FORM 4 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940
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 Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
1. Name and Address of Reporting Person *
WILLS RICHARD H
(Last) (First) (Middle)
13900 NW SCIENCE PARK DR.
(Street)
PORTLAND OR 97229
(City) (State) (Zip)
2. Issuer Name and Ticker or Trading Symbol
ELECTRO SCIENTIFIC INDUSTRIES INC [ ESIO ] 		5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
X Director 10% Owner
Officer (give title below) Other (specify below)
3. Date of Earliest Transaction (Month/Day/Year)
09/12/2014
4. If Amendment, Date of Original Filed (Month/Day/Year)
 6. Individual or Joint/Group Filing (Check Applicable Line)
X Form filed by One Reporting Person
Form filed by More than One Reporting Person
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3) 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code (Instr. 8) 4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5) 5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4) 6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 7. Nature of Indirect Beneficial Ownership (Instr. 4)
Code V Amount (A) or (D) Price
Common Stock 09/12/2014   A (1)   297.1428 A $ 0 27,597.1428 D  
Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3) 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code (Instr. 8) 5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5) 6. Date Exercisable and Expiration Date (Month/Day/Year) 7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4) 8. Price of Derivative Security (Instr. 5) 9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4) 10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 11. Nature of Indirect Beneficial Ownership (Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Explanation of Responses:
1. These awards result from dividend equivalents pursuant to the underlying RSU agreements.
By: Kerry L. Mustoe, Attorney-in-Fact For: Richard H. Wills 09/15/2014
** Signature of Reporting Person Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
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EDGAR SUPPORTING DOCUMENT 
POWER OF ATTORNEY (Section 16(a) Reporting)

KNOW ALL MEN BY THESE PRESENTS, that the undersigned, an officer, 
directorand/or shareholder of Electro Scientific Industries, Inc. 
(the "Company"),  does hereby constitute and appoint Edward Grady, 
Paul Oldham and Kerry Mustoe, and any one of them, his true and 
lawful attorney and agent to execute in his name any and all reports 
required to be filed under Section 16(a) of the Securities Exchange 
Act of 1934 with respect to equity securities of the Company; and to 
file the same with the Securities and Exchange Commission and any 
applicable stock exchange; and the undersigned does hereby ratify 
and confirm all that said attorneys and agents, or any of them, 
shall do or cause to be done by virtue hereof.

This Power of Attorney revokes all prior Powers of Attorney relating
to reporting underSection 16(a) with respect to equity securities 
of the Company and shall remain in effect until revoked by a subsequently 
filed instrument.


Date:  August 25, 2014				/s/ Richard H. Wills 
								Richard H. Wills