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2023-01-01 2023-12-31 0001113232 ecd:YrEndFrValOfEqtyAwrdsGrntdInCvrdYrOutsdngAndUnvstdMember ecd:NonPeoNeoMember 2022-01-01 2022-12-31 0001113232 ecd:ChngInFrValOfOutsdngAndUnvstdEqtyAwrdsGrntdInPrrYrsMember ecd:NonPeoNeoMember 2022-01-01 2022-12-31 0001113232 ecd:ChngInFrValAsOfVstngDtOfPrrYrEqtyAwrdsVstdInCvrdYrMember ecd:NonPeoNeoMember 2022-01-01 2022-12-31 0001113232 ecd:YrEndFrValOfEqtyAwrdsGrntdInCvrdYrOutsdngAndUnvstdMember ecd:NonPeoNeoMember 2021-01-01 2021-12-31 0001113232 ecd:ChngInFrValOfOutsdngAndUnvstdEqtyAwrdsGrntdInPrrYrsMember ecd:NonPeoNeoMember 2021-01-01 2021-12-31 0001113232 ecd:ChngInFrValAsOfVstngDtOfPrrYrEqtyAwrdsVstdInCvrdYrMember ecd:NonPeoNeoMember 2021-01-01 2021-12-31 0001113232 1 2025-01-01 2025-12-31 0001113232 2 2025-01-01 2025-12-31 0001113232 3 2025-01-01 2025-12-31 0001113232 4 2025-01-01 2025-12-31 iso4217:USD pure Axcelis Technologies, Inc. true <div style="text-indent:32pt; margin-top:8pt; width:456pt; line-height:12.5pt;"> <span style="letter-spacing:0.55pt;">It is the Compensation Committee’s general practice to approve equity awards with a future effective date, usually the 15</span><span style=" position:relative; bottom:4.75pt;font-size:8.5pt;letter-spacing:0.425pt;">th</span><span style="letter-spacing:0.55pt;"> (or the next succeeding trading day) of a month following the approval, with annual equity grants approved in February and made in May. The Company believes that this time period between the approval and effectiveness of an equity grant means that the Compensation Committee is unable to know or estimate the trading price of the Company’s common stock on the effective date of grant. As a result, the Compensation Committee has not, to date, thought it necessary </span> </div><div style="width:456pt; line-height:12.5pt;"> <span style="letter-spacing:0.55pt;">to adopt a policy of timing the approval or effectiveness of equity awards to specific dates following the release of financial results or other material information.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.22pt;"> </span> </div> <span style="letter-spacing:0.55pt;">It is the Compensation Committee’s general practice to approve equity awards with a future effective date, usually the 15</span><span style=" position:relative; bottom:4.75pt;font-size:8.5pt;letter-spacing:0.425pt;">th</span> (or the next succeeding trading day) of a month following the approval, with annual equity grants approved in February and made in May. The Company believes that this time period between the approval and effectiveness of an equity grant means that the Compensation Committee is unable to know or estimate the trading price of the Company’s common stock on the effective date of grant. true false <div style="margin-top:6pt;margin-left:69.66pt;width:456pt;"> <div style="text-align:center; width:456pt; line-height:13pt;font-weight:bold;font-size:11pt;">Pay Versus Performance<span style="font-weight:normal;font-family:Times New Roman, Times, serif ;letter-spacing:0.22pt;"> </span></div> <div style="text-indent:32pt; margin-top:8pt; width:456pt; line-height:13.5pt;font-style:italic;font-size:11pt;">Note: In accordance with an instruction to the SEC regulation under which this Pay Versus Performance information is provided (Regulation S-K, Item 407(v)), this Pay Versus Performance information shall not be deemed to be incorporated by reference into any filing under the Securities Act of 1933, as amended, or the Securities Exchange Act of 1934, as amended. Specifically, this Pay Versus Performance information is not included in the executive compensation information incorporated by reference into Part III of the Company’s Form 10-K.<span style="font-style:normal;font-family:Times New Roman, Times, serif ;letter-spacing:0.22pt;"> </span></div> <div style="text-indent:32pt; margin-top:8pt; width:456pt; line-height:13.5pt;font-size:11pt;"> <span style="letter-spacing:0.55pt;">The Pay Versus Performance table below compares the total compensation amounts shown in the Summary Compensation Table in this and our prior four proxy statements to compensation “actually paid” to Dr. Low, who served as our CEO and principal executive officer (“PEO”) in 2025. The table also provides the same information as an average for the non-CEO NEOs specified in this proxy statement for 2025; the non-CEO NEOs named in our 2025 proxy statement for 2024; the non-CEO NEOs named in our 2024 proxy statement for 2023; and the non-CEO NEOs named in our 2023 proxy statement for 2022 and 2021. The “actually paid” amounts in the Pay Versus Performance table reflect a re-valuation of equity awards granted to our PEO and other NEOs. SEC regulations instruct us to back out the grant date fair value of equity awards that is used in the Summary Compensation Table and replace it with values for unvested equity awards at each year end and values for shares on each vest date. The “actually paid” amounts also reflect the achievement of specific operational goals on the PRSUs granted to executives, which, in 2021, 2022, 2023, 2024, and 2025, increased the number of shares subject to those PRSUs. Accordingly, the “actually paid” compensation is an alternative way of calculating the value for executive equity awards that uses the stock price at year end for unvested grants and at vest dates for those that vest in the year, instead of the stock price at grant for only those awards newly granted in the year. For employees that have served for more than the current year, the “actually paid” values will almost always be higher because they include values for all prior grants, not just the current year. The Summary Compensation Table already incorporates the value of the cash incentive paid for each year, so that performance-related compensation component is unchanged in the “actually paid” amounts in the table.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.22pt;"> </span></div> <table style="width:456pt;height:174.52pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:9.43pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:5pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:24pt;text-align:left;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="10" style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:0pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="10" style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:0pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="10" style="background:#4E6080;padding:3.547pt 0pt 2.328pt 0pt; width:0pt;"> <div style="text-align:center; line-height:9.44pt;">Value of Initial Fixed $100 <br/>Investment made on <br/>December 31, 2020, <br/>based on: </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="10" style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:0pt;">​</td> <td style="padding:0pt;background:#4E6080; width:5pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:5pt;">​</td> <td style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt; width:24pt;"> <div style="white-space:nowrap;">Year </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt;"> <div style="line-height:9.44pt;">Summary <br/>Compensation <br/>Table Total <br/>for PEO </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt;"> <div style="line-height:9.44pt;">Compensation <br/>Actually <br/>Paid (“CAP”) <br/>to PEO </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt;"> <div style="line-height:9.44pt;">Average <br/>Summary <br/>Compensation <br/>Table Total <br/>for Non-PEO <br/>NEOs </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt;"> <div style="line-height:9.44pt;">Average <br/>CAP to <br/>Non-PEO <br/>NEOs </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt;"> <div style="line-height:9.44pt;">Total <br/>Shareholder <br/>Return </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt;"> <div style="line-height:9.44pt;">Peer Group <br/>Total <br/>Shareholder <br/>Return </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt;"> <div style="white-space:nowrap;">Net Income </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 0.5pt 0pt;"> <div style="white-space:nowrap;">Revenues </div> </td> <td style="padding:0pt;background:#4E6080; width:5pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:5pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt; width:24pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(a)(1) </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(c)(2) </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(d) </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(e)(4) </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(f) </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(g)(4) </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(h) </div> </td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td style="padding:0pt;background:#4E6080; width:4.09pt;">​</td> <td colspan="4" style="background:#4E6080;padding:0pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-6pt;">(i) </div> </td> <td style="padding:0pt;background:#4E6080; width:5pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:5pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; width:24pt;text-align:left;">2025 </td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,100,394</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">6,438,448</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,566,406</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,945,703</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">275.89</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">253.38</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:30pt; text-align:right; white-space:nowrap;">120,238,000</td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:34.5pt; text-align:right; white-space:nowrap;">839,048,000</td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:0pt; width:5pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:5pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:24pt;text-align:left;">2024 </td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">4,293,508</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,618,794</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,282,936</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">742,827</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">289.92</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">269.24</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:30pt; text-align:right; white-space:nowrap;">200,992,000 </td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:34.5pt; text-align:right; white-space:nowrap;">1,017,865,000 </td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:0pt; width:5pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:5pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:24pt;text-align:left;">2023 </td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">4,135,438</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">6,510,602</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,258,904</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,141,924</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">538.13</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">225.75</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:30pt; text-align:right; white-space:nowrap;">246,263,000</td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:34.5pt; text-align:right; white-space:nowrap;">1,130,604,000</td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:0pt; width:5pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:5pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:24pt;text-align:left;">2022 </td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,461,805</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,751,594</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,463,285</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,728,963</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">329.34</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">137.05</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:30pt; text-align:right; white-space:nowrap;">183,079,000 </td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:34.5pt; text-align:right; white-space:nowrap;">919,998,000 </td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:0pt; width:5pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:5pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; width:24pt;text-align:left;">2021 </td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,423,579</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,663,680</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,405,289</td> <td style="padding:0pt;padding-left:10.525pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,648,869</td> <td style="padding:0pt;padding-left:4.68pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">309.38</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:16.5pt; text-align:right; white-space:nowrap;">213.35</td> <td style="padding:0pt;padding-left:10.52pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:30pt; text-align:right; white-space:nowrap;">98,650,000</td> <td style="padding:0pt;padding-left:5.73pt;width:0pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt; width:4.09pt;">​</td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:34.5pt; text-align:right; white-space:nowrap;">662,428,000</td> <td style="padding:0pt;padding-left:6.5pt;width:0pt;">​</td> <td style="padding:0pt; width:5pt;">​</td> </tr> </table> <div style="margin-top:11.31pt; width:456pt;"> <div style="margin-left: 0pt; width: 120pt; margin-top: 0pt; font-size: 1pt; line-height: 0pt; border-bottom: 1pt solid #000000; ">​</div> </div> <div style=" float:left; margin-top:10.19pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;">(1)<br/></div> <div style=" margin-top:10.19pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The non-PEO NEOs reported for the year 2025 are the five NEOs identified in this proxy statement, other than Dr. Low: James G. Coogan, Eileen J. Evans, Gregory F. Redinbo, Christopher J. Tatnall, and Gerald M. Blumenstock. The non-PEO NEOs reported for the year 2024 are the same as the NEOs identified in this proxy statement, other than Ms. Evans. The non-PEOs reported for the year 2023 are the NEOs identified in our 2024 proxy statement, other than Dr. Low and Mary G. Puma, our former CEO: Mr. Coogan, Kevin J. Brewer, Lynnette C. Fallon, Dr. Redinbo, and Mr. Blumenstock. The non-PEOs reported for the years 2022 and 2021 are the NEOs identified in our 2023 proxy statement (the first year for which this report was provided), other than Ms. Puma: Mr. Brewer, Dr. Low, Ms. Fallon, and Douglas A. Lawson.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div> </div><div style="margin-top:6pt;margin-left:69.66pt;width:456pt;"> <div style=" float:left; line-height:10pt; text-align:left; width:32pt;white-space:nowrap;">(2)<br/></div> <div style=" line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">In accordance with SEC rules, the following adjustments were made to Dr. Low’s total compensation for each year to determine </span>CAP:<span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span></div> <div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div> <table style="width:456pt;height:121.49pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:7.98pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:155.55pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="22" style="background:#4E6080;padding:5.048pt 0pt 2.812pt 0pt; width:0pt;text-align:center;"> <div style="white-space:nowrap; text-align:center;">Footnote (2) —Table 1 </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt; width:155.55pt;"> <div style="white-space:nowrap;">Year </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Reported Summary<br/>Compensation Table <br/>Total for PEO </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Reported Value of <br/>Equity Awards </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Equity Award<br/>Adjustments </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Compensation<br/>Actually Paid to PEO </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.98pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt; width:155.55pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(a) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(c)(i) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(d)(ii) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(e) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.98pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; width:155.55pt;text-align:left;">2025 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,100,394</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,852,701</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,190,755</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">6,438,448</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:155.55pt;text-align:left;">2024 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">4,293,508</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,217,435</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">542,721</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,618,794</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:155.55pt;text-align:left;">2023 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">4,135,438</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,076,368</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,451,531</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">6,510,602</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:155.55pt;text-align:left;">2022 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,461,805</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">663,254</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">953,044</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,751,594</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:155.55pt;text-align:left;">2021 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,423,579</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">622,771</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,862,872</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,663,680</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> </table> <div style="margin-top:11.31pt; width:456pt;"> <div style="margin-left: 0pt; width: 120pt; margin-top: 0pt; font-size: 1pt; line-height: 0pt; border-bottom: 1pt solid #000000; ">​</div> </div> <div style=" float:left; margin-top:9.2pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;"> <span style="letter-spacing:0.4pt;">(i)</span> <br/> </div> <div style=" margin-top:9.2pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The grant date fair value of equity awards in column (c) of Footnote (2)—Table 1 represents the total of the amounts reported in the “Stock Awards” and “Option Awards” columns in the Summary Compensation Table for the applicable year.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div> <div style=" float:left; line-height:10pt; margin-top:4.19pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;"> <span style="letter-spacing:0.4pt;">(ii)</span> <br/> </div> <div style=" margin-top:4.19pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The equity award adjustments in column (d) of Footnote (2)—Table 1 include the addition (or subtraction, as applicable) of the following: (1) the year-end fair value of any equity awards granted in the applicable year that are outstanding and unvested as of the end of the year; (2) the amount of change as of the end of the applicable year (from the end of the prior fiscal year) in fair value of any awards granted in prior years that are outstanding and unvested as of the end of the applicable year; and (3) for awards granted in prior years that vest in the applicable year, the amount equal to the change as of the vesting date (from the end of the prior fiscal year) in fair value. None of the years shown had any (A) awards granted and vested in same applicable year; (B) awards granted in prior years that were determined to fail to meet the applicable vesting conditions during the applicable year; or (C) dividends or other earnings paid on stock or option awards in the applicable year prior to the vesting date. The valuation assumptions used to calculate fair values did not materially differ from those disclosed at the time of grant. The amounts deducted or added in calculating the equity award adjustments are as follows:</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div> <table style="width:456pt;height:130.93pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:99.77pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="22" style="background:#4E6080;padding:5.048pt 0pt 2.812pt 0pt; width:0pt;text-align:center;"> <div style="white-space:nowrap; text-align:center;">Footnote (2) —Table 2 </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt; width:99.77pt;"> <div style="white-space:nowrap;">Year </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year End Fair Value of <br/>Equity Awards Granted <br/>in the Year </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year over Year Change in <br/>Fair Value of Outstanding <br/>and Unvested Equity <br/>Awards at Year End </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year over Year Change in <br/>Fair Value of Equity Awards <br/>Granted in Prior Years <br/>that Vested in the Year </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Total Equity Award <br/>Adjustments </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt; width:99.77pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(a) </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(c) </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(d) </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(e) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; width:99.77pt;text-align:left;">2025 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,247,668</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">302,012</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(358,926<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,190,755</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; width:99.77pt;text-align:left;">2024 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,254,775</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">(1,322,429<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(389,625<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">542,721</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:99.77pt;text-align:left;">2023 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,662,744</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">785,807</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,002,980</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,451,531</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:99.77pt;text-align:left;">2022 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,097,108</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">105,066</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(249,130<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">953,044</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:99.77pt;text-align:left;">2021 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,521,024</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">1,108,418</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">233,430</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,862,872</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> </table> <div style="margin-top:11.31pt; width:456pt;"> <div style="margin-left: 0pt; width: 120pt; margin-top: 0pt; font-size: 1pt; line-height: 0pt; border-bottom: 1pt solid #000000; ">​</div> </div> <div style=" float:left; margin-top:9.2pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;">(3)<br/></div> <div style=" margin-top:9.2pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">In accordance with SEC rules, the following adjustments were made to average total compensation for the non-PEO NEOs as a group for each year to determine CAP, using the same methodology described above in Footnote 2:</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div> <table style="width:456pt;height:130.92pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:114.76pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="22" style="background:#4E6080;padding:5.048pt 0pt 2.812pt 0pt; width:0pt;text-align:center;"> <div style="white-space:nowrap; text-align:center;">Footnote (3) —Table 1 </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt; width:114.76pt;"> <div style="white-space:nowrap;">Year</div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Reported <br/>Summary Compensation <br/>Table Total for <br/>Non-PEO NEOs </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Reported Value <br/>of Equity Awards </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Equity <br/>Award Adjustments </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Compensation <br/>Actually Paid to <br/>Non-PEO NEOs </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt; width:114.76pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(a) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(c)(i) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(d)(ii) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(e) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2025 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,566,406</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">950,353</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,329,651</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,945,703</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2024 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,282,936</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">750,769</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">210,659</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">742,827</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2023 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,258,904</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">673,331</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,556,352</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,141,924</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2022 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,463,285</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">639,377</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">905,055</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,728,963</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2021 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,405,289</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">600,314</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,843,894</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,648,869</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> </table> <div style="margin-top:11.31pt; width:456pt;"> <div style="margin-left: 0pt; width: 120pt; margin-top: 0pt; font-size: 1pt; line-height: 0pt; border-bottom: 1pt solid #000000; ">​</div> </div> <div style=" float:left; margin-top:9.3pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;"> <span style="letter-spacing:0.4pt;">(i)</span> <br/> </div> <div style=" margin-top:9.3pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The grant date fair value of equity awards in column (c) of Footnote (4)—Table 1 represents the average of the total of the </span> </div> <div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div> </div><div style="margin-left:32pt; width:424pt; line-height:10pt;"> <span style="letter-spacing:0.4pt;">amounts reported in the “Stock Awards” and “Option Awards” columns for each non-PEO NEO in the Summary Compensation Table for the applicable year.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style=" float:left; line-height:10pt; margin-top:4pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;"> <span style="letter-spacing:0.4pt;">(ii)</span> <br/> </div> <div style=" margin-top:4pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The amounts deducted or added in calculating the average equity award adjustments are as follows:</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div> <table style="width:456pt;height:140.36pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:7.98pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:105.24pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="22" style="background:#4E6080;padding:2.513pt 0pt 2.812pt 0pt; width:0pt;text-align:center;"> <div style="white-space:nowrap; text-align:center;">Footnote (3) —Table 2 </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt; width:105.24pt;"> <div style="white-space:nowrap;">Year </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Year End Fair <br/>Value of Equity Awards <br/>Granted in the Year </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year over Year Average <br/>Change in Fair Value <br/>of Outstanding and Unvested <br/>Equity Awards at Year End </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year over Year Average <br/>Change in Fair Value <br/>of Equity Awards Granted <br/>in Prior Years that <br/>Vested in the Year </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Total Average Equity <br/>Award Adjustments </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> </tr> <tr style="line-height:7.98pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt; width:105.24pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(a) </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(c) </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(d) </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(e) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2025 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,294,452</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(38,241<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">73,439</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,329,651</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2024 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">580,576</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(273,412<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">(96,504<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">210,659</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2023 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">677,608</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">292,321</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">586,423</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,556,352</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2022 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,057,612</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">103,466</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">(256,024<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">905,055</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2021 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,466,176</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,138,403</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">239,315</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,843,894</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> </table> <div style="margin-top:8.11pt; width:456pt;"> <div style="margin-left: 0pt; width: 120pt; margin-top: 0pt; font-size: 1pt; line-height: 0pt; border-bottom: 1pt solid #000000; ">​</div> </div> <div style=" float:left; margin-top:9pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;">(4)<br/></div> <div style=" margin-top:9pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The Peer Group used in this chart is the Philadelphia Semiconductor Index (SOXX) which is also used in the Company’s stock performance graph provided under Item 201(e) of Regulation S-K in our annual report to stockholders.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div> <div style="text-indent:32pt; margin-top:8pt; width:456pt; line-height:13pt;font-size:11pt;"> <span style="letter-spacing:0.55pt;">In 2025, as shown in the Pay Versus Performance table, the compensation “actually paid” (“CAP”) to our PEO and average other NEOs is higher than the respective amounts shown in the Summary Compensation Table, primarily due to the fact that the price of the common stock was higher at year end 2025 than at year end 2024 and at the May 2025 grant date, which increase in value was offset by a slightly lower stock price at the May 2025 vesting dates in comparison to the price at year end 2025. The Company also outperformed on the five year (2021-2025) cumulative shareholder return in comparison to that of the SOXX Index.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.22pt;"> </span> </div> <div style="text-indent:32pt; margin-top:8pt; width:456pt; line-height:13pt;font-size:11pt;"> <span style="letter-spacing:0.55pt;">The 2025 CAP to our PEO and average other NEOs does not have an intentional relationship with the Company’s five year cumulative total shareholder return, or the last five years of the Company’s net income or revenue. This is because the Company sets executive compensation based on peer information and market data, as discussed in the Compensation Discussion and Analysis above, and not on specific financial performance metrics. Financial results do impact the payouts under the Company’s cash incentive plan, but that is only a portion of the total executive compensation. In addition, the cash incentive payouts result from a comparison of the current year’s performance to a profit plan for the year and are not based on performance over a five year period.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.22pt;"> </span> </div> Revenues 5100394 6438448 1566406 1945703 275.89 253.38 120238000 839048000 4293508 1618794 1282936 742827 289.92 269.24 200992000 1017865000 4135438 6510602 1258904 2141924 538.13 225.75 246263000 1130604000 1461805 1751594 1463285 1728963 329.34 137.05 183079000 919998000 1423579 3663680 1405289 3648869 309.38 213.35 98650000 662428000 <div style=" float:left; margin-top:10.19pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;">(1)<br/></div><div style=" margin-top:10.19pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The non-PEO NEOs reported for the year 2025 are the five NEOs identified in this proxy statement, other than Dr. Low: James G. Coogan, Eileen J. Evans, Gregory F. Redinbo, Christopher J. Tatnall, and Gerald M. Blumenstock. The non-PEO NEOs reported for the year 2024 are the same as the NEOs identified in this proxy statement, other than Ms. Evans. The non-PEOs reported for the year 2023 are the NEOs identified in our 2024 proxy statement, other than Dr. Low and Mary G. Puma, our former CEO: Mr. Coogan, Kevin J. Brewer, Lynnette C. Fallon, Dr. Redinbo, and Mr. Blumenstock. The non-PEOs reported for the years 2022 and 2021 are the NEOs identified in our 2023 proxy statement (the first year for which this report was provided), other than Ms. Puma: Mr. Brewer, Dr. Low, Ms. Fallon, and Douglas A. Lawson.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style=" float:left; line-height:10pt; text-align:left; width:32pt;white-space:nowrap;">(2)<br/></div><div style=" line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">In accordance with SEC rules, the following adjustments were made to Dr. Low’s total compensation for each year to determine </span>CAP:<span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span></div><div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div><table style="width:456pt;height:121.49pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:7.98pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:155.55pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="22" style="background:#4E6080;padding:5.048pt 0pt 2.812pt 0pt; width:0pt;text-align:center;"> <div style="white-space:nowrap; text-align:center;">Footnote (2) —Table 1 </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt; width:155.55pt;"> <div style="white-space:nowrap;">Year </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Reported Summary<br/>Compensation Table <br/>Total for PEO </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Reported Value of <br/>Equity Awards </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Equity Award<br/>Adjustments </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Compensation<br/>Actually Paid to PEO </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.98pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt; width:155.55pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(a) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(c)(i) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(d)(ii) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(e) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.98pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; width:155.55pt;text-align:left;">2025 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,100,394</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,852,701</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,190,755</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">6,438,448</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:155.55pt;text-align:left;">2024 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">4,293,508</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,217,435</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">542,721</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,618,794</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:155.55pt;text-align:left;">2023 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">4,135,438</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,076,368</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,451,531</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">6,510,602</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:155.55pt;text-align:left;">2022 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,461,805</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">663,254</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">953,044</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,751,594</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:155.55pt;text-align:left;">2021 </td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,423,579</td> <td style="padding:0pt;padding-left:20.52pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">622,771</td> <td style="padding:0pt;padding-left:16.695pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,862,872</td> <td style="padding:0pt;padding-left:8.825pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,663,680</td> <td style="padding:0pt;padding-left:20.185pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> </table><div style=" float:left; margin-top:9.2pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;"> <span style="letter-spacing:0.4pt;">(i)</span> <br/> </div><div style=" margin-top:9.2pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The grant date fair value of equity awards in column (c) of Footnote (2)—Table 1 represents the total of the amounts reported in the “Stock Awards” and “Option Awards” columns in the Summary Compensation Table for the applicable year.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div><div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div><div style=" float:left; line-height:10pt; margin-top:4.19pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;"> <span style="letter-spacing:0.4pt;">(ii)</span> <br/> </div><div style=" margin-top:4.19pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The equity award adjustments in column (d) of Footnote (2)—Table 1 include the addition (or subtraction, as applicable) of the following: (1) the year-end fair value of any equity awards granted in the applicable year that are outstanding and unvested as of the end of the year; (2) the amount of change as of the end of the applicable year (from the end of the prior fiscal year) in fair value of any awards granted in prior years that are outstanding and unvested as of the end of the applicable year; and (3) for awards granted in prior years that vest in the applicable year, the amount equal to the change as of the vesting date (from the end of the prior fiscal year) in fair value. None of the years shown had any (A) awards granted and vested in same applicable year; (B) awards granted in prior years that were determined to fail to meet the applicable vesting conditions during the applicable year; or (C) dividends or other earnings paid on stock or option awards in the applicable year prior to the vesting date. The valuation assumptions used to calculate fair values did not materially differ from those disclosed at the time of grant. The amounts deducted or added in calculating the equity award adjustments are as follows:</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div><div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div><table style="width:456pt;height:130.93pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:99.77pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="22" style="background:#4E6080;padding:5.048pt 0pt 2.812pt 0pt; width:0pt;text-align:center;"> <div style="white-space:nowrap; text-align:center;">Footnote (2) —Table 2 </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt; width:99.77pt;"> <div style="white-space:nowrap;">Year </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year End Fair Value of <br/>Equity Awards Granted <br/>in the Year </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year over Year Change in <br/>Fair Value of Outstanding <br/>and Unvested Equity <br/>Awards at Year End </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year over Year Change in <br/>Fair Value of Equity Awards <br/>Granted in Prior Years <br/>that Vested in the Year </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Total Equity Award <br/>Adjustments </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt; width:99.77pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(a) </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(c) </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(d) </div> </td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3.5pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.263pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(e) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; width:99.77pt;text-align:left;">2025 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,247,668</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">302,012</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(358,926<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.263pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,190,755</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; width:99.77pt;text-align:left;">2024 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,254,775</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">(1,322,429<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(389,625<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.513pt 0pt 2.097pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">542,721</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:99.77pt;text-align:left;">2023 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,662,744</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">785,807</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,002,980</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">5,451,531</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:99.77pt;text-align:left;">2022 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,097,108</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">105,066</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(249,130<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">953,044</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:99.77pt;text-align:left;">2021 </td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,521,024</td> <td style="padding:0pt;padding-left:24.94pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:26.25pt; text-align:right; white-space:nowrap;">1,108,418</td> <td style="padding:0pt;padding-left:26.525pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">233,430</td> <td style="padding:0pt;padding-left:31.085pt;width:0pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt; width:3.5pt;">​</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,862,872</td> <td style="padding:0pt;padding-left:18.19pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> </table> Dr. Low 5100394 -3852701 5190755 6438448 4293508 -3217435 542721 1618794 4135438 -3076368 5451531 6510602 1461805 -663254 953044 1751594 1423579 -622771 2862872 3663680 5247668 302012 -358926 5190755 2254775 -1322429 -389625 542721 3662744 785807 1002980 5451531 1097108 105066 -249130 953044 1521024 1108418 233430 2862872 <div style=" float:left; margin-top:9.2pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;">(3)<br/></div><div style=" margin-top:9.2pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">In accordance with SEC rules, the following adjustments were made to average total compensation for the non-PEO NEOs as a group for each year to determine CAP, using the same methodology described above in Footnote 2:</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div><div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div><table style="width:456pt;height:130.92pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:7.97999999999996pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:114.76pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="22" style="background:#4E6080;padding:5.048pt 0pt 2.812pt 0pt; width:0pt;text-align:center;"> <div style="white-space:nowrap; text-align:center;">Footnote (3) —Table 1 </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt; width:114.76pt;"> <div style="white-space:nowrap;">Year</div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Reported <br/>Summary Compensation <br/>Table Total for <br/>Non-PEO NEOs </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Reported Value <br/>of Equity Awards </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Equity <br/>Award Adjustments </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.287pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Compensation <br/>Actually Paid to <br/>Non-PEO NEOs </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> <td style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt; width:114.76pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(a) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(c)(i) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(d)(ii) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(e) </div> </td> <td style="padding:0pt;background:#4E6080; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2025 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,566,406</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">950,353</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,329,651</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,945,703</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2024 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,282,936</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">750,769</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">210,659</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">742,827</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2023 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,258,904</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">673,331</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,556,352</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,141,924</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2022 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,463,285</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">639,377</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">905,055</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,728,963</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> <tr style="line-height:7.98000000000002pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:6pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; width:114.76pt;text-align:left;">2021 </td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,405,289</td> <td style="padding:0pt;padding-left:27.245pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:19.5pt; text-align:right; white-space:nowrap;">600,314</td> <td style="padding:0pt;padding-left:29.155pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,843,894</td> <td style="padding:0pt;padding-left:19.415pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">3,648,869</td> <td style="padding:0pt;padding-left:25.055pt;width:0pt;">​</td> <td style="padding:0pt; width:6pt;">​</td> </tr> </table><div style=" float:left; margin-top:9.3pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;"> <span style="letter-spacing:0.4pt;">(i)</span> <br/> </div><div style=" margin-top:9.3pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The grant date fair value of equity awards in column (c) of Footnote (4)—Table 1 represents the average of the total of the </span> </div><div style="margin-left:32pt; width:424pt; line-height:10pt;"> <span style="letter-spacing:0.4pt;">amounts reported in the “Stock Awards” and “Option Awards” columns for each non-PEO NEO in the Summary Compensation Table for the applicable year.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div><div style=" float:left; line-height:10pt; margin-top:4pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;"> <span style="letter-spacing:0.4pt;">(ii)</span> <br/> </div><div style=" margin-top:4pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The amounts deducted or added in calculating the average equity award adjustments are as follows:</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div><div style="clear:both; padding:0pt; margin:0pt;font-size:0pt;line-height:0pt;">​</div><table style="width:456pt;height:140.36pt;margin-top:10pt;border-collapse: collapse;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <tr style="line-height:7.98pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="background:#4E6080;padding:0pt 0pt 0.5pt 0pt; width:105.24pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="22" style="background:#4E6080;padding:2.513pt 0pt 2.812pt 0pt; width:0pt;text-align:center;"> <div style="white-space:nowrap; text-align:center;">Footnote (3) —Table 2 </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> </tr> <tr style="line-height:9.43pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt; width:105.24pt;"> <div style="white-space:nowrap;">Year </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Average Year End Fair <br/>Value of Equity Awards <br/>Granted in the Year </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year over Year Average <br/>Change in Fair Value <br/>of Outstanding and Unvested <br/>Equity Awards at Year End </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Year over Year Average <br/>Change in Fair Value <br/>of Equity Awards Granted <br/>in Prior Years that <br/>Vested in the Year </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:2.297pt 0pt 2.328pt 0pt;"> <div style="line-height:9.44pt;">Total Average Equity <br/>Award Adjustments </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> </tr> <tr style="line-height:7.98pt;white-space:nowrap;text-align:left;vertical-align:bottom;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#FFFFFF;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> <td style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt; width:105.24pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(a) </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(b) </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(c) </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(d) </div> </td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td style="padding:0pt;background:#4E6080; width:2pt;">​</td> <td colspan="4" style="background:#4E6080;padding:1.253pt 0pt 2.812pt 0pt;"> <div style="white-space:nowrap;margin-top:-2pt;">(e) </div> </td> <td style="padding:0pt;background:#4E6080; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2025 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,294,452</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(38,241<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">73,439</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.253pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,329,651</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2024 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">580,576</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">(273,412<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">(96,504<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">210,659</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2023 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">677,608</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">292,321</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">586,423</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,556,352</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2022 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,057,612</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">103,466</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">(256,024<span style="position:absolute;">)</span></td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.503pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">905,055</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> <tr style="line-height:7.97999999999999pt;white-space:nowrap;text-align:center;vertical-align:bottom;font-style:normal;font-weight:normal;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:8pt;"> <td style="padding:0pt; width:3pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; width:105.24pt;text-align:left;">2021 </td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,466,176</td> <td style="padding:0pt;padding-left:25.105pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">1,138,403</td> <td style="padding:0pt;padding-left:34.02pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:21.75pt; text-align:right; white-space:nowrap;">239,315</td> <td style="padding:0pt;padding-left:29.255pt;width:0pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt; width:2pt;">​</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:3pt; text-align:right; ">$</td> <td style="padding:3.493pt 0pt 2.107pt 0pt; min-width:24pt; text-align:right; white-space:nowrap;">2,843,894</td> <td style="padding:0pt;padding-left:20.88pt;width:0pt;">​</td> <td style="padding:0pt; width:3pt;">​</td> </tr> </table> 1566406 -950353 1329651 1945703 1282936 -750769 210659 742827 1258904 -673331 1556352 2141924 1463285 -639377 905055 1728963 1405289 -600314 2843894 3648869 1294452 -38241 73439 1329651 580576 -273412 -96504 210659 677608 292321 586423 1556352 1057612 103466 -256024 905055 1466176 1138403 239315 2843894 <div style=" float:left; margin-top:9pt; margin-bottom:0pt; text-align:left; width:32pt;white-space:nowrap;">(4)<br/></div><div style=" margin-top:9pt; margin-bottom:0pt; line-height:10pt; text-align:left; margin-left:32pt;"> <span style="letter-spacing:0.4pt;">The Peer Group used in this chart is the Philadelphia Semiconductor Index (SOXX) which is also used in the Company’s stock performance graph provided under Item 201(e) of Regulation S-K in our annual report to stockholders.</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.16pt;"> </span> </div> <div style="text-indent:32pt; margin-top:8pt; width:456pt; line-height:13pt;font-size:11pt;"> <span style="letter-spacing:0.55pt;">The four most important financial measures that impact realized executive compensation at Axcelis are:</span><span style="font-family:Times New Roman, Times, serif ;letter-spacing:0.22pt;"> </span> </div> <table style="width:456pt;margin-top:10pt;border-collapse: collapse;border:0.75pt solid #000000; font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:10pt;"> <tr style="line-height:10pt;white-space:nowrap;text-align:center;vertical-align:top;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:10pt;"> <td style="width:0.25pt;padding:0pt;font-size:0pt;line-height:0pt;">​</td> <td style="padding:0pt;border-bottom:1px solid #000000; width:3pt;">​</td> <td colspan="7" style="border-bottom:1px solid #000000;padding:2.5pt 0pt 2.5pt 0pt; width:0pt;"> <div style="text-align:center;">Adjusted EBITDA</div> </td> <td style="padding:0pt;border-bottom:1px solid #000000; width:3pt;">​</td> <td style="width:0.25pt;padding:0pt;font-size:0pt;line-height:0pt;">​</td> </tr> <tr style="line-height:10pt;white-space:nowrap;text-align:center;vertical-align:top;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:10pt;"> <td style="width:0.25pt;padding:0pt;font-size:0pt;line-height:0pt;">​</td> <td style="padding:0pt;border-bottom:1px solid #000000; width:3pt;">​</td> <td colspan="7" style="border-bottom:1px solid #000000;padding:2.75pt 0pt 2.5pt 0pt; width:0pt;"> <div style="text-align:center;">Revenues</div> </td> <td style="padding:0pt;border-bottom:1px solid #000000; width:3pt;">​</td> <td style="width:0.25pt;padding:0pt;font-size:0pt;line-height:0pt;">​</td> </tr> <tr style="line-height:10pt;white-space:nowrap;text-align:center;vertical-align:top;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:10pt;"> <td style="width:0.25pt;padding:0pt;font-size:0pt;line-height:0pt;">​</td> <td style="padding:0pt;border-bottom:1px solid #000000; width:3pt;">​</td> <td colspan="7" style="border-bottom:1px solid #000000;padding:2.75pt 0pt 2.5pt 0pt; width:0pt;"> <div style="text-align:center;">Operating Profit</div> </td> <td style="padding:0pt;border-bottom:1px solid #000000; width:3pt;">​</td> <td style="width:0.25pt;padding:0pt;font-size:0pt;line-height:0pt;">​</td> </tr> <tr style="line-height:10pt;min-height:14.75pt;white-space:nowrap;text-align:center;vertical-align:top;font-style:normal;font-weight:bold;font-variant:normal;text-transform:none;color:#000000;font-family:Arial Narrow, Arial, Helvetica, sans-serif;font-size:10pt;"> <td style="width:0.25pt;padding:0pt;font-size:0pt;line-height:0pt;">​</td> <td style="padding:0pt;border-bottom:0.75pt solid #000000; ; width:3pt;">​</td> <td colspan="7" style="border-bottom:0.75pt solid #000000; ;padding:2.75pt 0pt 2.5pt 0pt; width:0pt;"> <div style="text-align:center;">Gross Margin</div> </td> <td style="padding:0pt;border-bottom:0.75pt solid #000000; ; width:3pt;">​</td> <td style="width:0.25pt;padding:0pt;font-size:0pt;line-height:0pt;">​</td> </tr> </table> <div style="text-indent:32pt; margin-top:7.5pt; width:456pt; line-height:13pt;font-size:11pt;"> <span style="letter-spacing:0.55pt;">We believe these measures have a significant influence on our stock price (which is the main differential between the Summary Compensation Table amounts and the “actually paid” amounts in the Pay Versus Performance Table), along with other measures considered by investors, such as net income and earnings per share. </span> </div> Adjusted EBITDA Revenues Operating Profit Gross Margin DEF 14A 0001113232 false