v3.25.4
Pay vs Performance Disclosure
 4 Months Ended 8 Months Ended 12 Months Ended
Dec. 31, 2025
Aug. 18, 2025
Dec. 31, 2025
USD ($)
Dec. 31, 2024
USD ($)
Dec. 31, 2023
USD ($)
Dec. 31, 2022
USD ($)
Dec. 31, 2021
USD ($)
Pay vs Performance Disclosure              
Pay vs Performance Disclosure, Table    
Summary Compensation
Table Total(2)
Compensation
Actually Paid(3)
Average
Summary
Compensation
Table Total
Non-PEO
Named
Executive(2)
Officers
($)
Average
Compensation
Actually Paid to
Non-PEOs
Named Executive
Officers(4)
($)
Value Of Initial Fixed
$100 Investment
Based on:
Net Income
($ In Millions)
Adjusted
EBITDA
as a
Percentage
of Net Sales(6)
Year(1)
for PEO – David Reeder
($)
for PEO – Bertrand Loy
($)
to PEO – David Reeder
($)
to PEO – Bertrand Loy
($)
Total
Shareholder
Return
($)
Peer Group
Total
Shareholder
Return(5)
($)
(a)
(b)
(c)
(d)
(e)
(f)
(g)
(h)
(i)
(j)
(k)
2025
11,507,888 
14,324,681 
11,353,804 
5,912,183 
2,726,268 
1,307,121 
89.31 
268.23 
235.6 
27.7
%
2024
17,368,723 
5,755,074 
3,013,740 
1,329,320 
201.58 
287.31 
292.8 
28.7
%
2023
13,405,690 
32,727,950 
2,925,224 
4,304,294 
243.04 
238.72 
180.7 
26.7
%
2022
12,071,147 
(14,955,812)
4,032,331 
(1,180,462)
132.44 
142.94 
208.9 
29.7
%
2021
10,498,881 
28,998,082 
2,531,346 
6,304,090 
278.79 
219.50 
409.1 
30.4
%
        
Company Selected Measure Name     Adjusted EBITDA as a percentage of net sales        
Named Executive Officers, Footnote     The PEO and non-PEO NEOs for the applicable years were as follows:
2025: Mr. Loy served as our PEO through August 18, 2025. Mr. Reeder served as PEO as of August 18, 2025; Ms. LaGorga, Ms. Rice, Mr. Colella and Mr. Woodland served as our non-PEO NEOs.
2024: Mr. Loy served as our PEO; Ms. LaGorga, Ms. Rice, Mr. Woodland and Mr. Colella served as our non-PEO NEOs.
2023: Mr. Loy served as our PEO; Ms. LaGorga, Mr. Woodland, Ms. Rice, Mr. Colella, Mr. Graves and Mr. Tison served as our non-PEO NEOs.
2022: Mr. Loy served as our PEO; Mr. Graves, Mr. Edlund, Ms. Rice, Mr. Colella and Mr. Woodland served as our non-PEO NEOs.
2021: Mr. Loy served as our PEO; Mr. Graves, Mr. Edlund, Ms. Rice and Mr. Haris served as our non-PEO NEOs.
        
Peer Group Issuers, Footnote     The peer group for each listed fiscal year consists of the companies listed in the Philadelphia Semiconductor Index TSR effective as of December 31, 2025.        
Adjustment To PEO Compensation, Footnote     PEO - Compensation Actually Paid
The amounts in the following table represent each of the amounts deducted and added to the equity award values for the PEO for the applicable year for purposes of computing the “compensation actually paid” amounts appearing in columns (d) and (e) of the Pay Versus Performance table:
Year
Name
Summary Compensation
Table Total for PEO
($)
Value of Summary
Compensation Table
Stock Awards
and Option Awards
($)
Year-end Fair Value of
Equity Awards Granted
During Applicable Year that
Remain Unvested
as of Year-End
($)
Change In Fair Value as
of Year-end of Any Prior
Year Awards That
Remain Unvested
as of Year-End
($)
Change In Fair Value
as of the Vesting
Date of Any Prior Year
Awards that Vested
Applicable Year
($)
Compensation
Actually Paid
($)
2025
Reeder
11,507,888 
(10,561,875)
10,451,281 
— 
(43,490)
11,353,804 
Loy
14,324,681 
(12,396,297)
9,907,951 
(6,266,671)
342,519 
5,912,183 
2024
Loy
17,368,723 
(14,896,910)
8,352,366 
(7,041,893)
1,972,788 
5,755,074 
2023
Loy
13,405,690 
(11,132,369)
18,504,501 
8,861,419 
3,088,709 
32,727,950 
2022
Loy
12,071,147 
(9,472,554)
3,338,027 
(19,164,110)
(1,728,323)
(14,955,812)
2021
Loy
10,498,881 
(7,513,579)
12,131,903 
12,448,578 
1,432,299 
28,998,082 
        
Non-PEO NEO Average Total Compensation Amount     $ 2,726,268 $ 3,013,740 $ 2,925,224 $ 4,032,331 $ 2,531,346
Non-PEO NEO Average Compensation Actually Paid Amount     $ 1,307,121 1,329,320 4,304,294 (1,180,462) 6,304,090
Adjustment to Non-PEO NEO Compensation Footnote     Average non-PEO NEO Compensation Actually Paid
The amounts in the following table represent each of the amounts deducted and added to the equity award values for the non-PEO NEOs for the applicable year for purposes of computing the “compensation actually paid” amounts appearing in column (g) of the Pay Versus Performance table:
Year
Average Summary
Compensation Table
Total for Non-PEO Named
Executive Officers
($)
Average Value of
Summary Compensation
Table Stock Awards and
Option Awards
($)
Average Year-End Fair
Value of Equity Awards
Granted During Applicable
Year that Remain Unvested
as of Year-End
($)
Average Change in Fair
Value as of Year-End of
Any Prior Year Awards
that Remain Unvested
as of Year-End
($)
Average Change in Fair
Value as of the Vesting
Date of Any Prior Year
Awards that
Vested During
Applicable Year
($)
Average Compensation
Actually Paid to Non-PEO
Named Executive
Officers
($)
2025
2,726,268 
(1,861,949)
1,488,192 
(959,241)
(86,149)
1,307,121 
2024
3,013,740 
(2,077,222)
1,164,597 
(924,955)
153,160 
1,329,320 
2023
2,925,224 
(2,073,091)
2,621,341 
737,908 
92,912 
4,304,294 
2022
4,032,331 
(3,178,153)
901,518 
(2,611,814)
(324,344)
(1,180,462)
2021
2,531,346 
(1,428,038)
2,305,895 
2,487,675 
407,212 
6,304,090 
        
Compensation Actually Paid vs. Total Shareholder Return    
COMPENSATION ACTUALLY PAID VS. TSR (COMPANY TSR & PEER GROUP TSR)
11544872114586
n
PEO CAP - David Reeder
n
PEO CAP - Betrand Loy
n
NEO Avg CAP
02_PRO013569_icon_tickers_peergrouptsr.jpg 
Entegris Cumulative TSR
02_PRO013569_icon_tickers_entegristsr.jpg 
Peer Group Cumulative TSR
        
Compensation Actually Paid vs. Net Income    
COMPENSATION ACTUALLY PAID VS. NET INCOME
11544872114790
n
PEO CAP - David Reeder
n
PEO CAP - Betrand Loy
n
NEO Avg CAP
02_PRO013569_icon_tickers_peergrouptsr.jpg 
Net Income
        
Compensation Actually Paid vs. Company Selected Measure    
COMPENSATION ACTUALLY PAID VS. ADJUSTED EBITDA AS A PERCENTAGE OF NET SALES
11544872114800
n
PEO CAP - David Reeder
n
PEO CAP - Betrand Loy
n
NEO Avg CAP
02_PRO013569_icon_tickers_peergrouptsr.jpg 
Adjusted EBITDA Margin
        
Total Shareholder Return Vs Peer Group    
Entegris and Philadelphia Semiconductor Index TSR
The following graphic compares the cumulative total shareholder return (“TSR”) on our common stock from December 31, 2020 through December 31, 2025 with the cumulative total return of the Philadelphia Semiconductor Index, assuming $100 was invested at the close of trading December 31, 2020 in our common stock and the Philadelphia Semiconductor Index and that all dividends are reinvested.
11544872114732
02_PRO013569_icon_tickers_entegrisinc.jpg 
Entegris, Inc.
02_PRO013569_icon_tickers_philadelphia.jpg 
Philadelphia Semiconductor Index
        
Total Shareholder Return Amount     $ 89.31 201.58 243.04 132.44 278.79
Peer Group Total Shareholder Return Amount     268.23 287.31 238.72 142.94 219.50
Net Income (Loss)     $ 235,600,000 $ 292,800,000 $ 180,700,000 $ 208,900,000 $ 409,100,000
Company Selected Measure Amount     0.277 0.287 0.267 0.297 0.304
PEO Name Mr. Reeder Mr. Loy   Mr. Loy Mr. Loy Mr. Loy Mr. Loy
Additional 402(v) Disclosure     The Summary Compensation Table totals reflected are as reported for the PEO and the average of the non-PEO NEOs for each of the years shown.        
Measure:: 1              
Pay vs Performance Disclosure              
Name     Adjusted EBITDA Margin        
Non-GAAP Measure Description     The Company has identified Adjusted EBITDA as a percentage of net sales as our company-selected measure, as it represents the most important financial performance measure used to link compensation actually paid to the PEO and the non-PEO NEOs in 2025 to the Company’s performance. See Appendix A for more information on the Company’s use of non-GAAP metrics, including GAAP to non-GAAP reconciliations.        
Measure:: 2              
Pay vs Performance Disclosure              
Name     Relative TSR        
Measure:: 3              
Pay vs Performance Disclosure              
Name     Revenue Growth in excess of our markets        
Measure:: 4              
Pay vs Performance Disclosure              
Name     Free Cash Flow Margin        
Reeder [Member]              
Pay vs Performance Disclosure              
PEO Total Compensation Amount     $ 11,507,888        
PEO Actually Paid Compensation Amount     11,353,804        
Loy [Member]              
Pay vs Performance Disclosure              
PEO Total Compensation Amount     14,324,681 $ 17,368,723 $ 13,405,690 $ 12,071,147 $ 10,498,881
PEO Actually Paid Compensation Amount     5,912,183 5,755,074 32,727,950 (14,955,812) 28,998,082
PEO | Reeder [Member] | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     (10,561,875)        
PEO | Reeder [Member] | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     10,451,281        
PEO | Reeder [Member] | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     0        
PEO | Reeder [Member] | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     (43,490)        
PEO | Loy [Member] | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     (12,396,297) (14,896,910) (11,132,369) (9,472,554) (7,513,579)
PEO | Loy [Member] | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     9,907,951 8,352,366 18,504,501 3,338,027 12,131,903
PEO | Loy [Member] | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     (6,266,671) (7,041,893) 8,861,419 (19,164,110) 12,448,578
PEO | Loy [Member] | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     342,519 1,972,788 3,088,709 (1,728,323) 1,432,299
Non-PEO NEO | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     (1,861,949) (2,077,222) (2,073,091) (3,178,153) (1,428,038)
Non-PEO NEO | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     1,488,192 1,164,597 2,621,341 901,518 2,305,895
Non-PEO NEO | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     (959,241) (924,955) 737,908 (2,611,814) 2,487,675
Non-PEO NEO | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year              
Pay vs Performance Disclosure              
Adjustment to Compensation, Amount     $ (86,149) $ 153,160 $ 92,912 $ (324,344) $ 407,212