<?xml version="1.0" encoding="US-ASCII"?>
<!-- DFIN New ActiveDisclosure (SM) XBRL Schema Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date :2026-04-06T12:25:10.1612+00:00 -->
<!-- Copyright (c) 2026 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
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  <xsd:element id="onto_ChangeInFairValueOfPriorYearAwardsThatAreOutstandingAndUnvestedMember" name="ChangeInFairValueOfPriorYearAwardsThatAreOutstandingAndUnvestedMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_YearEndValueOfAwardsGrantedInFiscalYearThatAreUnvestedAndOutstandingMember" name="YearEndValueOfAwardsGrantedInFiscalYearThatAreUnvestedAndOutstandingMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
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  <xsd:element id="onto_NetIncomeTotalRevenueFootnote" name="NetIncomeTotalRevenueFootnote" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="onto_ChangeInFairValueFromPriorYearEndOfPriorYearAwardsThatVestedThisYearMember" name="ChangeInFairValueFromPriorYearEndOfPriorYearAwardsThatVestedThisYearMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_PensionServiceCostAndImpactOfPensionPlanAdjustmentsMember" name="PensionServiceCostAndImpactOfPensionPlanAdjustmentsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_ChangeInPensionValueAndNonQualifiedDeferredCompensationEarningsMember" name="ChangeInPensionValueAndNonQualifiedDeferredCompensationEarningsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_PriorYearFairValueOfPriorYearAwardsThatFailedToVestThisYearMember" name="PriorYearFairValueOfPriorYearAwardsThatFailedToVestThisYearMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_ValueOfStockAndOptionAwardsInSummaryCompensationTableMember" name="ValueOfStockAndOptionAwardsInSummaryCompensationTableMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="onto_TsrBasedPsuVestedFootnote" name="TsrBasedPsuVestedFootnote" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="onto_FMVOfAwardsGrantedThisYearAndThatVestedThisYearMember" name="FMVOfAwardsGrantedThisYearAndThatVestedThisYearMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
</xsd:schema>
