v3.25.1
Document And Entity Information
May 07, 2025
Cover [Abstract]  
Document Type 8-K
Amendment Flag false
Document Period End Date May 07, 2025
Entity Registrant Name MKS INSTRUMENTS, INC.
Entity Central Index Key 0001049502
Entity Emerging Growth Company false
Entity File Number 000-23621
Entity Incorporation, State or Country Code MA
Entity Tax Identification Number 04-2277512
Entity Address, Address Line One 2 Tech Drive
Entity Address, Address Line Two Suite 201
Entity Address, City or Town Andover
Entity Address, State or Province MA
Entity Address, Postal Zip Code 01810
City Area Code 978
Local Phone Number 645-5500
Entity Information, Former Legal or Registered Name Not Applicable
Written Communications false
Soliciting Material false
Pre-commencement Tender Offer false
Pre-commencement Issuer Tender Offer false
Title of 12(b) Security Common Stock, no par value
Trading Symbol MKSI
Security Exchange Name NASDAQ