v3.25.4
COVER - USD ($)
shares in Millions, $ in Billions
12 Months Ended
Dec. 31, 2025
Feb. 06, 2026
Jun. 28, 2025
Cover [Abstract]      
Document Type 10-K    
Document Annual Report true    
Document Period End Date Dec. 31, 2025    
Current Fiscal Year End Date --12-31    
Document Transition Report false    
Entity File Number 001-32598    
Entity Registrant Name Entegris, Inc.    
Entity Incorporation, State or Country Code DE    
Entity Tax Identification Number 41-1941551    
Entity Address, Address Line One 129 Concord Road    
Entity Address, City or Town Billerica    
Entity Address, State or Province MA    
Entity Address, Postal Zip Code 01821    
City Area Code 978    
Local Phone Number 436-6500    
Title of 12(b) Security Common Stock, $0.01 Par Value    
Trading Symbol ENTG    
Security Exchange Name NASDAQ    
Entity Well-known Seasoned Issuer Yes    
Entity Voluntary Filers No    
Entity Current Reporting Status Yes    
Entity Interactive Data Current Yes    
Entity Filer Category Large Accelerated Filer    
Entity Small Business false    
Entity Emerging Growth Company false    
ICFR Auditor Attestation Flag true    
Document Financial Statement Error Correction false    
Entity Shell Company false    
Entity Public Float     $ 8.5
Entity Common Stock, Shares Outstanding   152.0  
Documents Incorporated by Reference
Portions of the registrant’s Definitive Proxy Statement for its 2026 Annual Meeting of Stockholders scheduled to be held on May 6, 2026 (the “2026 Proxy Statement”) which is scheduled to be filed with the Securities and Exchange Commission (the “SEC”) not later than 120 days after December 31, 2025, are incorporated by reference into Part III of this Annual Report on Form 10-K. With the exception of the portions of the 2026 Proxy Statement expressly incorporated into this Annual Report on Form 10-K by reference, such document shall not be deemed to constitute part of this Annual Report on Form 10-K.
   
Amendment Flag false    
Document Fiscal Year Focus 2025    
Document Fiscal Period Focus FY    
Entity Central Index Key 0001101302