The SiTime Corporation 2019 Stock Incentive Plan (the “2019 Plan”) provides for the grant of incentive stock options, non-statutory stock options, restricted stock awards, restricted stock unit awards, stock appreciation rights, performance stock awards, and other forms of equity compensation (collectively, “stock awards”), and cash awards, all of which may be granted to employees (including officers), directors, and consultants or affiliates. Awards granted under the 2019 Plan vest at the rate specified by the plan administrator, for restricted stock unit awards primarily within the quarter up to five years. As of December 31, 2025, 2.2 million shares were available for future issuance.

The SiTime Corporation 2022 Inducement Award Plan (the "2022 Plan"), which initially reserved 250,000 shares of the Company's common stock, provides for the grant of incentive stock options, non-statutory stock options, restricted stock awards, restricted stock unit awards, stock appreciation rights, and other forms of equity compensation and cash awards, all of which may be granted to employees (including officers). Awards granted under the 2022 Plan vest at the rate specified by the plan administrator, for restricted stock unit awards primarily over one to four years. In February 2023, the Company amended and restated the 2022 Plan to reserve an additional 250,000 shares of the Company's common stock. As of December 31, 2025, 176,524 shares were available for future issuance.

On August 4, 2020, the Compensation Committee of the Board adopted and approved the Executive Bonus and Retention Plan (the "Bonus and Retention Plan"). In January 2023 and March 2024, the Compensation Committee approved target bonus amounts and performance goals for the fiscal year 2023 (the “2023 Goals”) and fiscal year 2024 (the "2024 Goals"), respectively. In February 2025, the Compensation Committee approved target bonus amounts based on the achievement of revenue and individual performance goals for the fiscal year 2025 (the "2025 Goals"). The 2023 Goals, 2024 Goals, and 2025 Goals are based on the achievement of revenue and Non-GAAP operating profit, as well as individual performance goals. The awards for the actual payouts are granted in the quarter following the end of the performance period and vest as per the Compensation Committee approval. The target bonuses were granted based on a fixed dollar amount to be settled in RSUs on the vesting date and hence the awards have been classified as liability-based awards until settled. Such expense is included in the non-cash adjustment within stock-based compensation expense on the consolidated cash flow statements. The liability of $5.9 million for the 2025 Goals was recorded as accrued expenses and other current liabilities in the consolidated balance sheet as of December 31, 2025. Actual payouts ranged from 0% to 45% of target for the 2023 Goals, ranged from 170% to 200% of target for the 2024 Goals and 2025 Goals, in each case based on performance.

In April 2022, the Company adopted a bonus plan for certain employees. The target bonuses are granted based on a fixed dollar amount to be settled in RSUs in the quarter following the end of the performance period. Due to the fixed dollar amount targets, the awards have been classified as liability-based awards until settled. Once settled, these awards are reflected as RSUs granted in the table below. Such expense is included in the non-cash adjustment within stock-based compensation expense on the consolidated cash flow statements and was $3.9 million for the year ended December 31, 2025. The liability of $1.1 million was recorded as accrued expenses and other current liabilities in the consolidated balance sheet as of December 31, 2025.

In February 2022, the Compensation Committee of the Company approved and granted to certain of the Company’s executive officers MYPSUs with vesting based on achievement of stock price targets, which are measured based on the 60-trading day average per share closing price of the Company’s common stock on the Nasdaq Global Market during the performance periods of up to six years from the date of grant, subject to the continued service of the grantee through the vest date. The grant-date fair value of each MYPSU was determined using a Monte Carlo simulation model. The assumptions used in the Monte Carlo simulation included expected volatility of 44.4%, risk free rate of 1.83%, no

expected dividend yield, expected term of six years and possible future stock prices over the performance period based on historical stock and market prices. The Company recognizes the expense related to the MYPSUs on a graded-vesting method over the requisite service period. To date, no MYPSUs have vested.

In February 2023 and March 2023, the Compensation Committee of the Company approved PRSUs for the year 2023 with performance goals based on the achievement of revenue over a one year performance period (the “PRSU 2023 Goals”) and achievement of relative total stockholder return with a two year performance period (the "2023 TSR PRSU Goals"). The grant-date fair value of each PRSU with 2023 TSR PRSU Goals was determined using a Monte Carlo simulation model. The assumptions used in the Monte Carlo simulation included expected volatility of 84.0% and 83.8%, risk free rate of 4.67% and 4.05%, no expected dividend yield, and expected term of 1.9 years and 1.8 years for the awards approved in February 2023 and March 2023, respectively. The Company recognizes the expense related to the PRSUs with PRSU 2023 Goals and PRSUs with 2023 TSR PRSU Goals on a graded-vesting method over the requisite performance period. These grants are included in the PRSU awards granted in the table below.

In March 2024 and August 2024, the Compensation Committee of the Company approved PRSUs for the fiscal year 2024 with performance goals based on the achievement of relative total stockholder return with a two year and a three year performance period (the "2024 TSR PRSU Goals"). The grant-date fair value of each PRSU was determined using Monte Carlo simulation model. The assumptions used in the Monte Carlo simulation for the March 2024 awards included expected volatility of 74.7%, risk free rate of 4.5%, no expected dividend yield and expected term of 2.8 years. The assumptions used in the Monte Carlo simulation for the August 2024 awards included expected volatility ranging from 60.5% to 71.9%, risk free rate ranging from 3.9% to 4.3%, no expected dividend yield and expected term ranging from 1.4 years to 2.4 years. The Company recognizes the expense related to the 2024 TSR PRSU Goals on a graded-vesting method over the requisite performance period. These grants are included in the PRSU awards granted in the table below.

In February 2025, the Compensation Committee of the Company approved PRSUs for the fiscal year 2025 with performance goals based on the achievement of relative total stockholder return with a three year performance period (the "2025 TSR PRSU Goals"). The grant-date fair value of each PRSU was determined using Monte Carlo simulation model. The assumptions used in the Monte Carlo simulation for the awards included expected volatility ranging from 72.6% to 72.9%, risk free rate of 4.3%, no expected dividend yield and expected term of 2.9 years. The Company recognizes the expense related to the 2025 TSR PRSU Goals on a graded-vesting method over the requisite performance period. These grants are included in the PRSU awards granted in the table below.


	RSU			PRSU			MYPSU
	Number of Shares	Grant Date Fair Value per share		Number of Shares	Grant Date Fair Value per share		Number of Shares	Grant Date Fair Value per share

Unvested at December 31, 2024	915,152	$	128.7	210,044	104.3		285,880	$	88.6
Granted	442,745	186.4		155,565	187.8		—	—
Vested	(629,986)	143.8		(53,090)	167.8		—	—
Forfeited	(44,920)	150.4		—	—		—	—
Unvested at December 31, 2025	682,991	$	150.7	312,519	$	135.1	285,880	$	88.6

The difference between the number of RSUs vested and the shares of common stock issued during the year ended December 31, 2025 and 2024 is the result of RSUs withheld in satisfaction of minimum tax withholding obligations associated with the vesting. The weighted-average grant date fair value for RSUs granted for the years ended December 31, 2025, 2024, and 2023 was $186.4, $117.0, and $120.1 per share, respectively. The weighted-average grant date fair value for PRSUs granted for the years ended December 31, 2025 and 2024 was $187.8 and $82.8 per share, respectively. No PRSUs were granted for the year ended December 31, 2023. No MYPSUs were granted for the years ended December 31, 2025, 2024, and 2023. The total grant date fair value, as of the vesting date, of awards vested during the years ended December 31, 2025, 2024, and 2023 were $90.6 million, $80.2 million, and $55.6 million, respectively.


	Year Ended December 31,
	2025		2024		2023

	(in thousands)
Equity based awards
Cost of revenue	$	2,838	$	1,553	$	2,765
Research and development	38,417		34,247		30,893
Selling, general and administrative	52,216		47,632		39,111
	$	93,471	$	83,432	$	72,769

Liability based awards - to be settled in equity
Cost of revenue	$	288	$	100	$	75
Research and development	4,112		3,701		2,017
Selling, general and administrative	5,669		5,401		1,892
	$	10,069	$	9,202	$	3,984
Total stock-based compensation - equity and liability based	$	103,540	$	92,634	$	76,753

Stock-based compensation expense recorded to additional paid-in capital
Equity based awards	$	93,471	$	83,432	$	72,769
Liability based awards - settled in equity	9,391		4,554		3,869
Stock compensation expense capitalized to / (amortized from) to inventory	(509)		1,136		—
Total stock-based compensation expense recorded to additional paid-in capital	$	102,353	$	89,122	$	76,638