v3.26.1
Pay vs Performance Disclosure
 12 Months Ended 35 Months Ended 109 Months Ended
Dec. 31, 2025
USD ($)
Dec. 31, 2024
USD ($)
Dec. 31, 2023
USD ($)
Dec. 31, 2022
USD ($)
Dec. 31, 2021
USD ($)
Dec. 31, 2025
Feb. 01, 2023
Pay vs Performance Disclosure              
Pay vs Performance Disclosure, Table

Pay versus Performance

In accordance with rules adopted by the SEC pursuant to the Dodd-Frank Wall Street Reform and Consumer Protection Act of 2010, we have provided the following disclosure regarding executive compensation for our principal executive officers (“PEOs”) and Non-PEO NEOs, and Company performance for the fiscal years listed below.

Pay versus Performance Table

 

 

Summary
Compensation
Table Total

 

Summary
Compensation
Table Total

 

Compensation
Actually Paid

 

Compensation
Actually Paid

 

Average
Summary
Compensation
Table Total

 

Average
Compensation
Actually Paid

 

Value of Initial Fixed $100
Investment based on:4

 

 

 

 

Year

 

for First
PEO1
($)

 

for Second
PEO1 
($)

 

to First
PEO1,2,3
($)

 

to Second
PEO1,2,3
($)

 

for Non-PEO
NEOs1 
($)

 

to Non-PEO
NEOs1,2,3
($)

 

TSR
($)

 

Peer Group
TSR
($)

 

Net Income
($ Millions)

 

PBIT⁵

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

2025

 

 

—

 

 

14,107,588

 

 

—

 

 

41,136,477

 

 

4,891,214

 

 

9,105,456

 

 

164.67

 

 

258.77

 

 

554.0

 

22.2%

2024

 

 

—

 

 

11,760,656

 

 

—

 

 

17,078,109

 

 

2,936,103

 

 

4,001,320

 

 

188.52

 

 

247.21

 

 

542.4

 

20.4%

2023

 

 

6,258,433

 

 

10,110,437

 

 

3,226,601

 

 

10,526,155

 

 

3,180,514

 

 

3,464,712

 

 

161.83

 

 

256.87

 

 

448.8

 

20.0%

2022

 

 

10,601,249

 

 

—

 

 

(16,408,806

)

 

—

 

 

2,665,821

 

 

(1,673,638

)

 

129.70

 

 

161.36

 

 

715.5

 

28.0%

2021

 

 

10,954,713

 

 

—

 

 

37,477,207

 

 

—

 

 

2,495,173

 

 

6,687,782

 

 

241.76

 

 

246.09

 

 

1,014.6

 

33.0%

 

(1)
Mark E. Jagiela was our PEO from 2014 to February 1, 2023 (First PEO). Gregory S. Smith has been our PEO since February 1, 2023 (Second PEO). The individuals comprising the Non-PEO NEOs for each year presented are listed below.

 

2021

2022

2023

2024

2025

Gregory S. Smith

Gregory S. Smith

Sanjay Mehta

Sanjay Mehta

Sanjay Mehta

Sanjay Mehta

Sanjay Mehta

Charles J. Gray

Ryan Driscoll

Ryan Driscoll

Charles J. Gray

Charles J. Gray

Richard J. Burns

Richard J. Burns

Michelle Turner

Bradford B. Robbins

Richard J. Burns

Ujjwal Kumar

Ujjwal Kumar

Regan Mills

 

 

 

 

Shannon Poulin

 

(2)
The amounts shown for Compensation Actually Paid have been calculated in accordance with Item 402(v) of Regulation S-K and do not reflect compensation actually earned, realized or received by the Company’s NEOs. These amounts reflect the Summary Compensation Table Total with certain adjustments as described in footnote 3 below.
(3)
Compensation Actually Paid for 2025 reflects the exclusions and inclusions of certain amounts for the PEOs and the Non-PEO NEOs as set forth below. Equity values are calculated in accordance with FASB ASC Topic 718. Amounts in the Exclusion of Stock Awards and Option Awards column are the totals from the Stock Awards and Option Awards columns set forth in the Summary Compensation Table. Amounts in the Exclusion of Change in Pension Value column reflect the amounts attributable to the Change in Pension Value reported in the Summary Compensation Table. Amounts in the Inclusion of Pension Service Cost are based on the service cost for services rendered during the listed year.

 

Year

Summary
Compensation
Table Total for
Second PEO
($)

 

Exclusion of Change in Pension Value for Second PEO

 

Exclusion of
Stock Awards
and Option
Awards for
Second PEO
($)

 

Inclusion of Pension Service Cost for Second PEO

 

Inclusion of
Equity Values
for Second PEO
($)

 

Compensation
Actually Paid to
Second PEO
($)

 

2025

 

14,107,588

 

 

—

 

 

(11,219,848

)

 

—

 

 

38,248,737

 

 

41,136,477

 

 

Year

Average
Summary
Compensation
Table Total for
Non-PEO NEOs
($)

 

Average Exclusion of Change in Pension Value for Non-PEO NEOs
($)

 

Average
Exclusion of
Stock Awards
and Option
Awards for
Non-PEO NEOs
($)

 

Average Inclusion of Pension Service Cost for Non-PEO NEOs
($)

 

Average
Inclusion of
Equity Values
for Non-PEO
NEOs
($)

 

Average
Compensation
Actually Paid to
Non-PEO NEOs
($)

 

2025

 

4,891,214

 

 

(424

)

 

(3,520,928

)

 

—

 

 

7,735,594

 

 

9,105,456

 

 

The amounts in the Inclusion of Equity Values in the tables above are derived from the amounts set forth in the following tables:

 

Year

Year-End Fair
Value of Equity
Awards Granted
During Year
That Remained
Unvested as of
Last Day of
Year for
Second PEO
($)

 

Change in Fair
Value from Last
Day of Prior Year
to Last Day of
Year of Unvested
Equity Awards for
Second PEO
($)

 

Vesting-Date Fair
Value of Equity
Awards Granted
During Year that
Vested During
Year for Second
PEO
($)

 

Change in Fair
Value from Last
Day of Prior Year
to Vesting Date of
Unvested Equity
Awards that
Vested During
Year for Second
PEO
($)

 

Fair Value at Last
Day of Prior Year
of Equity Awards
Forfeited During
Year for Second
PEO
($)

 

Value of
Dividends or
Other Earnings
Paid on Equity
Awards Not
Otherwise
Included for
Second PEO
($)

 

Total-Inclusion
of Equity Values
for Second PEO
($)

 

2025

 

22,274,195

 

 

16,252,281

 

 

—

 

 

(277,739

)

 

—

 

 

—

 

 

38,248,737

 

 

Year

Average Year
End Fair Value of
Equity Awards
Granted During
Year That
Remained
Unvested as of
Last Day of Year
for Non-PEO
NEOs
($)

 

Average Change
in Fair Value from
Last Day of Prior
Year to Last Day
of Year of
Unvested Equity
Awards for Non-
PEO NEOs
($)

 

Average Vesting-
Date Fair Value of
Equity Awards
Granted During
Year that Vested
During Year for
Non-PEO NEOs
($)

 

Average Change
in Fair Value from
Last Day of Prior
Year to Vesting
Date of Unvested
Equity Awards
that Vested
During Year for
Non-PEO NEOs
($)

 

Average Fair
Value at Last Day
of Prior Year of
Equity Awards
Forfeited During
Year for Non-PEO
NEOs
($)

 

Average Value of
Dividends or
Other Earnings
Paid on Equity
Awards Not
Otherwise
Included for
Non-PEO NEOs
($)

 

Total - Average
Inclusion of
Equity Values for
Non-PEO NEOs
($)

 

2025

 

6,173,591

 

 

1,597,732

 

 

—

 

 

(35,729

)

 

—

 

 

—

 

 

7,735,594

 

 

 

(4)
The Peer Group TSR set forth in this table utilizes the Morningstar Global Semiconductor Equipment and Materials GR USD Industry Group (“Morningstar Global Semiconductor Equipment and Materials Index”), which we also utilize in the stock performance graph required by Item 201(e) of Regulation S-K included in our Annual Report for the year ended December 31, 2025. The comparison assumes $100 was invested for the period starting December 31, 2020, through the end of the listed year in the Company and in the Morningstar Global Semiconductor Equipment and Materials Index, respectively. Historical stock performance is not necessarily indicative of future stock performance.
(5)
We determined PBIT to be the most important financial performance measure used to link Company performance to Compensation Actually Paid to our PEOs and Non-PEO NEOs in 2025. PBIT is a non-GAAP financial measure. See Appendix A of this proxy statement for additional on PBIT and the reconciliation of this measure to the most directly comparable GAAP financial measures.

Relationship Between PEO and Non-PEO NEO Compensation Actually Paid and Company and Peer Group Total Shareholder Return

The following chart sets forth the relationship between Compensation Actually Paid to our PEOs, the average of Compensation Actually Paid to our Non-PEO NEOs, the Company’s cumulative TSR over the five most recently completed fiscal years, and the Peer Group’s TSR over the same period.

img3839911_163.gif

 

CEO compensation may appear higher than net income or TSR due to the timing and valuation of long-term incentive awards. The SEC’s definition of 'compensation actually paid' includes changes in the fair value of equity awards, which can fluctuate significantly based on stock price movements and vesting schedules.

 

Relationship Between PEO and Non-PEO NEO Compensation Actually Paid and Net Income

The following chart sets forth the relationship between Compensation Actually Paid to our PEOs, the average of Compensation Actually Paid to our Non-PEO NEOs, and our net income during the five most recently completed fiscal years.

 

img3839911_164.gif

 

CEO compensation may appear higher than net income or TSR due to the timing and valuation of long-term incentive awards. The SEC’s definition of 'compensation actually paid' includes changes in the fair value of equity awards, which can fluctuate significantly based on stock price movements and vesting schedules.

 

 

Relationship Between PEOs and Non-PEO NEO Compensation Actually Paid and PBIT

The following chart sets forth the relationship between Compensation Actually Paid to our PEOs, the average of Compensation Actually Paid to our Non-PEO NEOs and our PBIT during the five most recently completed fiscal years.

 

img3839911_165.gif

 

Tabular List of Most Important Financial Performance Measures

The following tabular list presents the financial performance measures that the Company considers to have been the most important in linking Compensation Actually Paid to our PEO and other Non-PEO NEOs for 2025 to Company performance. The measures in this list are not ranked.

 

Annual PBIT (component of NEO variable compensation)

Two-year rolling revenue growth rate (component of NEO variable compensation)

Three-year cumulative PBIT (component of NEO performance-based RSU awards)

Three-year TSR (component of NEO performance-based RSU awards)

 

            
Company Selected Measure Name PBIT PBIT PBIT PBIT PBIT    
Named Executive Officers, Footnote
(1)
Mark E. Jagiela was our PEO from 2014 to February 1, 2023 (First PEO). Gregory S. Smith has been our PEO since February 1, 2023 (Second PEO). The individuals comprising the Non-PEO NEOs for each year presented are listed below.

 

2021

2022

2023

2024

2025

Gregory S. Smith

Gregory S. Smith

Sanjay Mehta

Sanjay Mehta

Sanjay Mehta

Sanjay Mehta

Sanjay Mehta

Charles J. Gray

Ryan Driscoll

Ryan Driscoll

Charles J. Gray

Charles J. Gray

Richard J. Burns

Richard J. Burns

Michelle Turner

Bradford B. Robbins

Richard J. Burns

Ujjwal Kumar

Ujjwal Kumar

Regan Mills

 

 

 

 

Shannon Poulin
           
Peer Group Issuers, Footnote
(4)
The Peer Group TSR set forth in this table utilizes the Morningstar Global Semiconductor Equipment and Materials GR USD Industry Group (“Morningstar Global Semiconductor Equipment and Materials Index”), which we also utilize in the stock performance graph required by Item 201(e) of Regulation S-K included in our Annual Report for the year ended December 31, 2025. The comparison assumes $100 was invested for the period starting December 31, 2020, through the end of the listed year in the Company and in the Morningstar Global Semiconductor Equipment and Materials Index, respectively. Historical stock performance is not necessarily indicative of future stock performance.
            
Adjustment To PEO Compensation, Footnote
(3)
Compensation Actually Paid for 2025 reflects the exclusions and inclusions of certain amounts for the PEOs and the Non-PEO NEOs as set forth below. Equity values are calculated in accordance with FASB ASC Topic 718. Amounts in the Exclusion of Stock Awards and Option Awards column are the totals from the Stock Awards and Option Awards columns set forth in the Summary Compensation Table. Amounts in the Exclusion of Change in Pension Value column reflect the amounts attributable to the Change in Pension Value reported in the Summary Compensation Table. Amounts in the Inclusion of Pension Service Cost are based on the service cost for services rendered during the listed year.

 

Year

Summary
Compensation
Table Total for
Second PEO
($)

 

Exclusion of Change in Pension Value for Second PEO

 

Exclusion of
Stock Awards
and Option
Awards for
Second PEO
($)

 

Inclusion of Pension Service Cost for Second PEO

 

Inclusion of
Equity Values
for Second PEO
($)

 

Compensation
Actually Paid to
Second PEO
($)

 

2025

 

14,107,588

 

 

—

 

 

(11,219,848

)

 

—

 

 

38,248,737

 

 

41,136,477

 

 

Year

Average
Summary
Compensation
Table Total for
Non-PEO NEOs
($)

 

Average Exclusion of Change in Pension Value for Non-PEO NEOs
($)

 

Average
Exclusion of
Stock Awards
and Option
Awards for
Non-PEO NEOs
($)

 

Average Inclusion of Pension Service Cost for Non-PEO NEOs
($)

 

Average
Inclusion of
Equity Values
for Non-PEO
NEOs
($)

 

Average
Compensation
Actually Paid to
Non-PEO NEOs
($)

 

2025

 

4,891,214

 

 

(424

)

 

(3,520,928

)

 

—

 

 

7,735,594

 

 

9,105,456

 

 

The amounts in the Inclusion of Equity Values in the tables above are derived from the amounts set forth in the following tables:

 

Year

Year-End Fair
Value of Equity
Awards Granted
During Year
That Remained
Unvested as of
Last Day of
Year for
Second PEO
($)

 

Change in Fair
Value from Last
Day of Prior Year
to Last Day of
Year of Unvested
Equity Awards for
Second PEO
($)

 

Vesting-Date Fair
Value of Equity
Awards Granted
During Year that
Vested During
Year for Second
PEO
($)

 

Change in Fair
Value from Last
Day of Prior Year
to Vesting Date of
Unvested Equity
Awards that
Vested During
Year for Second
PEO
($)

 

Fair Value at Last
Day of Prior Year
of Equity Awards
Forfeited During
Year for Second
PEO
($)

 

Value of
Dividends or
Other Earnings
Paid on Equity
Awards Not
Otherwise
Included for
Second PEO
($)

 

Total-Inclusion
of Equity Values
for Second PEO
($)

 

2025

 

22,274,195

 

 

16,252,281

 

 

—

 

 

(277,739

)

 

—

 

 

—

 

 

38,248,737

 

 

Year

Average Year
End Fair Value of
Equity Awards
Granted During
Year That
Remained
Unvested as of
Last Day of Year
for Non-PEO
NEOs
($)

 

Average Change
in Fair Value from
Last Day of Prior
Year to Last Day
of Year of
Unvested Equity
Awards for Non-
PEO NEOs
($)

 

Average Vesting-
Date Fair Value of
Equity Awards
Granted During
Year that Vested
During Year for
Non-PEO NEOs
($)

 

Average Change
in Fair Value from
Last Day of Prior
Year to Vesting
Date of Unvested
Equity Awards
that Vested
During Year for
Non-PEO NEOs
($)

 

Average Fair
Value at Last Day
of Prior Year of
Equity Awards
Forfeited During
Year for Non-PEO
NEOs
($)

 

Average Value of
Dividends or
Other Earnings
Paid on Equity
Awards Not
Otherwise
Included for
Non-PEO NEOs
($)

 

Total - Average
Inclusion of
Equity Values for
Non-PEO NEOs
($)

 

2025

 

6,173,591

 

 

1,597,732

 

 

—

 

 

(35,729

)

 

—

 

 

—

 

 

7,735,594

 
           
Non-PEO NEO Average Total Compensation Amount $ 4,891,214 $ 2,936,103 $ 3,180,514 $ 2,665,821 $ 2,495,173    
Non-PEO NEO Average Compensation Actually Paid Amount $ 9,105,456 4,001,320 3,464,712 (1,673,638) 6,687,782    
Adjustment to Non-PEO NEO Compensation Footnote
(3)
Compensation Actually Paid for 2025 reflects the exclusions and inclusions of certain amounts for the PEOs and the Non-PEO NEOs as set forth below. Equity values are calculated in accordance with FASB ASC Topic 718. Amounts in the Exclusion of Stock Awards and Option Awards column are the totals from the Stock Awards and Option Awards columns set forth in the Summary Compensation Table. Amounts in the Exclusion of Change in Pension Value column reflect the amounts attributable to the Change in Pension Value reported in the Summary Compensation Table. Amounts in the Inclusion of Pension Service Cost are based on the service cost for services rendered during the listed year.

 

Year

Summary
Compensation
Table Total for
Second PEO
($)

 

Exclusion of Change in Pension Value for Second PEO

 

Exclusion of
Stock Awards
and Option
Awards for
Second PEO
($)

 

Inclusion of Pension Service Cost for Second PEO

 

Inclusion of
Equity Values
for Second PEO
($)

 

Compensation
Actually Paid to
Second PEO
($)

 

2025

 

14,107,588

 

 

—

 

 

(11,219,848

)

 

—

 

 

38,248,737

 

 

41,136,477

 

 

Year

Average
Summary
Compensation
Table Total for
Non-PEO NEOs
($)

 

Average Exclusion of Change in Pension Value for Non-PEO NEOs
($)

 

Average
Exclusion of
Stock Awards
and Option
Awards for
Non-PEO NEOs
($)

 

Average Inclusion of Pension Service Cost for Non-PEO NEOs
($)

 

Average
Inclusion of
Equity Values
for Non-PEO
NEOs
($)

 

Average
Compensation
Actually Paid to
Non-PEO NEOs
($)

 

2025

 

4,891,214

 

 

(424

)

 

(3,520,928

)

 

—

 

 

7,735,594

 

 

9,105,456

 

 

The amounts in the Inclusion of Equity Values in the tables above are derived from the amounts set forth in the following tables:

 

Year

Year-End Fair
Value of Equity
Awards Granted
During Year
That Remained
Unvested as of
Last Day of
Year for
Second PEO
($)

 

Change in Fair
Value from Last
Day of Prior Year
to Last Day of
Year of Unvested
Equity Awards for
Second PEO
($)

 

Vesting-Date Fair
Value of Equity
Awards Granted
During Year that
Vested During
Year for Second
PEO
($)

 

Change in Fair
Value from Last
Day of Prior Year
to Vesting Date of
Unvested Equity
Awards that
Vested During
Year for Second
PEO
($)

 

Fair Value at Last
Day of Prior Year
of Equity Awards
Forfeited During
Year for Second
PEO
($)

 

Value of
Dividends or
Other Earnings
Paid on Equity
Awards Not
Otherwise
Included for
Second PEO
($)

 

Total-Inclusion
of Equity Values
for Second PEO
($)

 

2025

 

22,274,195

 

 

16,252,281

 

 

—

 

 

(277,739

)

 

—

 

 

—

 

 

38,248,737

 

 

Year

Average Year
End Fair Value of
Equity Awards
Granted During
Year That
Remained
Unvested as of
Last Day of Year
for Non-PEO
NEOs
($)

 

Average Change
in Fair Value from
Last Day of Prior
Year to Last Day
of Year of
Unvested Equity
Awards for Non-
PEO NEOs
($)

 

Average Vesting-
Date Fair Value of
Equity Awards
Granted During
Year that Vested
During Year for
Non-PEO NEOs
($)

 

Average Change
in Fair Value from
Last Day of Prior
Year to Vesting
Date of Unvested
Equity Awards
that Vested
During Year for
Non-PEO NEOs
($)

 

Average Fair
Value at Last Day
of Prior Year of
Equity Awards
Forfeited During
Year for Non-PEO
NEOs
($)

 

Average Value of
Dividends or
Other Earnings
Paid on Equity
Awards Not
Otherwise
Included for
Non-PEO NEOs
($)

 

Total - Average
Inclusion of
Equity Values for
Non-PEO NEOs
($)

 

2025

 

6,173,591

 

 

1,597,732

 

 

—

 

 

(35,729

)

 

—

 

 

—

 

 

7,735,594

 
           
Compensation Actually Paid vs. Total Shareholder Return

Relationship Between PEO and Non-PEO NEO Compensation Actually Paid and Company and Peer Group Total Shareholder Return

The following chart sets forth the relationship between Compensation Actually Paid to our PEOs, the average of Compensation Actually Paid to our Non-PEO NEOs, the Company’s cumulative TSR over the five most recently completed fiscal years, and the Peer Group’s TSR over the same period.

img3839911_163.gif

            
Compensation Actually Paid vs. Net Income

Relationship Between PEO and Non-PEO NEO Compensation Actually Paid and Net Income

The following chart sets forth the relationship between Compensation Actually Paid to our PEOs, the average of Compensation Actually Paid to our Non-PEO NEOs, and our net income during the five most recently completed fiscal years.

 

img3839911_164.gif

            
Compensation Actually Paid vs. Company Selected Measure

Relationship Between PEOs and Non-PEO NEO Compensation Actually Paid and PBIT

The following chart sets forth the relationship between Compensation Actually Paid to our PEOs, the average of Compensation Actually Paid to our Non-PEO NEOs and our PBIT during the five most recently completed fiscal years.

 

img3839911_165.gif

            
Total Shareholder Return Vs Peer Group

Relationship Between PEO and Non-PEO NEO Compensation Actually Paid and Company and Peer Group Total Shareholder Return

The following chart sets forth the relationship between Compensation Actually Paid to our PEOs, the average of Compensation Actually Paid to our Non-PEO NEOs, the Company’s cumulative TSR over the five most recently completed fiscal years, and the Peer Group’s TSR over the same period.

img3839911_163.gif

            
Tabular List, Table

Tabular List of Most Important Financial Performance Measures

The following tabular list presents the financial performance measures that the Company considers to have been the most important in linking Compensation Actually Paid to our PEO and other Non-PEO NEOs for 2025 to Company performance. The measures in this list are not ranked.

 

Annual PBIT (component of NEO variable compensation)

Two-year rolling revenue growth rate (component of NEO variable compensation)

Three-year cumulative PBIT (component of NEO performance-based RSU awards)

Three-year TSR (component of NEO performance-based RSU awards)

 

            
Total Shareholder Return Amount $ 164.67 188.52 161.83 129.7 241.76    
Peer Group Total Shareholder Return Amount 258.77 247.21 256.87 161.36 246.09    
Net Income (Loss) $ 554,000,000 $ 542,400,000 $ 448,800,000 $ 715,500,000 $ 1,014,600,000    
Company Selected Measure Amount 22.2 20.4 20 28 33    
PEO Name           Gregory S. Smith Mark E. Jagiela
Additional 402(v) Disclosure
(2)
The amounts shown for Compensation Actually Paid have been calculated in accordance with Item 402(v) of Regulation S-K and do not reflect compensation actually earned, realized or received by the Company’s NEOs. These amounts reflect the Summary Compensation Table Total with certain adjustments as described in footnote 3 below.
            
Measure:: 1              
Pay vs Performance Disclosure              
Name Annual PBIT (component of NEO variable compensation)            
Measure:: 2              
Pay vs Performance Disclosure              
Name Two-year rolling revenue growth rate (component of NEO variable compensation)            
Measure:: 3              
Pay vs Performance Disclosure              
Name Three-year cumulative PBIT (component of NEO performance-based RSU awards)            
Measure:: 4              
Pay vs Performance Disclosure              
Name Three-year TSR (component of NEO performance-based RSU awards)            
Mark E. Jagiela              
Pay vs Performance Disclosure              
PEO Total Compensation Amount $ 0 $ 0 $ 6,258,433 $ 10,601,249 $ 10,954,713    
PEO Actually Paid Compensation Amount 0 0 3,226,601 (16,408,806) 37,477,207    
Gregory S. Smith              
Pay vs Performance Disclosure              
PEO Total Compensation Amount 14,107,588 11,760,656 10,110,437 0 0    
PEO Actually Paid Compensation Amount 41,136,477 $ 17,078,109 $ 10,526,155 $ 0 $ 0    
PEO | Equity Awards Adjustments, Excluding Value Reported in Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 38,248,737            
PEO | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 22,274,195            
PEO | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 16,252,281            
PEO | Vesting Date Fair Value of Equity Awards Granted and Vested in Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 0            
PEO | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount (277,739)            
PEO | Prior Year End Fair Value of Equity Awards Granted in Any Prior Year that Fail to Meet Applicable Vesting Conditions During Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 0            
PEO | Dividends or Other Earnings Paid on Equity Awards not Otherwise Reflected in Total Compensation for Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 0            
PEO | Gregory S. Smith | Aggregate Change in Present Value of Accumulated Benefit for All Pension Plans Reported in Summary Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 0            
PEO | Gregory S. Smith | Pension Adjustments Service Cost              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 0            
PEO | Gregory S. Smith | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount (11,219,848)            
PEO | Gregory S. Smith | Equity Awards Adjustments, Excluding Value Reported in Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 38,248,737            
Non-PEO NEO | Aggregate Change in Present Value of Accumulated Benefit for All Pension Plans Reported in Summary Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount (424)            
Non-PEO NEO | Pension Adjustments Service Cost              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 0            
Non-PEO NEO | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount (3,520,928)            
Non-PEO NEO | Equity Awards Adjustments, Excluding Value Reported in Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 7,735,594            
Non-PEO NEO | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 6,173,591            
Non-PEO NEO | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 1,597,732            
Non-PEO NEO | Vesting Date Fair Value of Equity Awards Granted and Vested in Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 0            
Non-PEO NEO | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount (35,729)            
Non-PEO NEO | Prior Year End Fair Value of Equity Awards Granted in Any Prior Year that Fail to Meet Applicable Vesting Conditions During Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount 0            
Non-PEO NEO | Dividends or Other Earnings Paid on Equity Awards not Otherwise Reflected in Total Compensation for Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount $ 0