3.26.1 html 167 303 1 false 56 0 false 8 false false R1.htm 995200090 - Document - Document and Entity Information Sheet http://www.veeco.com/role/DocumentDocumentAndEntityInformation Document and Entity Information Cover 1 false false R2.htm 995200100 - Statement - Consolidated Balance Sheets Sheet http://www.veeco.com/role/StatementConsolidatedBalanceSheets Consolidated Balance Sheets Statements 2 false false R3.htm 995200105 - Statement - Consolidated Balance Sheets (Parenthetical) Sheet http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical Consolidated Balance Sheets (Parenthetical) Statements 3 false false R4.htm 995200200 - Statement - Consolidated Statements of Operations Sheet http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations Consolidated Statements of Operations Statements 4 false false R5.htm 995200300 - Statement - Consolidated Statements of Comprehensive Income (Loss) Sheet http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss Consolidated Statements of Comprehensive Income (Loss) Statements 5 false false R6.htm 995200400 - Statement - Consolidated Statements of Cash Flows Sheet http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows Consolidated Statements of Cash Flows Statements 6 false false R7.htm 995210101 - Disclosure - Basis of Presentation Sheet http://www.veeco.com/role/DisclosureBasisOfPresentation Basis of Presentation Notes 7 false false R8.htm 995210201 - Disclosure - Income Per Common Share Sheet http://www.veeco.com/role/DisclosureIncomePerCommonShare Income Per Common Share Notes 8 false false R9.htm 995210301 - Disclosure - Assets Sheet http://www.veeco.com/role/DisclosureAssets Assets Notes 9 false false R10.htm 995210401 - Disclosure - Liabilities Sheet http://www.veeco.com/role/DisclosureLiabilities Liabilities Notes 10 false false R11.htm 995210501 - Disclosure - Commitments and Contingencies Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingencies Commitments and Contingencies Notes 11 false false R12.htm 995210601 - Disclosure - Equity Sheet http://www.veeco.com/role/DisclosureEquity Equity Notes 12 false false R13.htm 995210701 - Disclosure - Share-based Compensation Sheet http://www.veeco.com/role/DisclosureShareBasedCompensation Share-based Compensation Notes 13 false false R14.htm 995210801 - Disclosure - Income Taxes Sheet http://www.veeco.com/role/DisclosureIncomeTaxes Income Taxes Notes 14 false false R15.htm 995210901 - Disclosure - Segment Reporting and Geographic Information Sheet http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation Segment Reporting and Geographic Information Notes 15 false false R16.htm 995211001 - Disclosure - Merger Sheet http://www.veeco.com/role/DisclosureMerger Merger Notes 16 false false R17.htm 995410 - Disclosure - Pay vs Performance Disclosure Sheet http://xbrl.sec.gov/ecd/role/PvpDisclosure Pay vs Performance Disclosure Notes 17 false false R18.htm 995445 - Disclosure - Insider Trading Arrangements Sheet http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements Insider Trading Arrangements Notes 18 false false R19.htm 99920102 - Disclosure - Basis of Presentation (Policies) Sheet http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies Basis of Presentation (Policies) Policies 19 false false R20.htm 99930203 - Disclosure - Income Per Common Share (Tables) Sheet http://www.veeco.com/role/DisclosureIncomePerCommonShareTables Income Per Common Share (Tables) Tables http://www.veeco.com/role/DisclosureIncomePerCommonShare 20 false false R21.htm 99930303 - Disclosure - Assets (Tables) Sheet http://www.veeco.com/role/DisclosureAssetsTables Assets (Tables) Tables http://www.veeco.com/role/DisclosureAssets 21 false false R22.htm 99930403 - Disclosure - Liabilities (Tables) Sheet http://www.veeco.com/role/DisclosureLiabilitiesTables Liabilities (Tables) Tables http://www.veeco.com/role/DisclosureLiabilities 22 false false R23.htm 99930503 - Disclosure - Commitments and Contingencies (Tables) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables Commitments and Contingencies (Tables) Tables http://www.veeco.com/role/DisclosureCommitmentsAndContingencies 23 false false R24.htm 99930603 - Disclosure - Equity (Tables) Sheet http://www.veeco.com/role/DisclosureEquityTables Equity (Tables) Tables http://www.veeco.com/role/DisclosureEquity 24 false false R25.htm 99930703 - Disclosure - Share-based Compensation (Tables) Sheet http://www.veeco.com/role/DisclosureShareBasedCompensationTables Share-based Compensation (Tables) Tables http://www.veeco.com/role/DisclosureShareBasedCompensation 25 false false R26.htm 99930803 - Disclosure - Income Taxes (Tables) Sheet http://www.veeco.com/role/DisclosureIncomeTaxesTables Income Taxes (Tables) Tables http://www.veeco.com/role/DisclosureIncomeTaxes 26 false false R27.htm 99930903 - Disclosure - Segment Reporting and Geographic Information (Tables) Sheet http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables Segment Reporting and Geographic Information (Tables) Tables http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation 27 false false R28.htm 99940101 - Disclosure - Basis of Presentation - Fiscal Period (Details) Sheet http://www.veeco.com/role/DisclosureBasisOfPresentationFiscalPeriodDetails Basis of Presentation - Fiscal Period (Details) Details 28 false false R29.htm 99940201 - Disclosure - Income Per Common Share - Basic and Diluted (Details) Sheet http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails Income Per Common Share - Basic and Diluted (Details) Details 29 false false R30.htm 99940202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details) Sheet http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails Income Per Common Share - Shares Excluded from EPS (Details) Details 30 false false R31.htm 99940301 - Disclosure - Assets - Fair Value (Details) Sheet http://www.veeco.com/role/DisclosureAssetsFairValueDetails Assets - Fair Value (Details) Details 31 false false R32.htm 99940302 - Disclosure - Assets - Available-For-Sale Securities (Details) Sheet http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails Assets - Available-For-Sale Securities (Details) Details 32 false false R33.htm 99940303 - Disclosure - Assets - Accounts Receivable (Details) Sheet http://www.veeco.com/role/DisclosureAssetsAccountsReceivableDetails Assets - Accounts Receivable (Details) Details 33 false false R34.htm 99940304 - Disclosure - Assets - Inventories (Details) Sheet http://www.veeco.com/role/DisclosureAssetsInventoriesDetails Assets - Inventories (Details) Details 34 false false R35.htm 99940305 - Disclosure - Assets - Prepaid Expenses and Other Current Assets (Details) Sheet http://www.veeco.com/role/DisclosureAssetsPrepaidExpensesAndOtherCurrentAssetsDetails Assets - Prepaid Expenses and Other Current Assets (Details) Details 35 false false R36.htm 99940306 - Disclosure - Assets - Property, Plant, and Equipment (Details) Sheet http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails Assets - Property, Plant, and Equipment (Details) Details 36 false false R37.htm 99940307 - Disclosure - Assets - Goodwill (Details) Sheet http://www.veeco.com/role/DisclosureAssetsGoodwillDetails Assets - Goodwill (Details) Details 37 false false R38.htm 99940308 - Disclosure - Assets - Intangible Assets (Details) Sheet http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails Assets - Intangible Assets (Details) Details 38 false false R39.htm 99940401 - Disclosure - Liabilities - Accrued Expenses and Other Current Liabilities (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails Liabilities - Accrued Expenses and Other Current Liabilities (Details) Details 39 false false R40.htm 99940402 - Disclosure - Liabilities - Warranty (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails Liabilities - Warranty (Details) Details 40 false false R41.htm 99940403 - Disclosure - Liabilities - Contract Liabilities (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesContractLiabilitiesDetails Liabilities - Contract Liabilities (Details) Details 41 false false R42.htm 99940404 - Disclosure - Liabilities - Performance Obligations Timing (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails Liabilities - Performance Obligations Timing (Details) Details 42 false false R43.htm 99940405 - Disclosure - Liabilities - 2025, 2027 and 2029 Convertible Senior Notes (Details) Notes http://www.veeco.com/role/DisclosureLiabilities20252027And2029ConvertibleSeniorNotesDetails Liabilities - 2025, 2027 and 2029 Convertible Senior Notes (Details) Details 43 false false R44.htm 99940406 - Disclosure - Liabilities - Convertible Senior Notes (Details) Notes http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails Liabilities - Convertible Senior Notes (Details) Details 44 false false R45.htm 99940407 - Disclosure - Liabilities - Convertible Senior Notes Carrying Value (Details) Notes http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails Liabilities - Convertible Senior Notes Carrying Value (Details) Details 45 false false R46.htm 99940408 - Disclosure - Liabilities - Convertible Senior Notes - Interest Expense (Details) Notes http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails Liabilities - Convertible Senior Notes - Interest Expense (Details) Details 46 false false R47.htm 99940409 - Disclosure - Liabilities - Capped Call Transactions (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails Liabilities - Capped Call Transactions (Details) Details 47 false false R48.htm 99940410 - Disclosure - Liabilities - Revolving Credit Facility (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails Liabilities - Revolving Credit Facility (Details) Details 48 false false R49.htm 99940411 - Disclosure - Liabilities - Other Liabilities (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails Liabilities - Other Liabilities (Details) Details 49 false false R50.htm 99940501 - Disclosure - Commitments and Contingencies - Lease terms (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails Commitments and Contingencies - Lease terms (Details) Details 50 false false R51.htm 99940502 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails Commitments and Contingencies - Minimum lease commitments (Details) Details 51 false false R52.htm 99940503 - Disclosure - Commitments and Contingencies - Lease costs (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails Commitments and Contingencies - Lease costs (Details) Details 52 false false R53.htm 99940504 - Disclosure - Commitments and Contingencies - Receivable Purchase Agreement (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails Commitments and Contingencies - Receivable Purchase Agreement (Details) Details 53 false false R54.htm 99940505 - Disclosure - Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details) Details 54 false false R55.htm 99940601 - Disclosure - Equity - Statement of Stockholders' Equity (Details) Sheet http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails Equity - Statement of Stockholders' Equity (Details) Details 55 false false R56.htm 99940602 - Disclosure - Equity - AOCI Rollforward (Details) Sheet http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails Equity - AOCI Rollforward (Details) Details 56 false false R57.htm 99940701 - Disclosure - Share-based Compensation - Recognized Share-based Compensation (Details) Sheet http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails Share-based Compensation - Recognized Share-based Compensation (Details) Details 57 false false R58.htm 99940702 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details) Sheet http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails Share-based Compensation - Restricted shares and performance shares (Details) Details 58 false false R59.htm 99940801 - Disclosure - Income Taxes (Details) Sheet http://www.veeco.com/role/DisclosureIncomeTaxesDetails Income Taxes (Details) Details http://www.veeco.com/role/DisclosureIncomeTaxesTables 59 false false R60.htm 99940901 - Disclosure - Segment Reporting and Geographic Information (Details) Sheet http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails Segment Reporting and Geographic Information (Details) Details http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables 60 false false R61.htm 99941001 - Disclosure - Merger (Details) Sheet http://www.veeco.com/role/DisclosureMergerDetails Merger (Details) Details http://www.veeco.com/role/DisclosureMerger 61 false false All Reports Book All Reports veco-20260331.xsd veco-20260331_cal.xml veco-20260331_def.xml veco-20260331_lab.xml veco-20260331_pre.xml veco-20260331x10q.htm http://fasb.org/us-gaap/2025 http://xbrl.sec.gov/dei/2025 http://xbrl.sec.gov/ecd/2025 true true