger    
Ownership percentage 58.40%  
Veeco Instruments Inc | Axcelis Technologies, Inc    
Merger    
Number of director who serves on the Axcelis board | director 1  
Share exchange ratio of new shares to be received 0.3575  
Termination fee, Threshold period for competing proposal 12 months  
Fixed expense reimbursement amount $ 15,000,000  
Acquisition related costs   $ 2,000,000
Veeco Instruments Inc | Axcelis Technologies, Inc | Non Terminating Party, Axcelis Technologies Inc    
Merger    
Termination fee 108,700,000  
Veeco Instruments Inc | Axcelis Technologies, Inc | Non-Terminating Party, Veeco Instruments Inc    
Merger    
Termination fee $ 77,500,000